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PI P-753.11C, Руководство пользователя

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10 Technical Data 

42 

Version: 1.0.1 

PZ254E 

P­753 Positioning Systems 

Pin 

Signal 

Function 

A1 

PZT 

Piezo voltage 

A2 

Probe 

Probe sensor signal (nonmoving part of the 

capacitive sensor) 

1 

Data ID chip 

Data line for ID chip 

2 

GND target and ID chip 

Ground of target and ID chip 

3 

GND PZT 

Piezo voltage ground 

4 

--- 

(Not connected) 

5 

Target 

Target sensor signal (movable part of the 

capacitive sensor) 

Housing 

--- 

Shield 

 

 

LEMO coaxial connectors 

 

Figure 14:   LEMO connectors: PZT, P and T 

Connector 

Signal 

Function 

Connector shell 

P 

Probe 

Probe sensor signal (nonmoving 

part of the capacitive sensor) 

Cable shield 

T 

Target 

Target sensor signal (movable part 

of the capacitive sensor) 

Cable shield 

PZT 

PZT 

Piezo voltage 

Piezo voltage ground on 

cable shield 

 

 

Содержание P-753.11C

Страница 1: ...bes the following products P 753 11C P 753 1CD LISA high dynamics piezo nanopositioning system 15 µm direct position measuring capacitive sensor P 753 21C P 753 2CD LISA high dynamics piezo nanopositioning system 30 µm direct position measuring capacitive sensor P 753 31C P 753 3CD LISA high dynamics piezo nanopositioning system 38 µm direct position measuring capacitive sensor 11C 21C 31C with LE...

Страница 2: ...I GmbH Co KG Karlsruhe Germany The text photographs and drawings in this manual are protected by copyright With regard thereto Physik Instrumente PI GmbH Co KG retains all the rights The use of any text images and drawings is permitted only in part and only when indicating the source Original instructions First printing 28 11 2018 Document number PZ254E CBo Version 1 0 1 Subject to change without ...

Страница 3: ... 3 Product Labeling 10 3 4 Scope of Delivery 11 3 5 Suitable Electronics 11 3 6 Technical Features 11 3 6 1 PICMA Piezo Actuators 11 3 6 2 Flexure Guides 12 3 6 3 Capacitive Sensors 12 3 6 4 ID Chip Only Models With D Sub Connector 12 4 Unpacking 13 5 Installation 15 5 1 General Notes on Installation 15 5 2 Connecting the P 753 to the Protective Earth Conductor 16 5 3 Mounting the P 753 18 5 4 Fix...

Страница 4: ...mer Service 33 10 Technical Data 35 10 1 Specifications 35 10 1 1 Data Table 35 10 1 2 Maximum Ratings 36 10 1 3 Ambient Conditions and Classifications 37 10 2 Dimensions 38 10 3 Torque for Stainless Steel Screws A2 70 41 10 4 Pin Assignment 41 11 Old Equipment Disposal 43 12 EU Declaration of Conformity 45 ...

Страница 5: ...dels p 9 Basic knowledge of control technology drive technologies and suitable safety measures is assumed The latest versions of the user manuals are available for download p 3 on our website 1 2 Symbols and Typographic Conventions The following symbols and typographic conventions are used in this user manual CAUTION Dangerous situation If not avoided the dangerous situation will result in minor i...

Страница 6: ...igures For better understandability the colors proportions and degree of detail in illustrations can deviate from the actual circumstances Photographic illustrations may also differ and must not be seen as guaranteed properties 1 4 Other Applicable Documents The devices and software tools from PI mentioned in this documentation are described in their own manuals The latest versions of the user man...

Страница 7: ... for downloading protected content in the User login for software download section of the Release News Possible methods for getting the access data Link to a page for registering and requesting the access data User name and password is specified 5 If the access data needs to be requested via a registration page a Follow the link in the Release News b Enter the required information in the browser w...

