10 Technical Data
P-63x Nanopositioner
PZ247E
Version: 1.1.0
33
Subject to change. You can find the latest product specifications on the product web page at
www.pi.ws (https://www.pi.ws).
In this Chapter
Specifications ............................................................................................................................... 33
Dimensions .................................................................................................................................. 35
Torque for Stainless Steel Screws (A2-70) ................................................................................... 36
Pin Assignment ............................................................................................................................ 36
10.1
Specifications
10.1.1
Data Table
P-630.XCD
P-631.XCD
Unit
Active axes
X
X
Motion and positioning
Integrated sensor
Capacitive
Capacitive
Travel range at -20 to 120 V,
open loop
45
90
µm
Travel range, closed loop
40
80
µm
Resolution, open loop
0.1
0.1
nm
Resolution, closed loop
0.2
0.2
nm
Linearity error, closed loop
0.02
0.02
%
Repeatability over the entire
travel range
±2
±3
nm
Pitch / yaw
±5
±5
µrad
Straightness / flatness
50
50
nm
Mechanical properties
Stiffness in motion direction 5.5
5
N / µm
Resonant frequency,
unloaded
3250
2850
Hz
Resonant frequency, under
load, 60 g
1600
1200
Hz
Push/pull force capacity in
positioning direction
10
10
N
Load capacity
10
10
N
10
Technical Data
