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Engineering Data (Reference Value)
150
ZX2 User’s Manual
INTRODUCTION
MAIN
APPLICATIONS
& SETTING
METHODS
SPECIFI-
CATIONS
INDEX
SETTING
TRANSITION
CHARTS
DETAILED
SETTINGS
FLOW OF
OPERATION
CONTENTS
PREPARATION
FOR
MEASUREMENT
BASIC
SETUP
TROUBLE-
SHOOTING
Height
Double
Sheet
Detection
Positioning
Eccentricity
and Surface
Deflection
Steps
and
Warpage
Thickness
Linearity Characteristic for Different Materials
Beam Size
Spot Beams
ZX2-LD50
ZX2-LD100
ZX2-LD50V
Line Beams
ZX2-LD50L
ZX2-LD100L
ZX2-LD50V
1.0
0.8
0.6
0.4
0.2
0
-0.2
-0.4
-0.6
-0.8
-1.0
-3
-5
-1
1
3
5
-4
-2
0
2
4
0 Inclination
Flat mirror
Silicon wafer
Glass
Note. X axis displacement: Measurement distance displayed on
the
Amplifier
Unit
For the measurement distance displayed on the Amplifier Unit,
the measurement center distance is displayed as 0,
and the NEAR and FAR sides from the sensor are displayed by
+
and
-, respectively.
Displacement [mm]
Measurement center distance
NEAR side
FAR side
Error [
%F
.S]
Inclination
L
+10 mm
0 mm
– 4 mm
–10 mm
X
Approx.
600 µm
Approx.
160 µm
Approx.
40 µm
Approx.
220 µm
Y
Approx.
350 µm
Approx.
90 µm
Approx.
60 µm
Approx.
130 µm
L
+35 mm
0 mm
–20 mm
–35 mm
X
Approx.
1.1 mm
Approx.
400 µm
Approx.
70 µm
Approx.
250 µm
Y
Approx.
550 µm
Approx.
190 µm
Approx.
110 µm
Approx.
150 µm
L
+5 mm
0 mm
– 4.2 mm
–5 mm
X
Approx.
350 µm
Approx.
160 µm
Approx.
40 µm
Approx.
50 µm
Y
Approx.
180 µm
Approx.
90 µm
Approx.
60 µm
Approx.
70 µm
Y
X
L
Beam
cross-section
Y
10.5
X
L
Beam
cross-section
L
+10 mm
0 mm
– 4 mm
–10 mm
X
Approx.
2.6 mm
Approx.
2.6 mm
Approx.
2.6 mm
Approx.
2.6 mm
Y
Approx.
350 µm
Approx.
90 µm
Approx.
60 µm
Approx.
130 µm
L
+35 mm
0 mm
–20 mm
–35 mm
X
Approx.
2.1 mm
Approx.
2.5 mm
Approx.
2.7 mm
Approx.
2.9 mm
Y
Approx.
550 µm
Approx.
190 µm
Approx.
110 µm
Approx.
150 µm
Y
X
L
Beam
cross-section
Note. L: Measurement distance displayed on the
Amplifier Unit (For the measurement
distance displayed on the Amplifier Unit,
the measurement center distance is
displayed as 0, and the NEAR and FAR
sides from the sensor are displayed by +
and –, respectively.)