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Page 4 Instruction manual Parker X-Flow FM-1407 Rev - 11/2021

1 General Product Information

1.1 Introduction

This user guide covers the X-Flow™ mass flow controllers for gasses as shown in the pictures below.

Included is product information, installation instructions, operation, maintenance, troubleshooting and

technical specifications.

601XF

1.2 Intended Use

The intended use of X-Flow™ instruments is to control gas flow rates of the specified gas noted on the

instrument label. The gas must be clean.

The instruments can be used for either (fast) switching or controlling a constant flow rate.

1.3 Symbols

Important information. Discarding this information could cause injuries to people or damage to

the Instrument or installation.

Helpful information. This information will facilitate the use of this instrument.

Additional info available from the factory or your local sales representative.

1.4 Product Support References

Instructions:

Operating instructions digital instruments, document FM-1245.

RS232 interface with FLOW-BUS protocol, document FM-1249

Technical drawings:

Hook-up diagram X-Flow™, document FM-1409

X-Flow™ Dimensional drawing 601XF, document A-4539

X-Flow™ Transition Plate Dimensional drawing, document A-4540

All these documents are available at

www.parker.com/precisionfluidics/X-Flow™

or by request to [email protected].

Содержание X-Flow FM-1407

Страница 1: ...11 FM 1407...

Страница 2: ...injury and or damage to the equipment Even though care has been taken in the preparation and publication of the contents of this manual we do not assume legal or other liability for any inaccuracy mis...

Страница 3: ...urging 12 2 11 Zeroing 13 3 Basic Operation 14 3 1 General 14 3 2 Analog operation 14 3 3 Digital communication protocol detection Flow BUS RS232 or MODBUS RS485 15 3 4 Basic RS232 Flowbus operation 1...

Страница 4: ...ng a constant flow rate 1 3 Symbols Important information Discarding this information could cause injuries to people or damage to the Instrument or installation Helpful information This information wi...

Страница 5: ...mal mass flow sensor a laminar flow element which acts as a bypass a solenoid proportional control valve and a digital electronic PC board for PID control and communication There is one model 601XF fo...

Страница 6: ...ity to ensure compatibility there is no liability for damages accruing from the use of this manual or other sources regarding compatibility Compatibility of seals with gasses can impact reliability of...

Страница 7: ...rmal conditions 1 calibration fluid N2 2 customer fluid Contact the factory for more information 1 5 5 Features Each instrument consists of an Analog interface a digital RS 232 interface and a digital...

Страница 8: ...s the delta T sensed by the upstream and downstream temperature sensors on the capillary The transfer function between gas mass flow and signal can be described by the equation m p signal c K V Vsigna...

Страница 9: ...ts Units may be flushed with clean dry inert gas In case of severe contamination it may be required to clean the inside of the instrument After cleaning a recalibration is required Contact ppfinfo par...

Страница 10: ...ing pressure of the process conditions stipulated by the customer with a minimum of 8 bar Each instrument is helium leak tested to at least 2 10 9 mbar l s Helium outboard The tested pressure is state...

Страница 11: ...ed It is recommended to install an in line filter or liquid separator upstream of the flow controller and if backflow can occur a downstream filter is recommended too Be aware of the pressure drop cau...

Страница 12: ...been made according to the hook up diagram It is recommended to turn on power before applying pressure on the instrument and to switch off power after removing pressure Check fluid connections and mak...

Страница 13: ...ing by means of using the micro switch button on top of unit is described in this manual Warm up pressurize the system and fill the instrument according to the process conditions Make sure no flow is...

Страница 14: ...l mode indicates to which setpoint source the controller should respond 3 2 Analog operation In analog operation following signals are available Measured value analog output Setpoint analog input The...

Страница 15: ...ocol The protocol is detected The instrument will remember the detected protocol while the instrument is powered on 3 4 Basic RS232 Flowbus operation RS232 Flowbus communication can be used for operat...

Страница 16: ...ns are available from the factory A special RS232 cable 7 03 366 can be ordered separately It consists of a T part with 1 male and 1 female sub D 9 connector on one instrument side and a normal female...

Страница 17: ...be done in the following ways Using RS232 FlowDDE Off line via the RS232 communication port by means of FlowDDE This program can be used to read change parameters including the slave address baud rate...