Страница 8: ...rch or press the Enter key 6 Open the corresponding product detail page in the list of search results a If necessary Scroll down the list b If necessary Click Load more results at the bottom of the list c Click the corresponding product in the list 7 Click the Downloads tab The manuals are shown under Documentation 8 Click the desired manual and save it to the hard disk of your PC or to a data sto...

Страница 9: ...use of the P 753 is only possible in combination with suitable electronics p 11 that is available from PI The electronics is not included in the scope of delivery of the P 753 The electronics must provide the required operating voltages To ensure proper performance of the servo control system the electronics must be able to read out and process the signals from the capacitive sensors 2 2 General S...

Страница 10: ...gainst being pulled out of the controller If a protective earth conductor is not or not properly connected dangerous touch voltages can occur on the P 753 in the case of malfunction or failure of the system If touch voltages exist touching the P 753 can result in minor injuries from electric shock Connect the P 753 to a protective earth conductor p 16 before startup Do not remove the protective ea...

Страница 11: ...tes If you give the P 753 to other users also include this user manual as well as other relevant information provided by the manufacturer Only use the device on the basis of the complete user manual Missing information due to an incomplete user manual can result in minor injury and damage to equipment Only install and operate the P 753 after you have read and understood this user manual Personnel ...

Страница 12: ......

Страница 13: ...SA high dynamics piezo nanopositioning system 15 µm direct position measuring capacitive sensor D sub connector P 753 21C LISA high dynamics piezo nanopositioning system 30 µm direct position measuring capacitive sensor LEMO connector s P 753 2CD LISA high dynamics piezo nanopositioning system 30 µm direct position measuring capacitive sensor D sub connector P 753 31C LISA high dynamics piezo nano...

Страница 14: ...3 1CD Product name example the characters following the period refer to the model 123456789 Serial number example individual for each P 753 Meaning of the places counting from left 1 internal information 2 and 3 year of manufacture 4 to 9 consecutive numbers LISA Brand name Manufacturer s logo Warning sign Pay attention to the manual Old equipment disposal p 43 Country of origin Germany Country of...

Страница 15: ...f the device depends on the application and the connections available Product number Description E 625 Piezo servo controller E 754 Digital piezo controller To order contact our customer service department p 33 3 6 Technical Features 3 6 1 PICMA Piezo Actuators P 753 positioners are driven by PICMA piezo actuators PICMA actuators have all ceramic insulation and their performance and lifetime are t...

Страница 16: ... metrology and work without contact Neither friction nor hysteresis interferes with the motion which allows excellent linearity values to be achieved together with the high position resolution In conjunction with suitable electronics capacitive sensors achieve the best resolution stability and bandwidth 3 6 4 ID Chip Only Models With D Sub Connector An ID chip is located in the D sub connector of ...

Страница 17: ...e contents with the scope of delivery according to the contract and the delivery note 3 Inspect the contents for signs of damage If any parts are damaged or missing contact our customer service department p 33 immediately 4 Keep all packaging materials in case the product needs to be returned 4 Unpacking ...

Страница 18: ......

Страница 19: ...abrupt contraction Do not open the P 753 Discharge the positioner s piezo actuators before installation Connect the positioner to the switched off PI controller which is equipped with an internal discharge resistor Do not pull the plug connector out of the electronics during operation Positioners with D sub plug connector Touching the contacts in the plug connector can lead to an electric shock ma...

Страница 20: ...ion to the torque range p 41 specified for the screws used during installation INFORMATION Extended cables can reduce the positioning accuracy of the P 753 or affect the sensor processing by the electronics Do not use cable extensions If you need longer cables contact our customer service department p 33 5 2 Connecting the P 753 to the Protective Earth Conductor INFORMATION In the case of P 753 po...

Страница 21: ...tective earth conductor Suitable screwdriver Figure 3 Connecting the protective earth conductor profile view 1 Base body of the P 753 2 Flat washer 3 Safety washer 4 Screw 5 Cable lug 6 Protective earth conductor Connecting the P 753 to the protective earth conductor 1 If necessary attach a suitable cable lug to the protective earth conductor 2 Use the M4 screw together with the washers and self l...

