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2 Safety

P-5x7/P-5x8 Positioners

PZ82E

Version: 3.2.0

2.3

Organizational Measures

User manual



Always keep this user manual together with the P-5x7/P-5x8.

The latest versions of the user manuals are available for download (p. 3) on our

website.



Add all information from the manufacturer to the user manual, for example

supplements or technical notes.



If you give the P-5x7/P-5x8 to a third party, include this user manual as well as other

relevant information provided by the manufacturer.



Do the work only if the user manual is complete. Missing information due to an

incomplete user manual can result in minor injury and damage to equipment.



Install and operate the P-5x7/P-5x8 only after you have read and understood this user

manual.

Personnel qualification

The P-5x7/P-5x8 may only be installed, started, operated, maintained, and cleaned by

authorized and appropriately qualified personnel.

Содержание P-5 7 Series

Страница 1: ...CL 200 m 200 m P 517 P 527 Precision XYZ nanopositioner P 517 3CD 3CL 100 m 100 m 20 m P 527 3CD 3CL 200 m 200 m 20 m P 517 P 527 Precision XY rotation nanopositioner P 517 RCD 100 m 100 m 2 mrad P 52...

Страница 2: ...I GmbH Co KG Karlsruhe Germany The text photographs and drawings in this manual are protected by copyright With regard thereto Physik Instrumente PI GmbH Co KG retains all the rights The use of any te...

Страница 3: ...0 3 3 Scope of Delivery 11 3 4 Suitable Electronics 11 3 5 Accessories 12 3 6 Technical Features 13 3 6 1 PICMA Piezo Actuators 13 3 6 2 Flexure Guides 13 3 6 3 Capacitive Sensors 13 3 6 4 ID Chip Mod...

Страница 4: ...Customer Service 35 10 Technical Data 37 10 1 Specifications 37 10 1 1 P 5x7 Data Table 37 10 1 2 P 5x8 Data Table 39 10 1 3 Maximum Ratings 40 10 2 Ambient Conditions and Classifications 41 10 3 Dim...

Страница 5: ...p 9 Basic knowledge of control technology drive technologies and suitable safety measures is assumed The latest versions of the user manuals are available for download p 3 on our website 1 2 Symbols a...

Страница 6: ...nation Positioner Electrically driven mechanics here P 5x7 P 5x8 with one or more motion axes Electronics Piezo amplifier or piezo controller that supplies the operating voltage for positioners or pie...

Страница 7: ...m PZ195E user manual E 727 digital multi channel piezo controller E727T0005 user manual E 754 digital piezo controller E754T0001 user manual PIMikroMove SM148E software manual P 5xx P 6xx P 7xx piezo...

Страница 8: ......

Страница 9: ...axis rotationally X Y Z TCD In one axis vertically and in two axes rotationally Z X Y The P 5x7 P 5x8 can only be used as intended in conjunction with suitable electronics p 11 available from PI The...

Страница 10: ...ronics If a protective earth conductor is not or not properly connected dangerous touch voltages can occur on the P 5x7 P 5x8 in the case of malfunction or failure of the system If there are touch vol...

Страница 11: ...tes If you give the P 5x7 P 5x8 to a third party include this user manual as well as other relevant information provided by the manufacturer Do the work only if the user manual is complete Missing inf...

Страница 12: ......

Страница 13: ...pacitive sensors parallel metrology D sub connector P 517 3CL Precision XYZ nanopositioner 100 m 100 m 20 m capacitive sensors parallel metrology LEMO connectors P 527 3CD Precision XYZ nanopositioner...

Страница 14: ...sensors LEMO connectors P 558 TCD Precision nanopositioning Z and tip tilt stage 50 m 0 5 mrad parallel metrology capacitive sensors D sub connector P 518 TCD Precision nanopositioning Z and tip tilt...

Страница 15: ...s to operate a P 5x7 P 5x8 Selecting the device depends on the application and the connectors available Electronics Connector s Channels E 505 piezo amplifier module LEMO 1 E 610 piezo amplifier servo...

