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6

 

Chapter 1 Introduction 

 

 

1

 

Introduction 

The Back-Display LEED-AUGER spectrometer is an instrument to measure the structure of 
the first few atomic layers of crystalline surfaces based on the low energy electron diffraction 
(LEED) effect. The spectrometer is also capable of measuring the elemental composition of a 
surface via the analysis of Auger electrons. The basic instrument layout is a combination of a 
hemispherical retarding-field analyzer, miniature electron gun, and a glass display. 

The LEED technique  has  become an  important experimental tool  in the study of crystal 

surface  phenomena  such  as  atomic  structure of  clean  surfaces  and  chemisorbed  layers,  epi-
taxy, thermal etching, oxidation, phase transition, faceting, and many others. The AES tech-
nique  is  a  major  tool  in  materials  research  providing  elemental  surface  analysis  of  surfaces 
prepared by sputtering, annealing, deposition, etching, and others. 

The Back-Display LEED-AUGER spectrometer is a compact instrument supplied in three 

sizes. Model 

BDL800IR

 is adapted to fit an 8” CF flange, while model 

BDL600IR

 fits a 6” 

CF flange and model 

BDL450

 fits a 4.5” CF flange. The spectrometer optics comprises a set 

of grids, a transparent screen coated with a P31 phosphor and conducting coating, and a min-
iature coaxially mounted electron gun. Units can optionally be equipped with a linear motion. 

Digital LEED-AES power supply/controller, model 

LPS300-D

, is designed to control all 

models of INTEGRALEED optics in the LEED mode with a beam energy range of 5–750 eV 
and  in  the AES  mode  with  a  beam  energy  range  of  5–3000 eV.  The  controller  is  using  on-
board  microprocessor to  execute  programs  and  optical  rotary  encoders  for  settings.  Models 

LPS300-D

  and 

LOA10-AES

  constitute  a  complete  analytical  package  for  both  LEED  and 

AES. Model 

LPS075-D

 operates in LEED mode only. 

The High Voltage Generator supplies  a  sweep  voltage modulated with a  sine wave. The 

unit  comprises  a  precision  oscillator,  which  delivers  V

pp

  up  to  20 V. The  generator  is  con-

trolled by the AES software installed on a PC via USB. 

The Low-noise Input Coupler provides 160–180 V biasing of the screen collector, band-

pass filtering, and signal pre-amplification. 

Содержание BDL800IR

Страница 1: ......

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Страница 3: ...res as platform independent bitmaps bmp files which can be viewed using other Win dows applications Supported platforms are Windows XP and Windows 7 MultLEED can perform analyses on LEED images such a...

Страница 4: ...g 11 3 3 Connecting 12 3 3 1 LEED Mode 12 3 3 2 AES Mode 12 4 Electronics 15 4 1 LPS300 D and LPS075 D 15 4 1 1 Front Panel 15 4 1 2 Rear Panel 16 4 1 3 Electron Gun Pins Assignment 17 4 2 LOA10 AES 1...

Страница 5: ...ation 25 5 8 2 Monitoring Beam Current 26 5 8 3 Filament Forming 27 5 8 4 Filament Activation 27 5 8 5 Outgassing 27 6 Programming Menu 29 6 1 Menu Items 29 6 2 Menu Map 30 7 Diagrams and Schematics 3...

Страница 6: ...hree sizes Model BDL800IR is adapted to fit an 8 CF flange while model BDL600IR fits a 6 CF flange and model BDL450 fits a 4 5 CF flange The spectrometer optics comprises a set of grids a transparent...

Страница 7: ...6 BDL450 4 5 Linear Motion optional Retraction of up to 150 mm 100 mm standard from a sam ple Integral Shutter optional Manual shutter driven by a rotary feedthrough Glass display Fused silica coated...

Страница 8: ...ngth 2 3 Power Supply Models LPS075 D and LPS300 D Beam Voltage LPS075 D negative 0 750 V LPS300 D negative 0 3000 V Filament Current 0 3 2 A Wehnelt Voltage 0 37 V with respect to the filament Focus...

Страница 9: ...gnostics Manual Control Of all voltages via rotary dials and selection switches PC Control PC software for full control of all functions via USB Protection Over voltage over current and short circuit...

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Страница 11: ...closed in a protective and clean alumini um container under argon atmosphere Carefully remove the cover and check the optics for obvious loose connections electrical shorts or damage Install the optic...

Страница 12: ...n pages 15 and 16 for details Install a power supply into a rack and make room below and above to allow for air circulation through the case Install a lock in amplifier LOA10 AES into a rack and conne...

Страница 13: ...Chapter 3 Installation 13 Connect the LOA10 AES s GRID 2 3 port to the GRID 2 3 of the optics using a MHV BNC terminated cable Plug in a power cord The instrument is now ready for operation...

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Страница 15: ...rogram The main board consists of analogue controls power supplies and high voltage modules The high voltage section is optically isolated from the digital electronics Beam current is obtained indirec...

