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Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany
Phone +49 721 4846-0, Fax +49 721 4846-1019, Email [email protected], www.pi.ws

PZ258E

P763 Nanopositioner

User Manual

Version: 1.1.0

Date: 17.06.2020

This document describes the following product:



P763.22C

Compact XY nanopositioner with clear

aperture, 200 µm × 200 µm, direct position

measuring, capacitive sensors

Содержание P--763 Series

Страница 1: ...721 4846 0 Fax 49 721 4846 1019 Email info pi ws www pi ws PZ258E P 763 Nanopositioner User Manual Version 1 1 0 Date 17 06 2020 This document describes the following product P 763 22C Compact XY nan...

Страница 2: ...I GmbH Co KG Karlsruhe Germany The text photographs and drawings in this manual are protected by copyright With regard thereto Physik Instrumente PI GmbH Co KG retains all the rights The use of any te...

Страница 3: ...ct Labeling 10 3 3 Scope of Delivery 11 3 4 Suitable Electronics 11 3 5 Required Accessories 11 3 6 Technical Features 12 3 6 1 PICMA Piezo Actuators 12 3 6 2 Flexure Guides 12 3 6 3 Capacitive Sensor...

Страница 4: ...mer Service 31 10 Technical Data 33 10 1 Specifications 33 10 1 1 Data Table 33 10 1 2 Maximum Ratings 34 10 2 Ambient Conditions and Classifications 34 10 3 Dimensions 35 10 4 Torque for Stainless St...

Страница 5: ...chnology drive technologies and suitable safety measures is assumed The latest versions of the user manuals are available for download p 3 on our website 1 2 Symbols and Typographic Conventions The fo...

Страница 6: ...lors proportions and degree of detail in illustrations can deviate from the actual circumstances Photographic illustrations may also differ and must not be seen as guaranteed properties 1 4 Other Appl...

Страница 7: ...t p 31 Downloading manuals 1 Open the website www pi ws 2 Search the website for the product number e g P 763 or the product family e g Nanopositioner 3 Click the corresponding product to open the pro...

Страница 8: ......

Страница 9: ...h suitable electronics p 11 available from PI The electronics are not included in the P 763 s scope of delivery The electronics must provide the required operating voltages To ensure proper performanc...

Страница 10: ...with an internal discharge resistor Do not pull the connectors out of the electronics during operation Do not touch the contacts in the connectors Use screws to secure the P 763 s connectors against b...

Страница 11: ...al notes If you give the P 763 to a third party include this user manual as well as other relevant information provided by the manufacturer Do the work only if the user manual is complete Missing info...

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Страница 13: ...essories 11 Technical Features 12 3 1 Product View The figure serves as an example and can differ from your positioner model Figure 1 Exemplary product view of the P 763 1 Base body 2 Platform 3 Cable...

Страница 14: ...o the manual Old equipment disposal p 39 Country of origin Germany Country of origin WWW PI WS Manufacturer s address website CE conformity mark Symbol for the protective earth conductor marks the pro...

Страница 15: ...itive sensors D sub 25W3 socket E 727 3CDA Digital multi channel piezo controller 3 axes 30 to 130 V capacitive sensors D sub 25W3 socket analog inputs E 727 3CDP Digital multi channel piezo controlle...

Страница 16: ...sliding parts Flexure elements have a high stiffness and load capacity Flexure guides are maintenance and wear free They are 100 vacuum compatible function in a wide temperature range and do not requi...

Страница 17: ...as well as loss of accuracy Do not touch any sensitive parts e g platform when handling the P 763 1 Unpack the P 763 with care 2 Compare the contents with the scope of delivery according to the contr...

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Страница 19: ...piezo actuators can be destroyed by an abrupt contraction Do not open the P 763 Discharge the P 763 s piezo actuators before installing Connect the P 763 to the switched off electronics from PI equipp...

Страница 20: ...ectly tightened screws can cause damage Pay attention to the torque range p 36 specified for the screws used during installation INFORMATION Extension cables can reduce the positioning accuracy of the...

