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User Manual

F712T0002, valid for F-712.MA1 and F-712.MA2

Mma, BRo, 12/6/2019

Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany

Page 37 / 45

Phone +49 721 4846-0, Fax +49 721 4846-1019, Email

[email protected]

www.pi.ws

Details of P-616K001 NanoCube® Nanopositioners

P-616K001

Unit

Tolerance

Motion and Positioning

Active axes

X, Y, Z

Open-loop travel, -20 to 120 V

120 / axis

µm

+20 % / -0 %

Closed-loop travel

100 / axis

µm

+20 % / -0 %

Min. incremental motion, closed-loop

2.5

typ.

Linearity error, for the entire travel range

2 %

typ.

Bidirectional repeatability

typ.

Sensor

Sensor type

Optical incremental sensors

Mechanical properties

Stiffness

0.5

N/µm

±10 %

Unloaded resonant frequency

X / Y / Z

700

±10 %

Resonant frequency with 30 g load

X / Y / Z

380

±20 %

Push force capacity (any orientation)

max.

Holding force; passive (any orientation)

max.

Maximum permissible torque for XYZ motion platform 0.4

max.

Drive Properties

Drive type

PICMA® P-885.50

Electrical capacitance

1.5 / axis

µF

±20 %

Dynamic operating current coefficient

1.9

µA/(Hz x µm) ±20 %

Miscellaneous

Operating temperature range

-20 to 80

°C

Material

Aluminum, steel

Dimensions

40 × 40 × 40

Moved mass

0.021

Mass without cable

0.13

Mass with cable

0.32

Cable length

±10 mm

Sensor / driver connection

Sensor: HD Sub-D 26 (f)

Driver: Sub-D 25W3 (m)

Recommended controllers / amplifiers

E-712K236, E-712K252

Technical data specified at 20 ±3 °C

Содержание F-712.MA1

Страница 1: ...sik Instrumente PI GmbH Co KG Auf der Roemerstrasse 1 76228 Karlsruhe Germany Phone 49 721 4846 0 Fax 49 721 4846 1019 Email info pi ws www pi ws F 712 MA1 and F 712 MA2 High Precision Fiber Alignment...

Страница 2: ...ers 8 Safety Instructions for M 122K025 Linear Stages 10 System Overview 11 F 712 MA1 System Components 11 F 712 MA2 System Components 12 Details of the Mechanics 13 Axis Definitions 14 F 712 MA1 Coor...

Страница 3: ...MA2 Systems 39 P 616K001 NanoCube Nanopositioner 41 Pin Assignments 43 P 616K001 NanoCube Power Connection 43 P 616K001 NanoCube Sensor Connection 44 M 122K025 Motor Connection 45 Customer Service For...

Страница 4: ...ed alignment system with stacked M 122K025 XYZ linear stages and P 616K001 NanoCube nanopositioner E 712K252 digital controller with 4 analog inputs firmware routines for ultrafast alignment tasks F 7...

Страница 5: ...al order is irrelevant List item p 5 Cross reference to page 5 SVO Command line or command from PI s General Command Set GCS example command to get the servo mode RS 232 Operating element labeling on...

Страница 6: ...Answers to frequently asked questions Command reference for E 712 Parameter reference for E 712 For general descriptions of the commands and functionality supported by the E 712K252 and E 712K236 con...

Страница 7: ...he supplied components power supply and power cord to connect the F 712 alignment system to the power source If one of the supplied components for connecting to the power source has to be replaced use...

Страница 8: ...stor Do not pull the connector out of the electronics during operation CAUTION Risk of electric shock if the protective earth conductor is not connected If a protective earth conductor is not or not p...

Страница 9: ...addition electric flashovers can also occur in certain air pressure ranges due to the increased conductivity of the air Avoid operating the NanoCube nanopositioner in environments that can increase t...

Страница 10: ...age or considerable wear due to high accelerations High accelerations can cause damage to or considerable wear on the mechanical system Stop the motion immediately if a controller malfunction occurs E...

Страница 11: ...Item No Quantity Controller for spindle and piezo driven axes E 712K252 1 Spindle driven axes Linear stages with DC motor assembled via Z and X adapters M 122K025 3 Piezo driven axes NanoCube nanoposi...