Страница 16: ...amp Filament On Off Turn filament current on and set it to a pre set value or turn it off Screen On Off Turn screen voltage on and set it to a pre set value or turn it off Constant Beam Current On Off...

Страница 17: ...ing M Ground Cable shielding J Grid 2 3 4 2 LOA10 AES Model LOA10 AES is a dedicated controller allowing the INTEGRALEED optics perform ing Auger Electron Spectroscopy using Retarding Field Analyzer T...

Страница 18: ...age 0 2000 V Sweep Rate AES software controlled 16 bit DAC Sweep Voltage Offset start AES software controlled 16 bit DAC Sweep Voltage Offset end AES software controlled 16 bit DAC Ramp Voltage Moni t...

Страница 19: ...Chip TI DAC715 Resolution 16 bits Settling Time 3 s Channels 1 Computer Interface USB Software AES data acquisition and analysis software for Windows XP 7 Dimensions 2U 19 rack mount 3 5 89 mm depth o...

Страница 20: ......

Страница 21: ...on provided below The spectrometer operating pressure is 1 10 9 Torr for LEED and 5 10 6 Torr for AES Filament outgassing should be carried out while the vacuum chamber is still warm after a bakeout T...

Страница 22: ...on The energy will slowly rise until it reaches its pre set value To pre set a value see Section 5 2 2 9 To change any of the values ad hoc select the parameter you wish to change by press ing the cor...

Страница 23: ...ds Then turn the power supply back on 5 4 Changing Operation Mode Note The energy range of the electron beam is increased to 3 kV in the AES mode After switching to AES first operate the optics at low...

Страница 24: ...urning right until you find the maximum of the first inelastic peak 5 7 LEED Mode A diffraction pattern is created as a result of a primary electron beam reflecting off of a flat surface at normal inc...

Страница 25: ...e by installing a set of Helm holtz coils around the optics providing a uniform magnetic field of opposite direction In some situations even a small permanent magnet placed uniformly around the spectr...

Страница 26: ...Voltage Grid2 3 Voltage Screen Voltage and Beam Current constant locking first press the ap propriate button and then use the Setting knob to adjust the value To save changes switch to the Programmin...

Страница 27: ...steadily and slowly increased from 1 2 A to the maximum pre set value at a rate of 0 01 A per minute It is possible to have the unit turn off after filament forming To use this feature change the Cont...

Страница 28: ...assing timer by changing the Controller Mode to Pro gramming and selecting Program Selection Outgassing Timer In the Operating mode select the Outgassing program and press Timer to start the pro cedur...

Страница 29: ...y Constant Gap Sets grid voltage to maintain a constant dis tance voltage gap from beam energy Beam Energy Scan Mode Continuous Sets beam energy to be continuously scanned Step Sets beam energy to be...

Страница 30: ...program selected upon pow ering up the unit Stand by or Last Opened Cable Self Test Sets whether to run a connection self test on start up time Filament Forming Mode Default Set Sets the filament cur...

Страница 31: ...Chapter 6 Programming Menu 31...

Страница 32: ...32 Chapter 6 Programming Menu...

Страница 33: ...Chapter 7 Diagrams and Schematics 33 7 Diagrams and Schematics...

Страница 34: ...34 Chapter 7 Diagrams and Schematics...

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Страница 36: ...36 Chapter 7 Diagrams and Schematics...

Страница 37: ...Chapter 7 Diagrams and Schematics 37...

Страница 38: ...38 Chapter 7 Diagrams and Schematics...

Страница 39: ...Chapter 7 Diagrams and Schematics 39...

Страница 40: ...40 Chapter 7 Diagrams and Schematics...

Страница 41: ...Chapter 7 Diagrams and Schematics 41...

Страница 42: ...42 Chapter 7 Diagrams and Schematics...

Страница 43: ...Chapter 7 Diagrams and Schematics 43...

Страница 44: ...44 Chapter 7 Diagrams and Schematics...

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Страница 46: ...BDL800IR LMX ISH BACK VIEW...

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Страница 55: ...small pliers flat screwdriver 2 4 mm Allen key 5 32 or 4 mm Before proceeding make sure the optics is standing upright The following steps will help you disassemble the optics remove the grids and put...

Страница 56: ...e environment a positive pressure blower with HEPA filter a laminar flow clean bench or a clean room a pair of pliers or a vise grip tweezers or small pliers flat screwdriver 2 4 mm Allen key 5 32 or...

Страница 57: ...ecessary gently bend it at the respective end to make it parallel Proceed to replacing the filament 10 Disconnect the Wehnelt electrode which houses the filament fixture and replace it with a new one...

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Страница 59: ...l us at in fo ocivm com 9 1 Bright or Dark Spots Both of these phenomena are due to particulate grids contamination Whether it s bright or dark depends on which grid the contaminant is attached to In...

Страница 60: ...60 Chapter 9 Troubleshooting...

Страница 61: ...Chapter 9 Troubleshooting 61...

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