Страница 21: ...cting the protective earth conductor Suitable screwdriver Figure 3 Connecting the protective earth conductor profile view 1 Base body of the P 763 2 Flat washer 3 Lock washer 4 Screw 5 Cable lug 6 Pro...

Страница 22: ...expansion properties as the P 763 NOTICE Tensile stress when mounted vertically When the P 763 is mounted vertically certain alignments can cause tensile stress that reduces the preload and destroys...

Страница 23: ...es in the base body and the underlying surface are in line 2 Mount the P 763 from below onto the underlying surface a Insert the screws through the holes in the underlying surface into the base body o...

Страница 24: ...y from the center of the platform e g tall loads and unwanted lever effect the P 763 can be damaged by high strain on the flexure guides high torques and oscillation especially when operated dynamical...

Страница 25: ...he electronics Tools and accessories Screws of suitable size and length p 35 Suitable screwdriver Fixing the Load 1 Align the load on the P 763 so that the mounting holes in the load and the holes in...

Страница 26: ......

Страница 27: ...ect the P 763 to the protective earth conductor before restarting NOTICE Destruction of the piezo actuator due to electric flashovers Using the P 763 in environments that increase the electrical condu...

Страница 28: ...n is indicated by a humming noise and can be caused by the following A change in the load and or dynamics requires the servo control parameters to be adjusted The P 763 is operated near to its resonan...

Страница 29: ...ing and transporting the P 763 and for modifications The P 763 is discharged via the discharge resistor inside the electronics from PI Discharging a positioner connected to the electronics In closed l...

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Страница 31: ...o actuators Loosened screws cause a loss in positioning accuracy Loosen screws only when instructed in this manual Do not open the P 763 7 2 Cleaning the P 763 NOTICE Damage from ultrasonic cleaning U...

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Страница 33: ...far above or below the calibration temperature 21 C to 24 C Adjust the zero point of the sensor see controller manual Reduced positioning accuracy The base body or the platform is warped Mount the P 7...

Страница 34: ...nding motion axes immediately 2 Check the settings of the servo control parameters on the controller 3 Adjust the servo control parameters on the controller according to the load change Open loop oper...

Страница 35: ...tion Product and serial numbers of all products in the system Firmware version of the controller if applicable Version of the driver or the software if applicable Operating system on the PC if applica...

Страница 36: ......

Страница 37: ...esolution in X Y open loop 1 nm Typ Resolution in X Y closed loop 2 nm Linearity error in X Y 0 02 Typ Repeatability X Y 5 nm Typ Mechanical properties Resonant frequency in X under load 260 g 180 Hz...

Страница 38: ...for maximum power consumption Details can be found at the following website https www physikinstrumente com en technology piezo technology properties piezo actuators electrical operation 10 2 Ambient...

Страница 39: ...10 Technical Data P 763 Nanopositioner PZ258E Version 1 1 0 35 10 3 Dimensions Dimensions in mm Figure 8 P 763 22C...

Страница 40: ...Nm M5 2 5 Nm 3 5 Nm M4 1 5 Nm 2 5 Nm M3 0 8 Nm 1 1 Nm M2 5 0 3 Nm 0 4 Nm M2 0 15 Nm 0 2 Nm M1 6 0 06 Nm 0 12 Nm Pay attention to the screw in depth required for the respective material according to th...

Страница 41: ...voltage A2 Probe Probe sensor signal immovable part of the capacitive sensor 1 Data ID chip Data line for ID chip 2 GND Target and ID chip Target and ID chip ground 3 GND PZT Piezo voltage ground 4 n...

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Страница 43: ...ational national and local rules and regulations In order to fulfil its responsibility as the product manufacturer Physik Instrumente PI GmbH Co KG undertakes environmentally correct disposal of all o...

Страница 44: ......

Страница 45: ...Conformity has been issued in accordance with the following European directives Low Voltage Directive EMC Directive RoHS Directive The applied standards certifying the conformity are listed below Safe...

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