PI P-725.1CDE2, Руководство пользователя

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User Manual
P725T0010, applies to P-725
CBo/KSch, 8/27/2020
Physik Instrumente (PI ) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 31 / 40
Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.de , www.pi.ws
Technical Data
Specifications
P-725.1CDE2 P-725.1CL
P-725.1CD
P-725.1CA
P-725.2CL
P-725.2CD
P-725.2CA P-725.4CL
P-725.4CD
P-725.4CA P-725.x0L
open-loop
version
Unit Tolerance
Active axes Z Z Z Z Z
Motion and positioning
Integrated sensor Capacitive Capacitive Capacitive Capacitive -
Travel range at -20 to +120 V, open
loop
120 150 330 460 as P-725.xCL µm +20 % /
-0 %
Travel range, closed loop 100 100 250 400 - µm
Resolution, open loop 0.1 0.3 0.4 0.5 as P-725.xCL Nm Typ.
Resolution, closed loop 0.2 0.65 0.75 1.25 - nm Typ.
Linearity, closed loop 0.01 0.03 0.03 0.03 - % Typ.
Repeatability ±5 ±5 ±5 ±5 - nm Typ.
Tilt θ
X
10 1 6 10 as P-725.xCL µrad Typ.
Tilt θ
Y
10 20 45 45 as P-725.xCL µrad Typ.
Crosstalk in X 20 20 20 60 as P-725.xCL Nm Typ.
Crosstalk in Y 50 20 40 60 as P-725.xCL Nm Typ.
Mechanical properties
Stiffness in motion direction 0.50 0.23 0.17 0.12 as P-725.xCL N/µm ±20 %
Resonant frequency, unloaded 680 470 330 230 as P-725.xCL Hz ±20 %
Resonant frequency, under load, 150
g
290 185 140 120 as P-725.xCL Hz ±20 %
Push/pull force capacity in positioning
direction
100 / 20 100 / 20 100 / 20 100 / 20 as P-725.xCL N Max.
Drive properties
Ceramic type PICMA® PICMA® PICMA® PICMA® as P-725.xCL
Electrical capacitance 3.2 4.2 6.2 6.2 as P-725.xCL µF ±20 %
Miscellaneous
Operating temperature range -20 to 80 -20 to 80 -20 to 80 -20 to 80 -20 to 80 °C
Material Stainless steel,
aluminum
Aluminum Aluminum Aluminum Aluminum
Objective diameter 39 39 39 39 39 mm Max.
Assembly Ring clamp QuickLock QuickLock QuickLock QuickLock
Mass 0.28 0.215 0.23 0.23 as P-725.xCL kg ±5 %
Sensor/voltage connector D-sub 7W2
(m)
CL version:
LEMO
Other:
D-sub 7W2
(m)
CL version:
LEMO
Other:
D-sub 7W2
(m)
CL version:
LEMO
Other:
D-sub 7W2
(m)
LEMO
(no sensor)
Cable length 1.5 1.5 1.5 1.5 1.5 m +50 mm /
-0 mm
Recommended electronics E-505, E-610,
E-621, E-625,
E-665, E-709,
E-754
E-505, E-610,
E-621, E-625,
E-665, E-709,
E-754
E-505, E-610,
E-621, E-625,
E-665, E-709,
E-754
E-505, E-610,
E-621, E-625,
E-665, E-709,
E-754
E-505, E-610,
E-621, E-625,
E-665, E-709,
E-754
The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are
free of friction.
All specifications based on room temperature (22 °C ±3 °C).