Pfeiffer Vacuum HIPACE 80 NEO, Руководство по эксплуатации

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VACUUM CHAMBER
Fig. 3: Example: Safety connections
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Safety connections, customer-side
5.2.3 Using a splinter shield or protective screen
Pfeiffer Vacuum centering rings with splinter shield or protective screen in the high vacuum flange pro-
tect the turbopump against foreign matter from the vacuum chamber. The pumping speed of the turbo-
pump reduces according to the passage guide values and the size of the high vacuum flange.
Flange size Reduced pumping speed in % for the gas type
H
2
He N
2
Ar
Splinter shield DN 40 6 9 17 18
Splinter shield DN 63 3 6 15 16
Protective screen DN 63 1 1 4 4
Tbl. 7: Effect of splinter shield or protective screen on pumping speed
Procedure
1. With ISO flanges, use centering rings with protective screen or splinter shield.
2. For CF flanges, always insert protective screen or splinter shield with the clamping lugs pointing
towards the rotor in the high vacuum flange.
5.2.4 Using the vibration compensator
Pfeiffer Vacuum vibration compensators are suitable for use on vibration-sensitive systems.
WARNING
Risk of injury caused by the turbopump breaking away with the vibration compensator in the
event of a malfunction
Sudden jamming of the rotor generates high destructive torques in accordance with ISO 27892.
When using a vibration compensator, this will probably lead to the turbopump being sheared off in
use. The energy that this would release could throw the entire turbopump or shattered pieces from its
interior through the surrounding space. Potentially dangerous gases can escape. There is a risk of
very serious injuries, including death, and extensive property damage.
► Take suitable safety precautions on-site for the compensation of the occurring torques.
► Before installing a vibration compensator, you must first of all contact Pfeiffer Vacuum.
Installing the vibration compensator
1. Install the vibration compensator only with vertical passage.
2. Consider the flow resistance.
Installation
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