Oerlikon Leybold Vacuum IONIVAC IE 414 Скачать руководство пользователя

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Oerlikon
Leybold Vacuum GmbH

Bonner Strasse 498
D-50968 Cologne
Phone:

+49-(0)221-347 0

Fax:

+49-(0)221-347 1250

w w w . o e r l i k o n . c o m /
l e y b o l d v a c u u m

Содержание IONIVAC IE 414

Страница 1: ...Part Numbers 158 66 158 67 158 44 IONIVAC Sensors IE 414 IE 514 and Temperature Resistant Gauge Head Cable Operating Instructions 300265097_002_A1...

Страница 2: ...5 1 4 Technical Data 6 2 Installation 8 2 1 Conforming Utilization 8 2 2 Unpacking and Checking 8 2 3 Installation 9 2 4 Connecting the Temperature Resistant Gauge Head Cable 10 3 Operation 14 4 Main...

Страница 3: ...uctions It must be operated and maintai ned by trained personnel only Consult local state and national agencies regarding specific requirements and regu lations Address any further safety operation an...

Страница 4: ...erature resistant gauge head cable must not be exposed to a temperature exceeding 200 C max 250 C at the flange of the sensor 1 1 Supplied Equipment UHV ionisation measurement systems Part numbers 158...

Страница 5: ...ange fixed DN 40 CF 835 37 Weld on flange rotatable DN 40 CF 835 58 Bolts nuts set of 25 pieces and accessories for CF flanges 839 01 Replacement Cathodes Replacement cathode for IE 413 IE 414 158 63...

Страница 6: ...t temperature during operation 20 80 C Max flange temp with gauge head cable 158 44 250 C Max bake out temperature without plug 400 C Storage temperature 20 50 C Relative humidity Annual average 65 no...

Страница 7: ...205 V Emission current range 0 06 0 6 mA 1 6 mA Cathode heater current 1 5 A typ Cathode heater voltage 3 V typ 3 7 V typ Sensitivity for nitrogen 17 mbar typ 6 25 mbar typ Max power when baking out...

Страница 8: ...sor immediately after delivery even if it is to be put into operation at a later date Before doing so examine the shipping container for any extenal damage Then remove all the packaging materials The...

Страница 9: ...cathode When installing several gauge heads at one common com ponent T piece or cross for example an optical separation is required The gauge heads may not directly see each other Interactions may ca...

Страница 10: ...e head flange 2 1 and plug guide 2 4 For this reason three spacers have been fitted between gauge head flange 2 1 and the plug guide 2 4 Positioning of the plug guide is defined through the different...

Страница 11: ...gauge head 1 Gauge head 2 Spacer for M 4 screw 3 Spacer for M 5 screw 4 Plug guide 5 Cylinder head screw M 4 6 Cylinder head screw M 5 7 Ion collector cable coax 8 Countersunk screws M 3 x 15 9 Lid 1...

Страница 12: ...resistant gauge head cable to the gauge head as depicted in fig 3 The individual wires of the gauge head cable are colour coded n Bolt the housing 2 13 onto the gauge head flange 2 1 again with the bo...

Страница 13: ...auge head proceed in the reverse order The plug must be unlocked in the gauge head housing and for this reason unscrew the cover 2 9 first Especially note the pin assignment Provide the connec tion wi...

Страница 14: ...sence of halogen gases like fluorine chlorine bromine and iodine and their compounds the yttrium oxide coating will suffer rapid wear As a result of this the cathodes will burn out Operation 14 300265...

Страница 15: ...eration 15 300265097_002_A1 05 2014 Oerlikon Leybold Vacuum Humidity at the insulators 2 14 caused by condensing water for example can give rise to incorrect measure ments due to leakage currents NOTI...

Страница 16: ...gauge head n Remove the gauge head from the vacuum system n After loosening the hex screws at both terminals remove the faulty cathode n Open the transport packaging remove the replacement cathode in...

Страница 17: ...use the form we have prepared for this purpose A copy of the form has been reproduced at the end of these Operating Instructions Declaration of Contamination for Compressors Vacuum Pumps and Component...

Страница 18: ...18 300265097_002_A1 05 2014 Oerlikon Leybold Vacuum...

Страница 19: ...e of oil ForeVacuum Pumps Application Process B Condition of the equipment No1 Yes No Contamination No1 Yes 1 1 Has the equipment been used toxic 2 Drained Product service fluid corrosive 3 All openin...

Страница 20: ...Oerlikon Leybold Vacuum GmbH Bonner Strasse 498 D 50968 Cologne Phone 49 0 221 347 0 Fax 49 0 221 347 1250 info vacuum oerlikon com w w w o e r l i k o n c o m l e y b o l d v a c u u m...