3D measuring performance
To standard ASME B89.4.1 – 1997 for point to point measurement.
Typically, the 3D measuring performance ﴾spherical characteristic﴿ is better than 2 μm. This means that no matter from which direction the
probe triggers, the maximum error will be less than 2 μm when standard qualification techniques have been employed using styli up to 50
mm long.
The 3D measuring performance of the probe considers the following sources of probe error:
Unidirectional repeatability
XYZ pretravel variation
Stylus ball sphericity
The table below only applies to TP7M with the additional styli:
Stylus configuration
Performance
parameters
Sensitivity setting -
level 1
Sensitivity setting -
level 2
Straight
100 mm long
Unidirectional
repeatability
0.5 μm
0.5 μm
2D form measurement
deviation
±1 μm
±2 μm
3D form measurement
deviation
±1.5 μm
±3.5 μm
150 mm long
Unidirectional
repeatability
0.7 μm
0.7 μm
2D form measurement
deviation
±1.5 μm
±2.5 μm
3D form measurement
deviation
±2.5 μm
±6 μm
Offset
5 mm long,
50 mm offset
2D form measurement
deviation
±0.4 μm
±0.8 μm
3D form measurement
deviation
±0.5 μm
±1 μm
50 mm long,
50 mm offset
2D form measurement
deviation
±0.7 μm
±1.3 μm
3D form measurement
deviation
±1 μm
±1.8 μm
TP7 user's guide
www.renishaw.com
Issued 10 2019
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