background image

 

 

15 

12   Specifications 

 

Target gas 

Semiconductor manufacturing gases 

Detection principle 

Electrochemical sensor 
Electroch pyrolyzer sensor 

Gas sampling method 

Extractive type (pump) 

Detection range 

As per delivery specifications 

Gas concentration 
display 

Four-digit on LCD 

Indication accuracy 

*1

 

±10%F.S. except for XDS-7NF 
-30%F.S. to +10%F.S. for XDS-7NF 

Response time 

*1

 

T60: Less than 60 seconds 

Power supply 

Alkaline AA battery x 4pcs or 
Dedicated 100-240VAC/6VDC adapter 

*3

 

Continuous operating 
time

*2

 

More than 12 hours except for XDS-7NF 
More than 8 hours for XDS-7NF 
(by alkaline AA batteries (Toshiba LR6AN) at 
20

°

C, with no gas alarm) 

Operating temperature 
and humidity 

0 to +40ºC, 30 to 85%RH 
No condensation. No rapid change in 
temperature/humidity 

Dimensions 

Approx. W62 × H150 × D128 mm (excluding 
protrusions) 

Mass 

Approx. 1.3 kg 

Compliance 

CE (EMC: 2014/30/EU) 

*3 *4

 

*1. Under identical conditions. 

*2. The operating time (battery life) may vary depending on environment 

and conditions of use, storage period, battery manufacturer etc. 

*3. AC power adapter, data logger software, communication adapter, and 

serial cross cable (page 13) do not comply with CE marking. 

*4. There are two types of EC-7 sensor stocker, global and domestic (for 

use in Japan). Global type is CE-marked.

 

 

14 

11 Warranty 

 

The warranty period is one (1) year from the date of purchase. 

You are entitled to the limited warranty, if the product malfunctions due to a 

manufacturing defect during normal use in accordance with the instruction 

manual, specifications and labels. 

 

Warranty Scope 

If the product fails or is found to be damaged due to a manufacturing defect 

during the warranty period, and used in accordance with the instruction manual 

and specifications, we will provide a free replacement and repair service. This 

warranty covers the New Cosmos product/parts only and not third-party 

product/parts. 

 

Warranty Exclusions 

The following will be repaired at the cost of customer even during the warranty 

period. 

 

(1) Failures and damages incurred by incorrect use, deliberate acts or 

negligence of the user. 

(2)  Failures and damages caused by disaster, earthquake, storm and flood, 

lightning, extreme climate, abnormal power supply voltage, excessive 

electromagnetic interferences, or other acts of God. 

(3) Failures and damages resulting from repair and/or modification by 

non-New Cosmos certified technicians. 

(4) Consumables and failures and damages resulting from improper 

consumable replacement. 

(5)  Other failures and damages not attributable to the manufacturer. 

 

 

15 

12   Specifications 

 

Target gas 

Semiconductor manufacturing gases 

Detection principle 

Electrochemical sensor 
Electroch pyrolyzer sensor 

Gas sampling method 

Extractive type (pump) 

Detection range 

As per delivery specifications 

Gas concentration 
display 

Four-digit on LCD 

Indication accuracy 

*1

 

±10%F.S. except for XDS-7NF 
-30%F.S. to +10%F.S. for XDS-7NF 

Response time 

*1

 

T60: Less than 60 seconds 

Power supply 

Alkaline AA battery x 4pcs or 
Dedicated 100-240VAC/6VDC adapter 

*3

 

Continuous operating 
time

*2

 

More than 12 hours except for XDS-7NF 
More than 8 hours for XDS-7NF 
(by alkaline AA batteries (Toshiba LR6AN) at 
20

°

C, with no gas alarm) 

Operating temperature 
and humidity 

0 to +40ºC, 30 to 85%RH 
No condensation. No rapid change in 
temperature/humidity 

Dimensions 

Approx. W62 × H150 × D128 mm (excluding 
protrusions) 

Mass 

Approx. 1.3 kg 

Compliance 

CE (EMC: 2014/30/EU) 

*3 *4

 

*1. Under identical conditions. 

