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1 About this Document

L-509 Linear Stage

MP141E

Version: 1.6

1.5

Other Applicable Documents

The devices and software tools from PI that are mentioned in this documentation are described

in separate manuals.

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Содержание L-509

Страница 1: ...h 2 phase stepper motor without encoder L 509 xASD00 with 2 phase stepper motor and linear encoder with sin cos signal transmission L 509 x0AD10 with Active Drive and rotary encoder with A B quadrature signal transmission L 509 x4AD00 with Active Drive and linear encoder with A B quadrature signal transmission L 509 0x3111 with DC motor and linear encoder with sin cos signal transmission L 509 0x3...

Страница 2: ...KG Karlsruhe Germany The text photographs and drawings in this manual are protected by copyright With regard thereto Physik Instrumente PI GmbH Co KG reserves all rights The use of any text images and drawings is permitted only in part and only when indicating the source Original instructions First printing 2022 06 07 Document number MP141E MMa ASt Version 1 6 Subject to change This manual is supe...

Страница 3: ... 2 1 Intended Use 5 2 2 General Safety Instructions 5 2 3 Organizational Measures 5 3 Product Description 7 3 1 Model Overview 7 3 2 Product View 8 3 3 Direction of Motion 8 3 4 Product Labeling 9 3 5 Scope of Delivery 10 3 6 Accessories 11 3 7 Suitable Controllers 11 3 8 Technical Features 11 3 8 1 Encoder 11 3 8 2 Limit Switches 12 3 8 3 Reference Switch 12 3 8 4 Integrated PWM Amplifier 12 Cont...

Страница 4: ... System 27 5 6 Connecting the L 509 to a Controller 30 5 7 Connecting the Power Adapter to the L 509 31 6 Startup 33 6 1 General Notes on Startup 33 6 2 Starting and Operating the Positioner 35 6 2 1 L 509 Entries in the PI Positioner Database 36 7 Maintenance 37 7 1 General Notes on Maintenance 37 7 2 Performing a Maintenance Run 37 7 3 Cleaning the L 509 37 8 Troubleshooting 39 8 1 Possible Caus...

Страница 5: ...nsions 52 10 2 1 L 509 Positioner 52 10 2 2 Hole Pattern of the Motion Platform of the L 509 54 10 2 3 L 500 AV3 Adapter Bracket 55 10 3 Tightening Torque for Screws ISO 4762 A2 56 10 4 Pin Assignment 57 10 4 1 HD D Sub 26 Male 57 10 4 2 D Sub 15 Male 59 10 4 3 D Sub 9 Male 60 10 4 4 M8 4 pin Male 61 11 Old Equipment Disposal 63 12 EU Declaration of Conformity 65 ...

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Страница 7: ...f the user manuals are available for download on our website page 3 1 2 Symbols and Typographic Conventions The following symbols and typographic conventions are used in this user manual CAUTION Dangerous situation If not avoided the dangerous situation will result in minor injury Measures for avoiding the risk NOTICE Dangerous situation If not avoided the dangerous situation will result in damage...

Страница 8: ...ad is in the center of the platform Max push pull force Maximum force in the direction of motion Some stages may have higher forces but with limited lifetimes In the case of vertical mounting the specified value see 45 for models without a gearhead and brake only applies when the servo mode is on Linear encoder The linear encoder is an incremental sensor for capturing changes in position Signals f...

Страница 9: ... 663 12 Stepper Motor Controller MS241E User Manual C 863 12 DC Motor Controller MS249E User Manual C 884 xDC DC Motor Controller MS243E User Manual C 891 PIMag Motor Controller MS251E User Manual G 910 RC0102x00 G910M0002EN UserManual G 910 RC0242x00 G910M0001EN UserManual G 910 RC0302200 G910M0003EN UserManual C 885 C885T0002 User Manual C 891 11C885 C891T0005 User Manual C 663 12C885 C663T0004 ...

