Newport ZVR Series, Руководство пользователя

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iii
EDH0316En1031 — 11/18
ZVR Series Integrated Vertical and Rotation Stages for Wafer Positioning
Table of Contents
Warranty .................................................................................................................ii
EC Declaration of Conformity ...............................................................................v
Definitions and Symbols.......................................................................................vi
Warnings ...............................................................................................................vii
Caution .................................................................................................................viii
1.0 — Introduction
.................................................................................1
2.0 — Description
...................................................................................2
2.1 Design Details ............................................................................................2
3.0 — Characteristics
............................................................................3
3.1 Definitions ..................................................................................................3
3.2 Mechanical Specifications .......................................................................4
3.3 Load Specification Definitions.................................................................4
3.4 Load Characteristics and Stiffness .........................................................5
3.5 Stage Weights ............................................................................................5
4.0 — Drives and Motors
....................................................................5
4.1 Stepper Drive Axes ...................................................................................5
4.2 DC-Servo Drive Axis ..................................................................................6
4.3 Sensor Position..........................................................................................6
4.4 Feedback Signal Position .........................................................................7
4.5 Pinouts........................................................................................................7
4.6 MCAB-3 Cable ............................................................................................8
5.0 — Connection to Newport Controllers
................................9
5.1 Warnings on Controllers ..........................................................................9
5.2 Connection ...............................................................................................10
5.3 Cables .......................................................................................................10
5.4 MSCABLE-3 Cable ....................................................................................10
6.0 — Connection to Non-Newport Electronics
....................11
6.1 Connections .............................................................................................11
7.0 — Disabling Limit Switches of the Rotation Axis
.........12