*2. The operating time (battery life) may vary depending on environment 

and conditions of use, storage period, battery manufacturer etc. 

*3. AC power adapter, data logger software, communication adapter, and 

serial cross cable (page 13) do not comply with CE marking. 

*4. There are two types of EC-7 sensor stocker, global and domestic (for 

use in Japan). Global type is CE-marked.

 

 

14 

11 Warranty 

 

The warranty period is one (1) year from the date of purchase. 

You are entitled to the limited warranty, if the product malfunctions due to a 

manufacturing defect during normal use in accordance with the instruction 

manual, specifications and labels. 

 

Warranty Scope 

If the product fails or is found to be damaged due to a manufacturing defect 

during the warranty period, and used in accordance with the instruction manual 

and specifications, we will provide a free replacement and repair service. This 

warranty covers the New Cosmos product/parts only and not third-party 

product/parts. 

 

Warranty Exclusions 

The following will be repaired at the cost of customer even during the warranty 

period. 

 

(1) Failures and damages incurred by incorrect use, deliberate acts or 

negligence of the user. 

(2)  Failures and damages caused by disaster, earthquake, storm and flood, 

lightning, extreme climate, abnormal power supply voltage, excessive 

electromagnetic interferences, or other acts of God. 

(3) Failures and damages resulting from repair and/or modification by 

non-New Cosmos certified technicians. 

(4) Consumables and failures and damages resulting from improper 

consumable replacement. 

(5)  Other failures and damages not attributable to the manufacturer. 

Содержание XPS-7II

Страница 1: ...Semiconductor Gas Detector XPS 7II Instruction Manual Keep this manual for easy reference Carefully read this manual prior to use Instruction Manual No XPS 7IIET 01 ...

Страница 2: ...ance 12 9 Troubleshooting 13 10 Consumable and Optional parts 13 11 Warranty 14 12 Specifications 15 Table of Contents 1 Introduction 1 Safety Precautions 2 2 Package Contents 3 3 Sensor Unit Variations 3 4 Unit Components 4 5 Operation 7 5 1 Battey Installation 7 5 2 Sensor Unit Installation 7 5 3 Power on 9 5 4 Detection 9 5 5 Power off 9 6 Data Logging 10 7 Filter Element Replacement 11 8 Maint...

Страница 3: ...njury or property damage Provides advice information on product handling NOTE DANGER WARNING CAUTION 1 1 Introduction Thank you for purchasing the New Cosmos XPS 7II extractive type portable semiconductor gas detector To ensure safe and reliable operation please read this instruction manual prior to use This product is intended for use in a semiconductor manufacturing plant for the early detection...

Страница 4: ... CAUTION This product is not explosion proof and should not be installed in a hazardous area WARNING 2 Safety Precautions Follow the precautions below to ensure safe operation Follow the precautions below for storage of the product Do not leave the product in high temperature and humidity conditions for a long period of time Doing so may compromise its performance WARNING This product is not drip ...

Страница 5: ...t filter element 2 Alkaline AA battery 4 Instruction manual this document 1 Inspection certificate 1 3 2 Package Contents A standard package consists of following items If any items are missing or damaged please contact New Cosmos or its authorized representative for replacement 3 Sensor Unit Variations Model Target gas F S Alarm set value 1st stage 2nd stage XDS 7NH NH3 Ammonia 100ppm 12ppm 25ppm...

Страница 6: ...n the battery is close to empty Lights up when the cover is open while the detector is off Main unit 4 4 Unit Components Item Component name Description Function 1 Green POWER LED Lit while in normal operation mode gas monitoring mode and flashes while in warm up cycle 2 Amber TROUBLE LED Flashing indicates an internal failure is present 3 Red ALARM LED When the gas concentration level exceeds the...

Страница 7: ... flashing Logging icon Lit when data logging is in progress Operation buttons behind the front cover 5 Item Component name Description Function 1 POWER button Press and hold to turn on off the detector 2 AL button to check the alarm set values Each press cycles through 1st stage alarm set value 2nd stage alarm set value and current gas concentration value on the LCD 3 BZ STOP button Press to mute ...