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Страница 11: ...11 The controller is not in the scope of delivery of the L 509 2 2 General Safety Instructions The L 509 is built according to state of the art technology and recognized safety standards Improper use of the L 509 may result in personal injury and or damage to the L 509 Only use the L 509 for its intended purpose and only use it if it is in perfect condition Read the user manual Eliminate any fault...

Страница 12: ...tion due to an incomplete user manual can result in minor injury and damage to equipment Only install and operate the L 509 after you have read and understood this user manual Personnel qualification The L 509 may only be installed started up operated maintained and cleaned by authorized and appropriately qualified personnel ...

Страница 13: ...city 50 mm s maximum velocity ball screw incremental rotary encoder 16384 counts rev sensor resolution A B quadrature RS 422 26 mm L 509 20AD10 52 mm L 509 40AD10 102 mm L 509 14AD00 Precision linear stage DC motor with ActiveDrive 100 N load capacity 50 mm s maximum velocity ball screw incremental linear encoder 0 05 nm sensor resolution A B quadrature RS 422 26 mm L 509 24AD00 52 mm L 509 44AD00...

Страница 14: ...plug L 509 xASD00 and L 509 0x3111 models only 6 Motor connector for L 509 x0SD00 L 509 xASD00 L 509 x0DG10 L 509 0x3111 L 509 0x3132 L 509 0x5132 HD D Sub 26 panel plug for L 509 x0AD10 L 509 x4AD00 D Sub panel plug 15 7 Vibration absorber L 509 x0SD00 and L 509 xASD00 models only 8 Power adapter connector L 509 x0AD10 and L 509 x4AD00 models only 3 3 Direction of Motion Figure 2 Direction of mot...

Страница 15: ...ch L 509 Meaning of the places counting from left 1 internal information 2 and 3 year of manufacture 4 to 9 consecutive numbers 2 6 Manufacturer s logo 2 7 Warning sign Observe manual 2 8 Country of origin Germany Country of origin 2 10 CE conformity mark 2 11 WWW PI WS Manufacturer s address website 2 12 Old equipment disposal 3 Sensor Linear encoder connector L 509 x4AD00 L 509 xASD00 L 509 0x31...

Страница 16: ...er p 7 x x MP146EK Short instructions for stages with electric motors x x 62345070 or 62345016 depending on the positioner Screw set for mounting the positioner 4 or 8 socket head screws ISO 4762 M4x14 2 dowel pins ISO 2338 4 m6 x 12 x x 7300900006 0180 Power supply set consisting of C 663 PS wide input range power supply 24 V 120 W K050B0003 adapter for power adapter connection barrel connector t...

Страница 17: ...0x31xx L 509 0x5132 C 663 12 C 885 with C 663 12C885 x C 863 12 C 885 with C 863 20C885 x x x C 884 4DC C 884 6DC x x x C 891 130300 C 885 with C 891 11C885 x G 910 x x x x G 901 x x x x PC software is in the scope of delivery of the controllers from PI The operation of the controllers is described in the corresponding user manuals 3 8 Technical Features 3 8 1 Encoder The L 509 x0SD00 models are n...

Страница 18: ...e runs into the hard stop See Limit Switch Specifications for more information p 50 3 8 3 Reference Switch The stage is equipped with one direction sensing reference switch that is located at about the midpoint of the travel range This sensor provides a TTL signal indicating whether the stage is on the positive or negative side of the reference switch The commands that use the reference signal are...

Страница 19: ...e 2 Compare the contents with the items listed in the contract and the packing list 3 Inspect the contents for signs of damage If there is any sign of damage or missing parts contact PI immediately 4 Keep all packaging materials in case the product needs to be returned 4 Unpacking ...

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Страница 21: ...cation of the holding force in Data table p Fehler Textmarke nicht definiert NOTICE Electrostatic hazard Touching the pins in the connections of the L 509 can damage electrostatic sensitive devices ESD of the L 509 For this reason the L 509 is supplied with ESD protection on all connections Do not remove the ESD protection from the connections until you connect the L 509 to the controller NOTICE C...

Страница 22: ...lignment of the positioner If possible simulate the platform motion with a mounted load or make suitable calculations to detect collisions or unfavorable center of gravity constellations If necessary take suitable constructive measures to avoid collisions and instability in the overall system Avoid or mark danger zones that result from the installation of the positioner and the application in acco...

