Description
8
GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum
TURBOVAC 50
TURBOVAC 50
High-vacuum port
Forevacuum port
Electrical connection
O-Ring sealed
O-Ring sealed
Metal sealed
40 KF
63 ISO-K
63 CF
Aluminium
Aluminium
Stainless steel
33
55
55
36
48
48
28
30
30
0.30
0.40
0.40
0.25
0.35
0.35
0.20
0.25
0.25
2 · 10
6
2 · 10
6
2 · 10
8
< 5 · 10
-8
< 5 · 10
-8
< 5 · 10
-8
1 · 10
-1
16 KF
TRIVAC D 2,5 E
2
10
2
45 / 15
55
80
High-vacuum port
DN
Pump housing
Pumping speed at 10
-3
mbar
N
2
I · s
-1
He
I · s
-1
H
2
I · s
-1
Max. gas throughput in permanent operation
with water cooling at 10
-2
mbar
N
2
mbar · I · s
-1
He
mbar · I · s
-1
H
2
mbar · I · s
-1
Max. idle compression N
2
Ultimate pressure with TRIVAC D 2,5 E
mbar
Max. forevacuum pressure for N
2
mbar
Forevacuum port
DN
Recommended forevacuum pump
Run-up time to 95% nominal speed
min
Cooling water connection (hose nozzle)
(for Part No. 854 08)
mm
Weight, approx.
kg
Max. power consumption / at ultimate pressure W
Max. ambient temperature at operation
°C
Max. bakeout temperature at CF flange
°C
