22
Technical data and dimensions
12 Technical data and dimensions
12.1 General
Basic principles for the Technical Data of Pfeiffer Vacuum Turbopumps:
• Recommendations of PNEUROP committee PN5
• ISO 21360; 2007: "Vacuum technology - Standard methods for measuring vacu-
um-pump performance - General description"
• ISO 5302; 2003: "Vacuum technology - Turbomolecular pumps - Measurement of
performance characteristiques"
• Ultimate pressure: using a test dome and a 48 hrs. period of baking out
• Gas throughput: water cooling; backing pump = rotary vane pump (10 m
3
/h)
• Cooling water consumption: at max. gas throughput, cooling water temp. 25 °C
• Integral leack rate: using a Helium concentration of 100 %, period 10 s
• Acoustic pressure: Distance 1 m to the pump
12.2 Technical data
12.3 Dimensions
Parameter
HiCube 80 Eco
HiCube 80 Eco
HiCube 80 Eco
Flange (in)
DN 63 ISO-K
DN 63 CF-F
DN 40 ISO-KF
Venting connection
G 1/8"
G 1/8"
G 1/8"
Run-up time
1.7 min
1.7 min
1.7 min
Enddruck
1·10
-7
mbar
5·10
-10
mbar
1·10
-7
mbar
Cooling method, standard
Luft
Luft
Luft
Operating voltage power supply
90-265 V AC
90-265 V AC
90-265 V AC
Relative humidity of air
5-85 non condensing % 5-85 non condensing % 5-85 non condensing %
Weight
16,6 kg
18 kg
16,6 kg
68
3
9
.5
42
B
184.5
3.2
A
325
163
100
7
9
12
9
301
10
H
H
G
G
G
F
F
V
Maße
HiCube 80 Eco, DN 63
ISO-K, MVP 015
HiCube 80 Eco, DN 63
CF-F, MVP 015
HiCube 80 Eco, DN 40
ISO-KF, MVP 015
A
347 mm
349.5 mm
352.5 mm
B
159 mm
165 mm
168 mm
