5.3
Cleaning
Contamination inside the
TURBOVAC
is indicated by a deterioration in perfor-
mance, i.e. an increasing decline in working pressure.
If there is only slight contamination, such as a coating on the
TURBOVAC
inte-
rior surfaces due to exposure to the atmosphere over an extended period of
time, for the CF version the flange heater can be used for cleaning.
The ultimate pressure must be monitored while baking out under vacuum.
When making the initial examination of the pump, mount blank flanges to eli-
minate any possibility of leaks and desorption in the vacuum chamber.
The pump will have to be disassembled if there is more extensive contamina-
tion. The Oerlikon Leybold Vacuum Customer Service Department will have
to be consulted here in all cases.
The rotor is precision balanced; any change whatsoever, such as loose-
ning or bending any rotor component, will make re-balancing necessary.
5.4
Removing the pump from the system
Switch off the pump and vent it as per the instructions in Sections 4.5 and
4.6.
Take the appropriate precautionary measures prior to opening the intake
or discharge connection if the pump has previously handled hazardous
gases.
If necessary, use gloves, a respirator and/or protective clothing and work
under an exhaust hood.
If the pump previously handled corrosive gases, then allow the purge gas to
flow for as long as possible before detaching the pump from the system.
Remove the
TURBOVAC
from the system.
TURBOVAC
pumps which are used in semiconductor processes, for example,
will be contaminated with process gases. These gases may be toxic and
hazardous to health. In addition, deposits with similarly dangerous properties
may have formed. Many of these gases and deposits form acids when they
come into contact with humid air. This will result in serious corrosion damage
to the pump.
To avoid health hazards and corrosion damage when the pumps are de-
tached from the system, lay a container of desiccant on the splinter guard
and then close the pump immediately at all flange connections. Store the
pump, with a desiccant, in a PE bag.
Maintenance
30
GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum
Caution
Warning
Hazardous gases
Close the pump
Desiccant
Deposits
