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27
.30
.35
.40
.5982
.284
.3482
.69
.2635
.3883
.5096
.3237
.3287
.3278
.2031
.0608
.2691
.32
.2792
.2541
.1961
.4616
.48
1.44
Actual Gas
K Factor
Relative to N
2
Cp
[Cal/g]
Density
[g/I]
Phosphorous Trichloride PCl
3
Propane C
3
H
8
Propylene C
3
H
6
Silane SiH
4
Silicon Tetrachloride SiCl
4
Silicon Tetrafluoride SiF
4
Sulfur Dioxide SO
2
Sulfur Hexafluoride SF
6
Sulfuryl Fluoride SO
2
F
2
Tetrafluoroethane (Forane 134A) CF
3
CH
2
F
Tetrafluorohydrazine N
2
F
4
Trichlorofluoromethane (Freon-11) CCl
3
F
Trichlorosilane SiHCl
3
1,1,2-Trichloro-1,2,2 Trifluoroethane
(Freon-113) CCl
2
FCClF
2
Triisobutyl Aluminum (C
4
H
9
)AL
Titanium Tetrachloride TiCl
4
Trichloro Ethylene C
2
HCl
3
Trimethylamine (CH
3
)
3
N
Tungsten Hexafluoride WF
6
Uranium Hexafluoride UF
6
Vinyl Bromide CH
2
CHBr
Vinyl Chloride CH
2
CHCl
Xenon Xe
6.127
1.967
1.877
1.433
7.580
4.643
2.858
6.516
4.562
4.224
4.64
6.129
6.043
8.36
8.848
8.465
5.95
2.639
13.28
15.70
4.772
2.788
5.858
.1250
.399
.366
.3189
.1270
.1691
.1488
.1592
.1543
.127
.182
.1357
.1380
.161
.508
.120
.163
.3710
.0810
.0888
.1241
.12054
.0378
Содержание FMA 1400
Страница 37: ...NOTES 32...
Страница 38: ...NOTES 33...