Страница 12: ...n axes NanoCube nanopositioner P 616K001 2 Nanopositioner adapter for mounting the NanoCube on the stacked linear stages M122E0048 2 Fiber holder e g F 603 41 0 Not included in the scope of delivery D...

Страница 13: ...s www pi ws Details of the Mechanics Figure 2 One stack of an F 712 MA1 or F 712 MA2 alignment system 1 NanoCube Nanopositioner affixed to the spindle driven X stage via the nanopositioner adapter 2 X...

Страница 14: ...712 MA1 Coordinate Systems and Axis Identifiers The coordinate systems shown below are active by default for F 712 MA1 systems Figure 4 F 712 MA1 Orientation of the coordinate systems right hand rule...

Страница 15: ...roller Axis name in the controller Connected to E 712K236 Notes 1 SPX Module 1 E 711 SA6 Ch 1 to 3 Module 2 E 711 AL41 Piezo driven axes of sender 2 SPY 3 SPZ 4 RPX Module 1 E 711 SA6 Ch 4 to 6 Module...

Страница 16: ...C motor cable D Sub 15 m f 4 m E 711 I1B 1 1 Analog input cable for E 712 controller BNC to Lemo 1 5 m 000036450 1 2 Screw set for protective earth 000045698 2 4 Screws ISO 14580 M3x25 000066715 1 2 S...

Страница 17: ...nopositioner and do not bend the cable Unpacking the F 712 alignment system 1 Unpack the components of the F 712 alignment system with care 2 Compare the contents against the items covered by the cont...

Страница 18: ...ce is 5 m For applications with large temperature changes The surface should have the same thermal expansion properties as the F 712 mechanics e g surface made of aluminum You have accounted for the s...

Страница 19: ...gs Tools and accessories Suitable fiber holder not included in the scope of delivery For F 712 MA1 1 pc For F 712 MA2 2 pcs PI provides suitable fiber holders as optional accessories p 16 e g the F 60...

Страница 20: ...one 49 721 4846 0 Fax 49 721 4846 1019 Email info pi ws www pi ws Mounting the Mechanics Proceed as follows to mount a stack of an F 712 MA1 or F 712 MA2 alignment system 1 With 2 screws ISO14580 M3x2...

Страница 21: ...hysik Instrumente PI GmbH Co KG Auf der Roemerstrasse 1 76228 Karlsruhe Germany Page 21 45 Phone 49 721 4846 0 Fax 49 721 4846 1019 Email info pi ws www pi ws Figure 8 Placing the NanoCube nanopositio...

Страница 22: ...on the fiber holder used Carefully remove the metal cap from the drive component of the NanoCube nanopositioner a Carefully remove the screws from the metal cap using a Phillips head screwdriver Keep...

Страница 23: ...tal cap has been removed onto the drive component so that the relevant mounting holes overlap Figure 12 Here Placing the fiber holder onto the drive component 4 Mount the fiber holder using suitable M...

Страница 24: ...ruhe Germany Page 24 45 Phone 49 721 4846 0 Fax 49 721 4846 1019 Email info pi ws www pi ws 5 With 4 screws ISO 4762 M6x25 mount the complete stack onto a surface Do not exceed a torque of 10 Nm Figur...

Страница 25: ...th stacks to the protective earth conductor The NanoCube nanopositioner has an M4 hole for mounting the protective earth conductor This hole is marked with the symbol for the protective earth conducto...

Страница 26: ...ion of the NanoCube nanopositioner as shown in the profile view 3 Tighten the M4 screw with a torque of 1 2 Nm to 1 5 Nm 4 Make sure that the contact resistance at all connection points relevant for m...

Страница 27: ...e controller documentation p 5 The NanoCube nanopositioner and the M 122K025 linear stages are completely mounted p 17 and connected to the protective earth conductor p 25 Tools and accessories E 711...

Страница 28: ...Prepare the mechanical setup for the optical components on sender and receiver side not shown in the figures below 4 Connect the signal to be measured to the controller a Connect the fiber from the r...

Страница 29: ...712 MA1 and F 712 MA2 Mma BRo 12 6 2019 Physik Instrumente PI GmbH Co KG Auf der Roemerstrasse 1 76228 Karlsruhe Germany Page 29 45 Phone 49 721 4846 0 Fax 49 721 4846 1019 Email info pi ws www pi ws...

