7
7.1
7.2
7.3
7.4
7.5
Additional parameter for the DCU
8
8.1
Putting the vacuum pump into operation
8.2
8.3
Configuring the connections with the Pfeiffer Vacuum parameter set
8.3.1 Configuring the digital outputs
8.3.2 Selecting the interfaces
8.4
8.4.1 Normal operation
8.4.2 Stand-by operation
8.4.3 Speed actuator operation
8.5
8.5.1 Operating mode display via LED
8.5.2 Temperature monitoring
8.6
9
9.1
9.2
Checklist for inspection and maintenance
9.3
Change the diaphragms and valves
9.3.1 Dismantle the diaphragm head and valves
9.3.2 Replace the diaphragms and valves
9.3.3 Mount the diaphragm head and valves
10
10.1 Shutting down for longer periods
10.2 Disposing of the vacuum pump
11
11.1 General
11.2 Error codes
11.3 Warning and error messages when operating with DCU
12
Service solutions from Pfeiffer Vacuum
13
14
14.2 Ordering accessories
15
15.1 General
15.2 Technical data
15.3 Substances in contact with the media
15.4 Dimensions
Table of contents
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