Страница 8: ...ube adapter connects to the gas inlet port of the detector Pull the tube adaptor Insert Tube adaptor 6 Gas sampling tube Installation Push and insert the tube adapter of the gas sampling tube into the detector s gas inlet port The tube adapter is automatically locked and sealed to the port when inserted Ensure that it is securely connected by pulling it slightly Removal Press and hold the release ...

Страница 9: ...mpty battery like a above while the unit is off CAUTION Battery compartment Battery cover Snap latch 7 5 Operation Perform a routine check page 12 before use Normal gas detection may not be possible without check which will then fail gas leak detection 5 1 Battery Installation 1 Lift and unlock the snap latch on the battery cover Pull the cover forward The cover is now removable 2 Install the four...

Страница 10: ...g CDS 7 COS 7 CHS 7 cannot be used CAUTION Sensor unit Sensor port Sensor cover Connector Snap latch 8 5 2 Sensor Unit Installation 1 Lift and unlock the snap latch on the sensor cover Pull the cover forward The cover is now open this cover cannot be detached from the unit 2 Install a sensor unit in the detector by engaging with the connector and sensor port on the detector 3 Reinstall the sensor ...

Страница 11: ...ERO button to perform a zero adjustment Ensure that the zero adjustment is done in clean air CAUTION 9 5 3 Power on 1 Press and hold the POWER button The unit gives off a long beep Then the green POWER LED starts flashing The warm up cycle 30 second self test followed by automatic zero adjustment starts 2 When the warm up cycle is completed the flashing POWER LED becomes steady indicating that the...

Страница 12: ... software s instruction manual separate document for the procedure to transfer log data to a pc NOTE 10 6 Data Logging The detector can log up to 22 hours of the measurement data The log data can also be transferred to a pc by using data logger kit sold separately see 10 Consumable and Optional Parts on page 13 1 During normal operation press the button LoG appears on the LCD The log starting time...

Страница 13: ...right bottom corner of the LCD They are just the ex factory parameters and not for customer use NOTE 11 7 Filter Element Replacement Replace the filter element with a new one if it is dirty or wet 1 Turn the retainer and short probe as a whole counterclockwise to remove them from the filter case 2 Remove the O ring from the filter case 3 Replace the filter element with a new one 4 Reinstall the O ...

Страница 14: ...scheduled annual inspections once a year at least Cleaning Clean the exterior with a soft damp cloth 12 8 Maintenance Routine Check pre use check Perform a routine check before each use Check the tube of the gas sampling tube for damage or wear If any replace with a new one Check the filter element in the filter case Replace it with a new one if dirty or discolored Annual Inspection Contact New Co...

Страница 15: ...ata to a pc Communication adapter CA 7 Serial cross cable KRS L09 2K Does not comply with CE marking 13 9 Troubleshooting Before contacting us for service repair perform basic troubleshooting using the table below If the detector locks up cannot be turned off remove all batteries After a few minutes put the batteries back in and turn on the detector Symptom Cause Action Reference Pressing POWER bu...

Страница 16: ...om improper consumable replacement 5 Other failures and damages not attributable to the manufacturer 14 11 Warranty The warranty period is one 1 year from the date of purchase You are entitled to the limited warranty if the product malfunctions due to a manufacturing defect during normal use in accordance with the instruction manual specifications and labels Warranty Scope If the product fails or ...

Страница 17: ...e are two types of EC 7 sensor stocker global and domestic for use in Japan Global type is CE marked 15 12 Specifications Target gas Semiconductor manufacturing gases Detection principle Electrochemical sensor Electrochemical pyrolyzer sensor Gas sampling method Extractive type pump Detection range As per delivery specifications Gas concentration display Four digit on LCD Indication accuracy 1 10 ...

Страница 18: ...r its authorized representative for ordering The contents of this manual are subject to change without notice Authorized representative Manufacturer NEW COSMOS ELECTRIC CO LTD 2 5 4 Mitsuya naka Yodogawa ku Osaka 532 0036 Japan URL https www newcosmos global com XPS 7ⅡET 01 2008 050 ...

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