Страница 16: ...sensors 1 channel length 0 3 m P 895 3DLC Adapter cable D sub 25W3 f to LEMO for piezo actuator nanopositioning systems with capacitive sensors 3 channels length 0 3 m Adapter cable with D sub mechani...

Страница 17: ...re elements have a high stiffness and load capacity Flexure guides are maintenance and wear free They are 100 vacuum compatible function in a wide temperature range and do not require any lubricants 3...

Страница 18: ......

Страница 19: ...8 The P 5x7 P 5x8 is delivered with a transport safeguard attached The following figures serve as examples and can differ from your positioner model Figure 2 Exemplary view Positioner with transport s...

Страница 20: ...a surface with the support frame facing downwards b Release the four plastic screws with a screwdriver In the following figure one of the screws is marked with an arrow c Remove the plastic screws and...

Страница 21: ...rupt contraction Do not open the P 5x7 P 5x8 Discharge the positioner s piezo actuators before installing Connect the positioner to the switched off PI electronics equipped with an internal discharge...

Страница 22: ...screws Incorrectly tightened screws can cause damage Pay attention to the torque range p 45 specified for the screws used during installation INFORMATION Extension cables can reduce the positioning a...

Страница 23: ...tronics Tools and accessories Suitable protective earth conductor Cable cross section 0 75 mm2 M4 protective earth screw set p 11 supplied for connecting the protective earth conductor Suitable screwd...

Страница 24: ...horizontal orientation standing on a surface not suspended Mounting in other orientations can cause tensile stress that reduces the preload and destroys the piezo actuator If you want to mount the P 5...

Страница 25: ...eral can overload the platform of the P 5x7 P 5x8 Mechanical overload can damage the piezo actuators sensors and flexures of the P 5x7 P 5x8 and lead to loss of accuracy Avoid torques on the platform...

Страница 26: ...rm adjust the controller settings before starting and operating or or contact our customer service department p 35 NOTICE Excessively long screws The P 5x7 P 5x8 could be damaged by screws inserted to...

Страница 27: ...size and length p 42 Suitable screwdriver Fixing the load 1 Align the load on the P 5x7 P 5x8 so that the mounting holes in the load and motion platform are in line 2 Insert the screws through the ho...

Страница 28: ......

Страница 29: ...5x8 to the protective earth conductor before restarting NOTICE Destruction of the piezo actuator due to electric flashovers Using the P 5x7 P 5x8 in environments that increase the electrical conducti...

Страница 30: ...sed loop operation switch off the servo mode immediately In open loop operation stop the P 5x7 P 5x8 immediately INFORMATION The positive direction of motion is specified in the dimensional drawing p...

Страница 31: ...and operating the P 5x7 P 5x8 in the manual for the electronics p 11 used 6 3 Discharging the P 5x7 P 5x8 The P 5x7 P 5x8 must be discharged in the following cases Before Installation When the P 5x7...

Страница 32: ......

Страница 33: ...nstructed in this manual Do not open the P 5x7 P 5x8 7 2 Packing the P 5x7 P 5x8 for Transport NOTICE Mechanical overload due to incorrect handling Impermissible mechanical overload of the motion plat...

Страница 34: ...oner onto the support frame with its top facing downwards c Align the positioner so that the mounting holes in the positioner are in line with the mounting holes in the supporting frame d Attach the s...

Страница 35: ...ing can damage the P 5x7 P 5x8 Do not do any ultrasonic cleaning Requirements You have discharged the piezo actuators of the P 5x7 P 5x8 p 27 You have disconnected the P 5x7 P 5x8 from the electronics...

Страница 36: ......

Страница 37: ...5x7 P 5x8 onto surfaces with the following characteristics only Flatness of at least 20 m The thermal expansion properties are similar to those of the P 5x7 P 5x8 e g surface made of aluminum Mount l...