Страница 23: ...the accuracy Mount the L 509 onto an even surface The recommended flatness of the surface is 10 µm For applications with large temperature changes Only mount the L 509 on surfaces that have the same or similar thermal expansion properties as the L 509 INFORMATION For mounting onto a surface the L 509 has mounting holes for M4 screws in its base body The number of holes available depends on the mod...

Страница 24: ...For applications with large temperature changes The surface should have the same or similar thermal expansion properties as the L 509 e g surface made of aluminum You have accounted for the space required to route cables without bending and according to regulations Tools and accessories Mounting kit in the scope of delivery p 10 4 or 8 socket head screws ISO 4762 M4x14 2 dowel pins ISO 2338 4 h8 1...

Страница 25: ... to the mounting holes in the base body of the positioner Possible measures Temporary startup of the positioner p 33 and commanding the platform to a suitable position Moving the motion platform by hand p 41 3 Insert the screws into all accessible mounting holes and tighten 4 Repeat steps 2 to 4 for all available concealed mounting holes 5 Check that the positioner is affixed firmly to the surface...

Страница 26: ...e protective earth conductor but it is not possible to connect the protective earth conductor directly to the load The load and the platform are connected conductively to each other INFORMATION Pay attention to the applicable standards for connecting the protective earth conductor An M4 hole for the protective earth conductor connection is marked on the longitudinal side of the L 509 In the follow...

Страница 27: ... section 0 75 mm2 Screw M4x8 ISO 7045 2 washers ISO 7089 4 2 safety washers S4 Suitable screwdriver Connecting the L 509 to the protective earth conductor 1 If necessary attach a suitable cable lug to the protective earth conductor 2 Affix the cable lug of the protective earth conductor using the M4 screw on the protective earth connection of the L 509 as shown in the profile view 3 Tighten the M4...

Страница 28: ...m p 52 of the lower positioner Only use screws and locating pins of the correct length for the respective mounting holes Requirements You have read and understood the general notes on installation p 15 You have mounted the stage onto a surface properly p 17 The stage is not connected to the controller You have prepared the load so that it can be affixed to the mounting holes on the motion platform...

Страница 29: ...lign the load so that the selected mounting holes in the motion platform p 54 can be used to affix it If you use locating pins to align the load c Insert the locating pins into the locating holes in the platform d Place the load on the platform so that the locating pins are inserted into the corresponding locating holes on the other side 2 Use the screws to affix the load on the selected mounting ...

Страница 30: ...apters p 10 in the calculation of the load to be moved For all stages in a multi axis system Do not exceed the maximum permissible load When the positioner is mounted vertically make sure that the installed load is lower than the self locking of the drive Only install and operate the multi axis system after you have read and understood the user manuals for all components of the multi axis system I...

Страница 31: ...xamples of an XY system consisting of two L 509 Requirements You have read and understood the general notes on installation p 15 You have read and understood the general notes on building a multi axis system p 24 You have accounted for the space required to route cables without bending and according to regulations You have mounted the lower stage onto a surface properly p 17 Tools and accessories ...

Страница 32: ...5 Installation 26 Version 1 6 MP141E L 509 Linear Stage Building an XY system Figure 9 Moving the platform and inserting the screws 1 Lower positioner 2 Upper positioner 3 M4x14 screw ...

Страница 33: ...dy of the upper positioner 4 Check that the upper positioner is affixed firmly 5 5 3 Building a Z System NOTICE Excessively long screws Screws and locating pins that are inserted too deeply can damage the lower stage Pay attention to the depth of the mounting holes in the motion platform of the lower positioner p 52 Only use screws and locating pins of the correct length for the respective mountin...

Страница 34: ... for the space required to route cables without bending and according to regulations If you build an XZ combination You have mounted the lower positioner onto a surface properly p 17 If you build an XYZ combination You have attached the stages for the X and Y axis properly p 24 Tools and accessories L 500 AV3 adapter bracket available as optional accessory p 10 4 socket head screws ISO 4762 M4x14 ...

