2
Liquid Leakage Sensor Amplifier
K7L-AT50/-AT50D
Features
Sensing Bands boast high degree of chemical resistance. The K7L can be used in a wide range of
applications, from semiconductor production installations to food-processing equipment.
Inter-electrode Resistance Detection
Stable detection of liquids with
impedances of up to 50 M
Ω
and common water. Four sens-
ing ranges are available, ensur-
ing detection suited to the
application.
AC Detection Method
The K7L internally oscillates AC sig-
nals provided to the Sensing Band,
protecting the Sensing Band from
electric corrosion and ensuring safe
operation.
Noise Canceller Function (Patent
Pending)
The K7L incorporates a noise cancel-
ler circuit that uses a 3-conductor
cable, ensuring a high level of noise
immunity.
Multiple Installation
The power supply circuit and
the detection circuit are iso-
lated, allowing several Amplifi-
ers to be installed in the same
place.
Sensing Band with Excellent Chemical
Resistance
SUS316 and polyethylene
are used for the Sensing
Band’s core and sheath to
ensure high resistance to
both acidic and alkaline liq-
uids.
■
Application Examples
Liquid Leakage Detection for
Measuring Baths in CMP Devices
Liquid leaked to drain pans can be detected to prevent damage to
devices and cleaning irregularities for wafers.
Detection of Condensation and Liquid
Leakage at Semiconductor Production
Installations
Detection is also possible for condensation inside cleaning devices
and liquid leaked to the surroundings.
Detection of Liquid Leakage at Pipe
Joints for Liquid Chemical Tanks
Liquid leakage at a pipe joint can be detected by wrapping the Sens-
ing Band around the joint.
Detection of Cleaning Fluid Level for
Plating Devices
The level of pure water is detected inside plating baths. High sensi-
tivity allows high-accuracy control to prevent cleaning irregularities.
Note:
Be sure to ground the baths if two or more K7L Sensors are
used in the same tank in an explosion-prevention area.
Fresh water, pure
water, distilled water,
plating liquids,
chemical liquids, IPA
(isopropyl alcohol)
Oscillator
Detector
Current
K7L-AT50
Connecting cable