
11
Appendix A – Specification
Values in this table define the contribution of the RLI20 on the
system performance, not the complete laser interferometer
system performance.
Measurement performance
PMI
†
RRI
‡
LSB resolution
1 nm
2 nm
Maximum speed
1 m/s*
2 m/s*
Positional noise contribution (RMS)
1 nm
2 nm
SDE
contribution
Velocity <50 mm/s (PMI)
<100 mm/s (RRI)
Serial strength >70% and <115%
<±0.5 nm
<±1 nm
Velocity
>50 mm/s and <1 m/s (PMI)
>100 mm/s and <2 m/s (RRI)
<±2 nm
<±4 nm
* Panasonic interface is limited to 400 mm/sec
†
Plane mirror interferometer
‡
Retroreflector interferometer
Dimensions
Length
350 mm (13.8 in)
Width
42 mm (1.65 in)
Depth
133.5 mm (5.26 in) not including connectors
Weight
1.0 kg
RLI20 power requirement
Voltage
24 ±5 V
Power
3 W
The 24 V power supply should be single fault tolerant certified to
EN (IEC) 60950-1.
Environmental specification
Pressure
Normal atmospheric
(650 mbar - 1150 mbar)
Humidity
0 - 95% RU (non-condensing)
Temperature
(storage)
-20° C to +70° C
Temperature
(operating)
+10° C to +40° C
Specification