MTI Proforma 300EMI, Руководство пользователя

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MTI Instruments Technical Manual 7001-0005
Revision 1.0 November 5, 2013
13
3.1.4.2 Calibrate
Default STD: +500.000
µ
m
This adjustment corrects for certain environmental factors which may affect accuracy. It is
suggested that the unit be calibrated no less than once daily using a known NIST traceable
(or other known standard wafer). NIST traceable calibration standards are available from
MTI Instruments. As shown in figure x, the displacement for the top and bottom probes will
be added to the known thickness of the wafer to calculate and store a new probe gap value.
Details of performing a calibration are located in section 3.1.5.
3.1.4.3 Limits
Default Hi: +999.999
Default Lo: -999.999
High and Low limits can be set. If the wafer thickness is above the high limit, a warning will
be displayed. If the wafer thickness is below the low limit, a warning will be displayed.
While operating with the ZERO function set, it is possible to get negative thicknesses.
Therefore, the limits are signed values.
Note that if the diagnostic screen “RawVolts” is set “ON”, the warning will not be displayed.
3.1.4.4 Rounding
Default: On
By default, the Proforma™ series products will round the least significant digit to the left of
the decimal place to the nearest 0 or 5. Turning Rounding off displays the least significant
digit in its raw form.
3.1.4.5 Setup
3.1.4.5.1 Contrast
The Proforma™ Series product display has been factory set to a contrast value to satisfy
most applications. In some ambient lighting conditions, the contrast may need to be
adjusted for maximum viewability.
3.1.4.5.2 Ethernet
Default DHCP: Off
Default IP Address: 192.168.168.252
Default Subnet Mask: 255.255.255.000
Default Gateway: 000.000.000.000
Default Show Address: Off
The Proforma™ Series products support connection to the Ethernet. By default, this
address is statically assigned. The static address, subnet mask, and gateway can be set
thru the user interface. Alternatively, the unit can automatically fetch its network
parameters from a network that supports DHCP. The user can determine the IP address
by turning on the “Show Address” option.
Normally, the Proforma™ 300i will connect to an external laptop or PC through an
Ethernet network. It is possible to create a direct connection to a laptop or PC without
using a network, but the user will need to provide an Ethernet crossover (null) cable and
manually configure a static network connection on the PC.
3.1.4.5.3 Export
The Proforma™ series products store several files on internal, non-volatile memory.
These include the user manual, calibration tables, configuration files, and the boot log.
These files can be helpful in diagnosing problems on the system. The export location is
defined by the “Export to” setting. Note that some files may not be exportable thru the
RS-232 interface.
3.1.4.5.4 Export to
Default: USB Disk
The Export to setting defines where files are written to during an export or save
operation. For most applications, the best location to save files is the USB Disk.
3.1.4.5.5 Lamps (Profoma™ 300Gi only)
Default: Auto