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21
5
Installation
5.1
Setup procedure
①
Take the instrument out of the crate.
*Refer to the unpacking procedures attached to take out.
・
Setting of the instrument shall be made by field service
personnel authorized by PSS.
Contact us when you transfer the instrument.
②
Remove protection films attached on the instrument
and
desiccant
.
③
Remove shipping
jigs to fix movable parts
.
④
Remove the cushioning.
⑤
Connect Power Cable to Power Inlet Connector on the back of
the instrument. Then turn Power Switch on assuring that
Front Door is closed securely.
・
Do not use power cable other than provided to avoid
troubles such as temporary blackout or fire breaking.
⑥
Installation Completed.
・
When transferring the instrument, make sure that all the
fixing jigs for all axes are attached securely and that
cushioning is set between Magtration Unit and Stage Unit
to protect nozzles from free movement.
Caution
Caution
Warning