Страница 35: ...the mounting bracket are covered b Insert four M6x12 screws into the mounting holes of the adapter bracket c Insert the four screws and tighten 2 Check that the adapter bracket and the lower stage are affixed firmly 3 Mount the upper stage to the long side of the adapter bracket a Align the upper stage so that the motor module points away from the origin of the sides of the adapter bracket i e upw...

Страница 36: ...order and your specific positioner controller combination to connect the positioner to the controller Requirements You have read and understood the general notes on installation p 15 You have installed the controller You have read and understood the user manual for the controller The controller is switched off Tools and accessories Cable according to your order Suitable tools for tightening the sc...

Страница 37: ...ximum output current 5 A Snap on ferrite suppressor Impedance at 25 MHz Approx 176 Ω Power cord Three wires cable cross section at least 3 0 75 mm2 3 AWG18 maximum length 2 m Connecting the power adapter to the L 509 1 Attach the snap on ferrite suppressor to the cable that is attached to the power adapter a Lay the cable approx 50 mm from the barrel connector into the opened snap on ferrite suppr...

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Страница 39: ...sible between the positioner the load to be moved and the surroundings in the motion range of the positioner Do not place any objects in areas where they can be caught by moving parts Stop the motion immediately if a controller malfunction occurs If possible adapt the travel range limits of your mechanical system in the software that you use for commanding the motion NOTICE Damage if an incorrect ...

Страница 40: ...ation NOTICE Unintentional motion Unintentional motion of the L 509 is possible when it is connected to the controller Defective or incorrect operation of the software can also result in unintentional motion Do not place any objects in areas where they can be caught by moving parts Before connecting the L 509 check whether a macro is defined as the startup macro in the controller and cancel the se...

Страница 41: ...tware used The controller and the required PC software have been installed All connections on the controller have been set up see Connecting the L 509 to the Controller p 30 and the user manual for the controller Starting and operating the positioner 5 L 509 xxADxx models only Connect the power cord of the power adapter to the power socket 6 Start and operate the controller see user manual for the...

Страница 42: ... For PI controllers you can select the connected stage from a stage database in the corresponding PC software The appropriate operating parameters are therefore loaded to the controller You can find a detailed description in the user manual for the controller or in the manual for the PC software used ...

Страница 43: ...tire travel range in order for the existing lubricant to be distributed evenly If you operate your stage continuously over only a short travel range 20 of the entire travel range perform a run across the entire travel range approximately every 2000 motion cycles Relubricating Under laboratory conditions the positioner needs extra lubrication in exceptional cases only For continuous industrial use ...

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Страница 45: ...er the entire travel range p 37 Impairment of the function after system modification Controller was replaced The LS509 was replaced by another model Controller from PI Load the parameters from the positioner database that correspond to the combination of controller and the L 509 model Controller from a third party supplier Check the operating parameters For L 509 x0SD00 models Actual position devi...

Страница 46: ... the position sensor of the stage 1 Read out the error code of the controller in the PC software If there is a motion error error code 1024 is output 2 Check your system and make sure that all axes can be moved safely 3 Switch on the servo mode for the affected axis in the PC Software For details see the user manual for the controller Motion platform has triggered the limit switch If you use a con...

Страница 47: ...the platform is not possible for the L 509 x0AD10 L 509 x4AD00 L 509 x0DG10 models Figure 11 Position of the vibration absorber 1 Motor 2 Vibration absorber Requirements The stage is not connected to the controller Moving the platform by hand Turn the vibration absorber as far as necessary Clockwise rotation Platform moves away from the motor Counterclockwise rotation Platform moves in the directi...

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Страница 49: ...on Product codes and serial numbers of all products in the system Firmware version of the controller if applicable Version of the driver or the software if applicable Operating system on the PC if applicable If possible Take photographs or make videos of your system that can be sent to our customer service department if requested The latest versions of the user manuals are available on our website...