Страница 18: ...both LEDs will flash The flashes are called count flashes and have a pattern of 0 5 seconds on 0 5 seconds off Table LED indications for bus address and baud rate Read bus address and baud rate In run...

Страница 19: ...0 1 sec off count flashes start when switch is pressed 0 5 sec on 0 5 sec off time out 60 sec Press switch and count red and green flashes for baud rate setting Release after desired count Counts to...

Страница 20: ...00 baud and 400 bytes at 38400 baud When this size is exceeded corrupted responses may be received Write Single Register 06 Possible exception responses 02 ILLEGAL DATA ADDRESS in case of writing to n...

Страница 21: ...ion responses 04 SLAVE DEVICE FAILURE in case of an internal error 3 5 5 Available parameters Modbus registers in the data model are numbered from 1 to 65536 In a Modbus PDU Protocol Data Unit these r...

Страница 22: ...59 0xF259 0xF25A 62041 62042 PID Kp Float RW 0xF2A8 0xF2A9 0xF2A9 0xF2AA 62121 62122 PID Ti Float RW 0xF2B0 0xF2B1 0xF2B1 0xF2B2 62129 62130 PID Td Float RW 0xF2B8 0xF2B9 0xF2B9 0xF2BA 62137 62138 Ksp...

Страница 23: ...off At next power up instrument will be active again LED indications using micro switch button at normal running mode of an instrument Power up menu press switch and hold for indicated time and LED i...

Страница 24: ...tart when switch is pressed 0 5 sec on 0 5 sec off Counts to max 2 and then starts at 0 again When counting fails keep switch pressed and restart counting for next attempt 2 Set units of setpoint cont...

Страница 25: ...pe Unsigned char 1 byte character Unsigned char x x byte array string Unsigned int 2 byte unsigned integer Float 4 byte floating point Access R The parameter is read only RW The parameter can be read...

Страница 26: ...e particular time frame of a protocol then it will immediately switch to this protocol for 660 mS If a valid message is received the instrument will answer reply to this message and stay in the detect...

Страница 27: ...een 0 and 100 Control Mode Type Access Range FlowDDE Flowbus Modbus Unsigned int RW 0 18 12 1 4 0x0024 37 The Controller mode is used to select different functions of the instrument The following mode...

Страница 28: ...1 2 Identification Serial number Type Access Range FlowDDE Flowbus Modbus Unsigned char 20 R 92 113 3 0xF118 0xF11F 61721 61728 This parameter consists of a maximum 20 byte string with instrument ser...

Страница 29: ...ty zero point offset for direct reading in sensor base units 4 1 4 Auto Zeroing To start the auto zero procedure two parameters should be written Control Mode Type Access Range FlowDDE Flowbus Modbus...

Страница 30: ...Range FlowDDE Flowbus Modbus PDU Float RW 0 1E 10 168 114 22 0xF2B0 0xF2B1 62129 62130 Integration action in seconds of the PID controller The value should not be changed Td PIDTd Type Access Range Fl...

Страница 31: ...n reset the instrument will return to its default control mode The default control mode can be changed with the following parameter IOStatus Type Access Range FlowDDE Flowbus Modbus PDU Unsigned char...

Страница 32: ...bus PDU Unsigned char RW 0 255 86 114 11 0xF258 62041 Bit 3 7 0 is used to disable the micro switch 0 micro switch disabled 1 micro switch enabled Procedure to enable the micro switch Read IOStatus Ad...

Страница 33: ...e table below Diameter mm Kv Normally closed p max bard 0 05 0 07 0 10 0 14 0 20 0 30 0 37 0 50 0 70 1 00 1 30 1 50 1 70 2 00 4 33 x 10 5 8 48 x 10 5 1 73 x 10 4 3 39 x 10 4 6 93 x 10 4 1 56 x 10 3 2...

Страница 34: ...t valve qualified personnel only Screen in inlet fitting blocked 1f clean screen Sensor capillary failure 1g return to factory Improper Control Mode setpoint source 1h See Section 3 7 Maximum output s...

Страница 35: ...le Contact your local Parker Sales office In the US contact the Parker factory or send an email describing the problem to ppfinfo parker com PARKER HANNIFIN CORPORATION INSTRUMENTATION GROUP PRECISION...

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