Страница 22: ...753 is mounted vertically and the direction of motion of the X axis is downward this will result in a tensile stress which reduces the internal preload of the piezo actuator Operation with reduced preload can destroy the piezo actuator Do not exceed the maximum permissible stress and load capacities according to the specifications p 35 NOTICE Unsuitable or wrongly mounted screws Using unsuitable s...

Страница 23: ...ing from below with M3 screws Two through holes for M3 screws are present The thickness of the surface and the depth of the counterbores at the through holes in the surface are matched for compliance with the maximum screw in depth of 5 mm in the P 753 The flatness of the surface is 10 µm For applications with great temperature changes The surface should have the same thermal expansion properties ...

Страница 24: ... secure the screws with a thread locking adhesive 5 4 Fixing the Load NOTICE Mechanical overload due to high torques and high loads When affixing the load high torques and high loads can overload the motion platform of the P 753 Mechanical overload can cause damage to the piezo actuators sensors and flexures of the P 753 and lead to loss in accuracy Pay attention to the torque range p 41 specified...

Страница 25: ...the center of the load to be affixed is too far above or to the side of the motion platform adjust the controller settings before startup or contact our customer service department p 33 NOTICE Screws that are too long The P 753 can be damaged by screws that are too long Note the depth of the mounting holes in the motion platform p 38 Only use screws of the correct length for the respective mountin...

Страница 26: ...oad at the optimum position Figure 6 Example of an optimally placed load 1 center of load Center of load at an unsuitable position Figure 7 High setup and center of load 1 far above the motion platform Figure 8 Long lever and center of load 1 on the side of the motion platform ...

Страница 27: ...M2 5 screws of suitable length p 38 Suitable tools Fixing the load Fix loads only to the threaded holes p 38 intended for this purpose and use suitable screws While doing so pay attention to the torque range p 41 specified for the screws and avoid torques 0 3 Nm on the motion platform Fix the load so that it is centered and the center of load is on the motion platform ...

Страница 28: ......

Страница 29: ...earth conductor before starting it up again NOTICE Destruction of the piezo actuator due to electric flashovers Using the P 753 in environments that increase the electrical conductivity can lead to the destruction of the piezo actuator by electric flashovers Electric flashovers can be caused by moisture high humidity liquids and conductive materials e g metal dust In addition electric flashovers c...

Страница 30: ...s indicated by a humming noise and can be caused by the following A change in the load and or dynamics requires the servo control parameters to be adjusted The P 753 is operated near to its resonant frequency If you notice oscillation In closed loop operation switch off the servo mode immediately In open loop operation stop the P 753 immediately INFORMATION The positive direction of motion of the ...

Страница 31: ...d transporting the P 753 and for modifications The P 753 is discharged via the internal discharge resistor of the controller from PI Discharging a positioner that is connected to the controller In closed loop operation 1 Switch off the servo mode on the controller 2 Set the piezo voltage to 0 V on the controller In open loop operation Set the piezo voltage to 0 V on the controller Discharging a po...

Страница 32: ......

Страница 33: ...the base body cause a loss in positioning accuracy Do not loosen any screws on the base body 7 2 Cleaning the P 753 NOTICE Damage from ultrasonic cleaning Ultrasonic cleaning can damage the P 753 Do not do any ultrasonic cleaning Requirements You have discharged the piezo actuators of the P 753 p 27 You have disconnected the P 753 from the electronics Cleaning the P 753 Clean the surfaces of the P...

Страница 34: ......

Страница 35: ...far above or below the calibration temperature 21 C to 24 C Perform a zero point adjustment of the sensor see controller manual Reduced accuracy Warping of the base body or the motion platform Mount the P 753 only onto surfaces with the following characteristics Flatness of at least 10 μm The thermal expansion properties are similar to those of the P 753 e g surfaces made of aluminum Only fix load...

Страница 36: ...eral systems Pay attention to the assignment of the devices when several systems are connected The assignment is indicated on the calibration label of the controller see rear panel or bottom side which contains the serial number of the positioner to be connected The positioner starts oscillating or positions inaccurately Servo control parameters incorrectly set because for example the load was cha...

