H301-PI-736-160x110
User Manual
REV 03
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ge
16
11.
Connection of the Chamber with Z piezo
Follow the steps shown in the images of Figure 23 and listed below in order to correctly connect the chamber with Z
piezo stage.
1.
Place the frame on the stage and tighten 2 flat Phillips head screws M3x6 (See Image 1 of Figure 23). Screws hous-
ings are indicated with letter A in Image 1 of Figure 23.
2.
Place the chamber on the stage and tighten 2 captive screws (See Image 2 of Figure 23). Captive screws housings
are indicated with letter B in Image 2 of Figure 23.
3.
Use a 1.5mm metric Allen Wrench to tighten one of the two captive screws (B in Image 3) while keeping the
chamber sliding lid closed (See Figure 23 Image 3)
4.
Tighten the other captive screw (B in Image 4) while keeping the chamber sliding lid open
1
Screws M3x6
3
4
2
Captive Screws
B
B
B
B
Frame
Figure 23. Connection of the Chamber with XY Stage