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Страница 51: ...irectional repeatabili ty in X µm Typ 0 1 0 1 0 1 0 2 0 2 0 2 0 2 0 2 Bidirectional repeatability in X µm Typ 0 2 0 2 0 2 0 5 0 5 0 5 0 5 0 5 Minimum incremental motion in X µm Typ 0 1 0 1 0 1 0 5 0 5 0 5 0 5 0 5 Sensor signal Sin cos 1 V peak peak Sin cos 1 V peak peak Sin cos 1 V peak peak A B quadra ture RS 422 A B quadra ture RS 422 A B quadra ture RS 422 A B quadra ture RS 422 A B quadra ture...

Страница 52: ...l Aluminum steel Aluminum steel Miscellaneous Unit L 509 023111 L 509 033111 L 509 053111 L 509 023132 L 509 033132 L 509 053132 L 509 025132 L 509 035132 Connector HD D sub 26 pin m HD D sub 26 pin m HD D sub 26 pin m HD D sub 26 pin m HD D sub 26 pin m HD D sub 26 pin m HD D sub 26 pin m HD D sub 26 pin m Sensor connector D sub 9 pin m D sub 9 pin m D sub 9 pin m Recommended controllers drivers ...

Страница 53: ...tor Motor resolution Full steps rev Nominal voltage V 24 24 24 24 24 24 24 24 Peak voltage V 48 24 24 24 24 24 24 48 Drive force in negative di rection of motion in X N Typ 60 60 60 60 60 60 60 60 Drive force in positive di rection of motion in X N Typ 60 60 60 60 60 60 60 60 Resistance phase phase Ω Typ 0 81 1 63 1 63 1 63 1 63 1 63 1 63 4 09 Inductance phase phase mH 0 64 0 27 0 27 0 27 0 27 0 2...

Страница 54: ...k in θZ with motion in X µrad Typ 90 120 60 90 120 60 90 120 Positioning Unit Toleran ce L 509 20DG10 L 509 40DG10 L 509 10SD00 L 509 20SD00 L 509 40SD00 L 509 1ASD00 L 509 2ASD00 L 509 4ASD00 Integrated sensor Incremental rotary en coder Incremental rotary en coder Incrementa l linear enco der Incrementa l linear enco der Incremental linear enco der Unidirectional repeatabili ty in X µm Typ 0 1 0...

Страница 55: ...50 50 Permissible push force in Z N Max 100 100 100 100 100 100 100 100 Permissible torque in θx N m Max 30 30 30 30 30 30 30 30 Permissible torque in θY N m Max 25 25 25 25 25 25 25 25 Permissible torque in θZ N m Max 20 20 20 20 20 20 20 20 Overall mass g 1600 1900 1400 1500 1700 1400 1600 1800 Material Aluminum steel Aluminum steel Aluminum steel Aluminum steel Aluminum steel Aluminum steel Alu...

Страница 56: ...W L 509 0x3111 L 509 0x3132 48 V 0 Hz L 509 0x5132 48 V 0 Hz 10 1 3 Ambient Conditions and Classifications The following ambient conditions and classifications must be observed for the L 509 Area of application For indoor use only Maximum altitude 2000 m Relative humidity Max 80 for temperatures up to 31 C Linearly decreasing to 50 at 40 C Storage temperature 20 C to 70 C Transport temperature 20 ...

Страница 57: ...he signal logic is active high That means Normal motor operation low 0 V Limit switch reached high 5 V 10 1 5 Reference Switch Specifications Type Optical sensor Supply voltage 5 V GND supplied via the motor connector Signal output Open collector Signal logic Direction sensing by means of different signal levels on the left and right side of the reference switch The signal level changes from 0 to ...

Страница 58: ...sions 10 2 1 L 509 Positioner For a detailed view X der of the motion platform see Hole Patterns of the Motion Platform of the L 509 p 54 All dimensions in mm Note that a comma is used in the drawings instead of a decimal point Figure 12 L 509 versions with stepper motor ...

Страница 59: ...10 Technical Data L 509 Linear Stage MP141E Version 1 6 53 Figure 13 L 509 versions with BLDC DC DC gearhead and ActiveDrive DC motors ...

