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EDH0316En1031 — 11/18

ZVR Series Integrated Vertical and Rotation Stages for Wafer Positioning

8.0 —

Dimensions

8.1

ZVR-PP Stage

2.36

(60)

ø1.97

(50)

6.30

(160)

3 ADJUSTMENT
SCREWS M4 TO
ADJUST TOP PLATE

6 HOLES M6 THD
AT 60° ON ø2.36 (60)

3 STRAIGHT UNIONS
FOR VACCUM TUBE ø.15 (4)

ø7.32
(186)

10.59

(269)

11.13

(282.8)

6.26

(159)

5.91

(150)

7.32

(186)

6.30

(160)

2 SUB-D15M CONNECTORS

.33 (8.4)

ADJUSTMENT

2.59 (65.5): +EOR

2.37 (60.2): MZ

2.16 (54.9): -EOR

MODEL SHOWN: ZVR-PP

DIMENSIONS IN INCHES (AND MILLIMETERS)

Содержание ZVR Series

Страница 1: ...Integrated Vertical and Rotation Stages for Wafer Positioning ZVR Series USER S MANUAL G U ARANTE E D S P E CIFICATIO N S...

Страница 2: ...lieu of all other warranties expressed or implied including any implied warranty of merchantability or fitness for a particular use Newport Corporation shall not be liable for any indirect special or...

Страница 3: ...al Specifications 4 3 3 Load Specification Definitions 4 3 4 Load Characteristics and Stiffness 5 3 5 Stage Weights 5 4 0 Drives and Motors 5 4 1 Stepper Drive Axes 5 4 2 DC Servo Drive Axis 6 4 3 Sen...

Страница 4: ...iv ZVR Series Integrated Vertical and Rotation Stages for Wafer Positioning 8 0 Dimensions 13 8 1 ZVR PP Stage 13 8 2 ZVR PC Stage 14 9 0 Maintenance 15 9 1 Maintenance 15 9 2 Repair 15 9 3 Calibratio...

Страница 5: ...h all the relevant provisions of the Directive 2006 42 EC on machinery complies with all the relevant provisions of the Directive 2014 30 EU relating to electro magnetic compatibility complies with al...

Страница 6: ...personal safety safety and preservation of the equipment or important tips WARNING Warning indicates a potentially dangerous situation which can result in bodily harm or death CAUTION Caution indicate...

Страница 7: ...Nevertheless if any liquid has entered the stage switch off the motor power and then disconnect the electronics from power supply Contact your Newport service facility and request repairs WARNING Do...

Страница 8: ...rage temperature 10 to 40 C in its original packaging CAUTION Do not move this stage if its motor power is on Make sure that the cable to the electronics is disconnected before moving the stage Failur...

Страница 9: ...ges for Wafer Positioning ZVR Series 1 0 Introduction This manual provides operating instructions for the ZVR series stages ZVR stage RECOMMENDATION We recommend you read carefully the chapter Connect...

Страница 10: ...ure with the integrated rotary stage is 50 mm in diameter Guiding the stage through its vertical trajectory are three miniature ultra quiet recirculating bearing guides Like the drive screws that actu...

Страница 11: ...s as follows Absolute Accuracy Accuracy Correction Factor x Travel Repeatability Ability of a system to achieve a commanded position over many attempts Reversal Value Hysteresis Difference between act...

Страница 12: ...0 0005 0 0015 Bidirectional Repeatability 3 Typical Guaranteed 0 003 0 006 0 0013 0 003 Max Speed s 40 80 Wobble 3 Typical Guaranteed rad 22 40 Eccentricity 3 Typical Guaranteed m 2 2 4 Z Vertical Sta...

Страница 13: ...Characteristics Command Signals for the Stepper Motor Weight lb kg ZVR 9 3 4 2 3 meter MSCABLE 3 Cable 0 66 0 3 Cz Normal center load capacity on bearings 100 N Mz Nominal torque 1 Nm Jz Max load ine...

Страница 14: ...ltage 4 3 Sensor Position End of Run and Mechanical Zero are 5 V open collector type The Index Pulse provides a repeatable Home Position at 1 step CAUTION End of Run and Mechanical Zero are active sig...

Страница 15: ...oder Phase A 1 2 3 4 0 1 Encoder Phase B 0 1 Encoder Phase B Direction MOTION Direction SUD D25 OR SUB D15 Encoder Phase A 19 13 Encoder Phase A 23 6 Encoder Phase B 20 14 Encoder Phase B 24 7 Index P...

Страница 16: ...6 MM2 WHITE 4 0 6 MM2 WHITE 6 0 6 MM2 WHITE 7 0 6 MM2 WHITE 8 0 6 MM2 WHITE 9 0 6 MM2 WHITE 5 0 6 MM2 WHITE 10 0 6 MM2 WHITE 11 0 6 MM2 WHITE 12 0 09 MM2 WHITE 0 09 MM2 BROWN 0 09 MM2 GREEN 0 09 MM2 Y...

Страница 17: ...henever you clean the electronics unit CAUTION To protect the unit from damage be sure to Keep all air vents free of dirt and dust Keep all liquids away from the unit Do not expose the unit to excessi...

Страница 18: ...GE BENDING STATIC CABLE 94 24 CABLE IN MOTION 2 76 70 LOCKING KNOBS 2 24 57 DISCONNECTED 24 6 SUB D15 CONNECTOR SHOWN DIMENSIONS IN INCHES AND MILLIMETERS WARNING This cable is shielded correctly For...

Страница 19: ...when used with non Newport controllers WARNING Newport guarantees compliance of ZVR stages only if used with Newport cables and controllers It is the customer s responsibility to modify the cable and...

Страница 20: ...rotation WARNING The movement of objects of all types carries potential risks for operators Ensure the protection of operators by prohibiting access to the dangerous area and by informing the personn...

Страница 21: ...1 97 50 6 30 160 3 ADJUSTMENT SCREWS M4 TO ADJUST TOP PLATE 6 HOLES M6 THD AT 60 ON 2 36 60 3 STRAIGHT UNIONS FOR VACCUM TUBE 15 4 7 32 186 10 59 269 11 13 282 8 6 26 159 5 91 150 7 32 186 6 30 160 2...

Страница 22: ...0 6 30 160 3 ADJUSTMENT SCREWS M4 TO ADJUST TOP PLATE 6 HOLES M6 THD AT 60 ON 2 36 60 3 STRAIGHT UNIONS FOR VACCUM TUBE 15 4 7 32 186 10 59 269 11 22 285 6 26 159 5 91 150 7 32 186 6 30 160 2 SUB D15M...

Страница 23: ...return the stage to Newport for re lubrication after 2000 hours of use If the ZVR stage is mounted on a workstation and cannot be easily removed please contact Newport s After Sales Service for furthe...

Страница 24: ...EDH0316En1031 11 18 16 ZVR Series Integrated Vertical and Rotation Stages for Wafer Positioning...

Страница 25: ...Fax Name Company Address Country P O Number Item s Being Returned Model Description Reasons of return of goods please list any specific problems Return authorization Please obtain prior to return of i...

Страница 26: ...sales newport com Technical Support Tel 800 222 6440 e mail tech newport com Service RMAs Returns Tel 800 222 6440 e mail service newport com Europe MICRO CONTROLE Spectra Physics S A S 9 rue du Bois...

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