Страница 30: ...axis upon startup This is why a reference move is required before absolute target positions can be commanded and reached With the spindle driven axes M 122K025 linear stages use the FRF command to per...

Страница 31: ...xis malfunction e g if the axis is blocked As the safety shutdown is not a contactless limitation carefully check the distances and permissible loads in your application before you specify the positio...

Страница 32: ...position and then disconnected all cables of the mechanics from the controller Cleaning the Mechanics Do not do any ultrasonic cleaning Do not use any aggressive solvents When necessary clean the surf...

Страница 33: ...es M 122K025 linear stages to their mid position 12 5 mm 2 Uninstall and pack the NanoCube nanopositioner a Discharge the NanoCube nanopositioner p 31 b Switch the controller off c Remove the cables o...

Страница 34: ...idity at 40 C Operating temperature Mechanics 20 C to 65 C Electronics 5 C to 40 C Storage temperature 0 C to 65 C Transport temperature 20 C to 65 C Overvoltage category II Protection class I Degree...

Страница 35: ...ning with piezo driven axes Active axes X Y Z Closed loop travel in X Y Z 100 m Min incremental motion open loop 0 3 nm Min incremental motion closed loop 2 5 nm Linearity error for the entire travel...

Страница 36: ...e max 5 to 5 V Bandwidth min 1 kHz Noise level max 60 dBm Details of E 712K236 E 712K252 Controllers Usable analog input channels E 712K236 E 712K252 Connection In 1 to In 4 sockets of the E 711 IA4 a...

Страница 37: ...emental sensors Mechanical properties Stiffness 0 5 N m 10 Unloaded resonant frequency X Y Z 700 Hz 10 Resonant frequency with 30 g load X Y Z 380 Hz 20 Push force capacity any orientation 15 N max Ho...

Страница 38: ...lution 0 488 m Minimum incremental motion 3 m Backlash 1 m Unidirectional repeatability 0 15 m Pitch 150 rad Yaw 150 rad Velocity 20 mm s max Reference point switch repeatability 1 m Mechanical Proper...

Страница 39: ...e 1 76228 Karlsruhe Germany Page 39 45 Phone 49 721 4846 0 Fax 49 721 4846 1019 Email info pi ws www pi ws Dimensions Values in mm Decimal places are separated by a comma F 712 MA1 and F 712 MA2 Syste...

Страница 40: ...F 712 MA1 and F 712 MA2 Mma BRo 12 6 2019 Physik Instrumente PI GmbH Co KG Auf der Roemerstrasse 1 76228 Karlsruhe Germany Page 40 45 Phone 49 721 4846 0 Fax 49 721 4846 1019 Email info pi ws www pi w...

Страница 41: ...6 2019 Physik Instrumente PI GmbH Co KG Auf der Roemerstrasse 1 76228 Karlsruhe Germany Page 41 45 Phone 49 721 4846 0 Fax 49 721 4846 1019 Email info pi ws www pi ws P 616K001 NanoCube Nanopositioner...

Страница 42: ...2 MA2 Mma BRo 12 6 2019 Physik Instrumente PI GmbH Co KG Auf der Roemerstrasse 1 76228 Karlsruhe Germany Page 42 45 Phone 49 721 4846 0 Fax 49 721 4846 1019 Email info pi ws www pi ws Metal Cap Remove...

Страница 43: ...0 Fax 49 721 4846 1019 Email info pi ws www pi ws Pin Assignments P 616K001 NanoCube Power Connection D Sub 25W3 m Pin Signal Function Coax inner lines A1 A2 A3 Standard pins 1 2 3 Bidirectional ID C...

Страница 44: ...846 1019 Email info pi ws www pi ws P 616K001 NanoCube Sensor Connection HD D Sub 26 f Pin Signal Function 1 Output Ch 1 sin 2 Output Ch 1 cos 3 4 Output Ch 2 sin 5 Output Ch 2 cos 6 7 Output Ch 3 sin...

Страница 45: ...ction Function 1 n c not connected 9 MOT input motor connection 2 MOT input motor connection 10 PGND input ground power 3 n c not connected 11 n c not connected 4 5V input 5 V input for encoder and lo...

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