Страница 38: ...rs incorrectly set because for example the load was changed 1 Switch off the servo mode of the corresponding motion axes immediately 2 Check the settings of the servo control parameters on the control...

Страница 39: ...ation Product and serial numbers of all products in the system Firmware version of the controller if applicable Version of the driver or the software if applicable Operating system on the PC if applic...

Страница 40: ......

Страница 41: ...arity error in Z 0 03 0 03 0 03 0 03 typ Rotation range in Z 1 mrad 2 mrad Rotation range in Z open loop 2 6 mrad 5 mrad 20 Linearity error in Z 0 15 0 15 typ Positioning P 517 2CL P 517 2CD P 527 2CL...

Страница 42: ...y in Y under load with 2500 g 140 Hz 140 Hz 110 Hz 110 Hz 140 Hz 140 Hz 110 Hz 110 Hz 140 Hz 110 Hz 20 Resonant frequency in Y under load with 500 g 250 Hz 250 Hz 190 Hz 190 Hz 250 Hz 250 Hz 190 Hz 19...

Страница 43: ...nm 0 8 nm 1 nm 1 nm 0 5 nm 0 8 nm 1 nm Resolution in Z open loop 0 2 nm 0 2 nm 0 2 nm 0 2 nm 0 6 nm 0 6 nm 0 2 nm 0 4 nm 0 6 nm typ Bidirectional repeatability in Z 5 nm 5 nm 5 nm 5 nm 10 nm 10 nm 5...

Страница 44: ...625 E 712 E 727 E 754 E 503 E 505 E 610 E 621 E 625 E 712 E 727 E 754 E 503 E 505 E 610 E 621 E 625 E 712 E 727 E 754 E 503 E 505 E 610 E 621 E 625 E 712 E 727 E 754 E 503 E 505 E 610 E 621 E 625 E 71...

Страница 45: ...maximum power consumption Details can be found at the following website https www physikinstrumente com en technology piezo technology properties piezo actuators electrical operation 10 2 Ambient Cond...

Страница 46: ...10 Technical Data 42 Version 3 2 0 PZ82E P 5x7 P 5x8 Positioners 10 3 Dimensions Figure 9 P 5x7 dimensions in mm Note that a comma is used in the drawings instead of a decimal point...

Страница 47: ...10 Technical Data P 5x7 P 5x8 Positioners PZ82E Version 3 2 0 43 Figure 10 P 5x8 TCx dimensions in mm Note that a comma is used in the drawings instead of a decimal point...

Страница 48: ...10 Technical Data 44 Version 3 2 0 PZ82E P 5x7 P 5x8 Positioners Figure 11 P 5x8 ZCx dimensions in mm Note that a comma is used in the drawings instead of a decimal point...

Страница 49: ...ive material according to the VDI directive 2230 10 5 Pin Assignment D sub 7W2 connector m For P 5x8 ZCD only Figure 12 D sub 7W2 m connector Front with connections Pin Signal Function A1 inner conduc...

Страница 50: ...ut Probe sensor signal channel 1 immovable part of the capacitive sensor A3 outer conductor GND Shielding for probe sensor signal channel 1 1 Input Target sensor signal channel 2 movable part of the c...

Страница 51: ...nnel 2 Pins 9 and 20 Channel 3 Pins 8 and 19 Channel 4 Pins 7 and 18 Channel 1 Pins A3 11 and 22 Channel 2 Pins A1 1 and 12 Channel 3 Pins A2 2 and 13 P 5x7 2CD X X X X P 5x7 3CD P 5x7 RCD P 5x8 TCD X...

Страница 52: ......

Страница 53: ...ational national and local rules and regulations In order to fulfill its responsibility as the product manufacturer Physik Instrumente PI GmbH Co KG undertakes environmentally correct disposal of all...

Страница 54: ......

Страница 55: ...ns of conformity were issued according to the following European statutory requirements Low Voltage Directive EMC Directive RoHS Directive The standards applied for certifying conformity are listed be...

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