Страница 37: ...rmation Product and serial numbers of all products in the system Firmware version of the controller if applicable Version of the driver or the software if applicable Operating system on the PC if applicable If possible Take photographs or make videos of your system that can be sent to our customer service department if requested The latest versions of the user manuals are available for download p ...

Страница 38: ......

Страница 39: ...0 38 µm Resolution closed loop 0 1 0 2 0 25 nm typ Linearity error closed loop 0 03 0 03 0 03 typ Repeatability 1 2 3 nm typ Pitch yaw 5 7 10 µrad typ Mechanical properties Stiffness in motion direction 45 24 16 N µm 20 Resonant frequency no load 5 6 3 7 2 9 kHz 20 Resonant frequency under load 200 g 2 5 1 7 1 4 kHz 20 Push pull force capacity in motion direction 100 20 100 20 100 20 N max Load ca...

Страница 40: ...ith LEMO connector available as P 753 x1C Vacuum versions to 10 9 hPa available as P 753 xUD Nonmagnetic versions available as P 753 xND All specifications based on room temperature 22 C 3 C 10 1 2 Maximum Ratings P 753 positioners are designed for the following operating data in continuous operation Positioner Maximum operating voltage Maximum operating frequency no load Maximum power consumption...

Страница 41: ...For indoor use only Maximum altitude 2000 m Air pressure 1100 hPa to 0 1 hPa Relative humidity Highest relative humidity 80 for temperatures up to 31 C Decreasing linearly to 50 relative humidity at 40 C Operating temperature 20 C to 80 C Storage temperature 20 C to 80 C Transport temperature 25 C to 85 C Overvoltage category II Protection class I Degree of pollution 1 Degree of protection accordi...

Страница 42: ...10 Technical Data 38 Version 1 0 1 PZ254E P 753 Positioning Systems 10 2 Dimensions Dimensions in mm Note that the decimal places are separated by a comma in the drawings Figure 9 P 753 11C P 753 1CD ...

Страница 43: ...10 Technical Data P 753 Positioning Systems PZ254E Version 1 0 1 39 Figure 10 P 753 21C P 753 2CD ...

Страница 44: ...10 Technical Data 40 Version 1 0 1 PZ254E P 753 Positioning Systems Figure 11 P 753 31C P 753 3CD ...

Страница 45: ...A2 70 Screw size Minimum torque Maximum torque M6 4 Nm 6 Nm M5 2 5 Nm 3 5 Nm M4 1 5 Nm 2 5 Nm M3 0 8 Nm 1 1 Nm M2 5 0 3 Nm 0 4 Nm M2 0 15 Nm 0 2 Nm M1 6 0 06 Nm 0 12 Nm 10 4 Pin Assignment D sub 7W2 connector m Figure 12 D sub 7W2 connector m Front with connections Figure 13 D sub connector Example top view ...

Страница 46: ...ID chip 3 GND PZT Piezo voltage ground 4 Not connected 5 Target Target sensor signal movable part of the capacitive sensor Housing Shield LEMO coaxial connectors Figure 14 LEMO connectors PZT P and T Connector Signal Function Connector shell P Probe Probe sensor signal nonmoving part of the capacitive sensor Cable shield T Target Target sensor signal movable part of the capacitive sensor Cable shi...

Страница 47: ...ernational national and local rules and regulations In order to fulfil its responsibility as the product manufacturer Physik Instrumente PI GmbH Co KG undertakes environmentally correct disposal of all old PI equipment made available on the market after 13 August 2005 without charge Any old PI equipment can be sent free of charge to the following address Physik Instrumente PI GmbH Co KG Auf der Ro...

Страница 48: ......

Страница 49: ...aration of Conformity has been issued in accordance with the following European directives Low Voltage Directive EMC Directive RoHS Directive The applied standards certifying the conformity are listed below Safety Low Voltage Directive EN 61010 1 EMC EN 61326 1 RoHS EN 50581 12 EU Declaration of Conformity ...

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