Страница 60: ...4 Version 1 6 MP141E L 509 Linear Stage 10 2 2 Hole Pattern of the Motion Platform of the L 509 Dimensions in mm Note that the decimal places are separated by a comma in the drawings Figure 14 Hole pattern of the platform ...

Страница 61: ...hnical Data L 509 Linear Stage MP141E Version 1 6 55 10 2 3 L 500 AV3 Adapter Bracket Dimensions in mm Note that the decimal places are separated by a comma in the drawings Figure 15 L 500 AV3 adapter bracket ...

Страница 62: ...Figure 16 L 500 AV3 adapter bracket 10 3 Tightening Torque for Screws ISO 4762 A2 The following tightening torques for screws according to ISO4762 corresponds to DIN 912 A2 may not be exceeded Value Maximum tightening torque M3 1 5 Nm M4 2 Nm M5 2 5 Nm M6 3 Nm ...

Страница 63: ...26 panel plug L 509 x0SD00 L 509 xASD00 models Pin Signal Direction 1 Motor A Input 2 Motor A Input 3 Motor A Input 4 Motor A Input 5 Motor B Input 6 Motor B Input 7 Motor B Input 8 Motor B Input 9 10 REF Output 11 Limit E1 neg Output 12 Limit E2 pos Output 13 16 17 ID Output 18 Limit Power 5 V Input 19 24 25 GND limit 26 ...

Страница 64: ...t 11 Limit E1 neg Output 12 Limit E2 pos Output 13 16 17 ID Output 18 Limit Power 5 V Input 19 Encoder A Output 20 Encoder A Output 21 Encoder B Output 22 Encoder B Output 23 Encoder C Output 24 Encoder C Output 25 GND limit encoder 26 Encoder power 5 V Input L 509 0x5132 models Pin Signal Direction 1 Phase 1 Input 2 Phase 1 Input 3 Phase 2 Input 4 Phase 2 Input 5 Phase 3 Input 6 Phase 3 Input 7 9...

Страница 65: ...all 2 Output 15 Hall 3 Output 16 17 ID Output 18 Limit Power 5 V Output 19 Encoder A Output 20 Encoder A Output 21 Encoder B Output 22 Encoder B Output 23 Encoder C Output 24 Encoder C Output 25 GND 26 Encoder Power 5 V DC Input 10 4 2 D Sub 15 Male Figure 18 D Sub 15 panel plug L 509 x0AD10 and L 509 xAD00 models only Pin Signal Direction 1 2 Motor Input ...

Страница 66: ...SIGN Input 12 Limit neg Output 13 REF Output 14 Encoder A Output 15 Encoder B Output 10 4 3 D Sub 9 Male Figure 19 D Sub 9 panel plug L 509 xASD00 and L 509 0x3111 models only Pin Signal Direction 1 Linear encoder A Output 2 Linear encoder B Output 3 Linear encoder C Output 4 Linear encoder GND 5 Linear encoder Power 5 V Input 6 Linear encoder A Output 7 Linear encoder B Output 8 Linear encoder C ...

Страница 67: ...l Direction 9 10 4 4 M8 4 pin Male Connecting a power adapter is only necessary for the L 509 x0AD10 and L 509 x4AD00 models Figure 20 Power adapter connector M8 4 pin Pin Signal Direction 1 GND GND 2 GND GND 3 24 V DC supply voltage Input 4 24 V DC supply voltage Input ...

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Страница 69: ...ng to international national and local rules and regulations In order to fulfil the responsibility as the product manufacturer PI miCos GmbH undertakes environmentally correct disposal of all old PI miCos equipment made available on the market after 13 August 2005 without charge Any old PI miCos equipment can be sent free of charge to the following address PI miCos GmbH Freiburger Strasse 30 79427...

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Страница 71: ...claration of Conformity has been issued for the L 509 in accordance with the following European directives EMC Directive RoHS Directive The standards applied for certifying the conformity are listed below EMC EN 61326 1 Safety EN 61010 1 RoHS EN 50581 12 EU Declaration of Conformity ...

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