For full specifications and additional models please refer to the (attached) CD or www.europe.omron.com
Displacement / measurement sensors - Cat.-No. Q18E-EN-01
1
ZS family series
Displacement / measurement sensors
The scalable measurement sensor
for all surfaces
Smart ZS family series offers superb dynamic sensing range for all
surfaces from black rubber to glass and mirror surfaces by simply
scaling it to your needs.
• High dynamic sensing range for all surfaces
• High resolution of 0.25 µm
• Modular and scalable platform concept for up to 9 sensors
• Easy to use, install and maintain for all user levels
• Fast response time of 110 µs
Features
The scalable platform for more flexibility
• Connect and expand up to 9 controllers
• Connect multi-calculation controller for advanced calculations like
evenness or flatness
• Connect data storage module for process-data logging
• Connect PC software for easy system set up and signal monitoring
• Sensor head with 2D-CMOS technology with high dynamic sensing
range for measuring black rubber, plastic, shiny, glass and mirror
surfaces
• Advanced application settings
• Easy reconfiguration and teaching
Measurement tools:
• Hight measurement
• Step measurement
• Thickness measurement
• Flatness measurement
• Average measurement
• Excentricity
• Warpage / Evenness
ZSH:
• Multitasking capability manages up to 4 measurement tools
in one controller
Ordering information
Sensor heads
ZS-L-series Sensor Heads
ZS-HL-series Sensor Heads
ZS-HL-series Sensor Heads (For Nozzle Gaps) also compatible with ZS-L controller
Optical system
Sensing distance
Beam shape
Beam diameter
Resolution
*1
*1
No. of samples to average: 128 when set to High-precision Mode.
Model
Regular Reflective Models
20±1 mm
Line beam
900 x 25 µm
0.25 µm
ZS-LD20T
Spot beam
25 µm dia.
ZS-LD20ST
40±2.5 mm
Line beam
2000 x 35 µm
ZS-LD40T
Diffuse Reflective Models
50±5 mm
Line beam
900 x 60 µm
0.8 µm
ZS-LD50
Spot beam
50 µm dia.
ZS-LD50S
80±15 mm
Line beam
900 x 60 µm
2 µm
ZS-LD80
130±15 mm
Line beam
600 x 70 µm
3 µm
ZS-LD130
200 ±50 mm
Line beam
900 x 100 µm
5 µm
ZS-LD200
350 ±135 mm
Spot beam
240 µm dia.
20 µm
ZS-LD350S
Optical system
Sensing distance
Beam shape
Beam diameter
Resolution
*1
Model
Regular Reflective Models
20 ±1 mm
Line beam
1.0 mm x 20 µm
0.25 µm
ZS-HLDS2T
Diffuse Reflective Models
50±5 mm
1.0 mm x 30 µm
0.25 µm
ZS-HLDS5T
100±20 mm
3.5 mm x 60 µm
1 µm
ZS-HLDS10
600±350 mm
16 mm x 0.3 mm
8 µm
ZS-HLDS60
1500±500 mm
40 mm x 1.5 mm
500 µm
ZS-HLDS150
Optical system
Sensing distance
Beam shape
Beam diameter
Resolution
*1
*1
Refer to the table of ratings and specifications for details.
Model
Regular Reflective Models
10±0.5 mm
Line beam
900 x 25 µm
0.25 µm
ZS-LD10GT
15±0.75 mm
ZS-LD15GT
ZS family series
Displacement / measurement sensors
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ZS-HL-series Sensor Controllers
ZS-L-series Sensor Controllers
Multi-Controllers
Data Storage Units
Specifications
ZS-L-series Sensor Heads
Shape
Supply voltage
Control outputs
Model
24 VDC
NPN outputs
ZS-HLDC11
PNP outputs
ZS-HLDC41
Shape
Supply voltage
Control outputs
Model
24 VDC
NPN outputs
ZS-LDC11
PNP outputs
ZS-LDC41
Shape
Supply voltage
Control outputs
Model
24 VDC
NPN outputs
ZS-MDC11
PNP outputs
ZS-MDC41
Shape
Supply voltage
Control outputs
Model
24 VDC
NPN outputs
ZS-DSU11
PNP outputs
ZS-DSU41
Item
Model
ZS-LD20T
ZS-LD20ST
ZS-LD40T
ZS-LD10GT
ZS-LD15GT
Applicable Controllers
ZS-HLDC/LDC series
Optical system
Regular
reflection
Diffuse
reflection
Regular
reflection
Diffuse
reflection
Regular
reflection
Diffuse
reflection
Regular reflection
Measuring center distance
20 mm
6.3 mm
20 mm
6.3 mm
40 mm
30 mm
10 mm
15 mm
Measuring range
±1 mm
±1 mm
±1 mm
±1 mm
±2.5 mm
±2 mm
±0.5mm
±0.75 mm
Light source
Visible semiconductor laser (wavelength: 650 nm, 1 mW max., JIS Class 2)
Beam shape
Line beam
Spot beam
Line beam
Beam diameter
*1
*1
Defined as 1/e
2
(13.5%) of the center optical intensity at the actual measuring center distance (effective value). The beam diameter is sometimes influenced by
the ambient conditions of the workpiece, such as leaked light from the main beam.
900 x 25 µm
25 µm dia.
2,000 x 35 µm
Approx. 25 x 900 µm
Linearity
*2
*2
This is the error in the measured value with respect to an ideal straight line. The standard workpiece is white aluminum ceramics and glass in the regular reflection
mode. Linearity may change according to the workpiece.
±0.1%F.S.
Resolution
*3
*3
This is the peak-to-peak displacement conversion value in the displacement output at the measuring center distance in high-precision mode when the number of
samples to average is set to 128 and the measuring mode is set to the high-resolution mode. The standard workpiece is white aluminum ceramics and glass in the
regular reflection mode.
0.25 µm
0.25 µm
0.4 µm
0.25 µm
0.25 µm
Temperature characteristic
*4
*4
This is the value obtained at the measuring center distance when the Sensor and workpiece are fixed by an aluminum jig.
0.04% FS/°C
0.04% FS/°C
0.02% FS/°C
0.04% FS/°C
Sampling cycle
110 µs (High-speed Mode), 500 µs (Standard Mode), 2.2 ms (High-precision Mode), 4.4 ms (High-sensitivity Mode)
LED
Indicators
NEAR indica
Lights near the measuring center distance, and closer than the measuring center distance inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
FAR indicator
Lights near the measuring center distance, and farther than the measuring center distance inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
Operating ambient
illumination
Illumination on received light surface: 3000 lx or less (incandescent light)
Ambient temperature
Operating: 0 to 50°C, Storage: -15 to 60°C (with no icing or condensation)
Ambient humidity
Operating and storage: 35% to 85% (with no condensation)
Degree of protection
Cable length 0.5 m: IP66, cable length 2 m: IP67
IP40
Materials
Case: Aluminum die-cast, Front cover: Glass
Cable length
0.5 m, 2 m
Weight
Approx. 350 g
Approx. 400 g
Accessories
Laser labels (1 each for JIS/EN, 3 for FDA), ferrite cores (2),
insure locks (2), instruction sheet
Laser safety labels (1 each for JIS/EN),
ferrite cores (2), insure locks (2)
Displacement / measurement sensors
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