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Содержание Proforma 300EMI

Страница 1: ...s Measurement for Semi Conducting Semi Insulating and Photo Voltaic Wafers Users Manual MTI Instruments Incorporated 325 Washington Avenue Extension Albany New York 12205 USA Phone 518 218 2550 or 800 342 2203 USA Only Fax 518 218 2506 Web www mtiinstruments com Email sales mtiinstruments com ...

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Страница 3: ...MTI Instruments Technical Manual 7001 0005 Revision 1 0 November 5 2013 i Revision History Rev 1 0 Initial Release ...

Страница 4: ...efects in the equipment as herein provided and upon the expiration of the warranty period of all such a liability shall terminate The foregoing shall constitute the exclusive remedy of the purchaser and the exclusive liability of the Seller The foregoing warranty is exclusive and in lieu of all warranties whether written oral implied or statutory except as to title There are no warranties which ex...

Страница 5: ...NTS This is the Original Instructions version of the User Manual It is illegal to operate this equipment in a European Union EU Member State unless the manual is written in an official language of the Member State Contact MTI Instruments for the availability of translated manuals WARNING ELECTRICAL SHOCK ELECTROCUTION HAZARD This equipment is connected to AC mains power There are no user serviceab...

Страница 6: ...ical Connections 8 2 3 7 Power Up 8 3 OPERATIONAL INSTRUCTIONS 9 3 1 Proforma 300i and Proforma 300Gi 9 3 1 1 Menu Structure Proforma 300i 10 3 1 2 Menu Structure Proforma 300Gi 11 3 1 3 Keypad Functions 12 3 1 3 2 Units 12 3 1 3 3 Zero 12 3 1 3 4 Menu 12 3 1 3 5 Back 12 3 1 3 6 Left Right Up Down Arrows 12 3 1 3 7 Select 12 3 1 4 Menu Items 12 3 1 4 1 Mode 12 3 1 4 1 1 Continuous 12 3 1 4 1 2 5 P...

Страница 7: ...s If the probe surfaces become contaminated isopropyl alcohol with a lint free cloth may be used 22 4 1 3 Display 22 4 2 Probe Amplifier Calibration 22 LIST OF FIGURES Figure 1 Rear Panel 4 Figure 2 Table Features 5 Figure 3 Drill Diagram for Proforma 300OEMi 6 Figure 4 OEM Probe Dimensions 7 Figure 5 Proforma 300i and 300Gi Front Panel Keyboard 9 Figure 6 Proforma 300i and 300Gi Display 9 Figure ...

Страница 8: ...d and packed in a cardboard carton with foam supports to guard against shipping damage If a heavy duty shipping case was ordered the product will be in the heavy duty shipping case and the heavy duty shipping case will be packed in a cardboard carton Upon receipt perform the following procedure before using the unit to perform dimensional measurements 1 Inspect the exterior of the shipping carton ...

Страница 9: ...ruments Inc Supervisor of Manufacturing 325 Washington Avenue Extension Albany NY 12205 5505 Mark RMA and the RMA number if a number is issued on the outside of the box If the original packing materials are not available 1 Replace the 3 rear panel shipping screws The suggested location that these should have been stored in is the attached plastic bag that is used for the alignment pins If they hav...

Страница 10: ...r maximum performance the Proforma Series products should be installed in a location where temperature variations are controlled to 1ºC The unit should not be placed directly in the path of moving air that results from heating and cooling ductwork vents A tool used in environments where the temperature changes 5ºC should be calibrated frequently Some materials such as GaAs have conductivity change...

Страница 11: ...ke Using the bubble level on the top plate as a reference adjust the 2 front leveling feet so that the table top is level Using a Phillips 1 screwdriver remove the 3 shipping screws attached at the rear of the unit and place them in the plastic bag that contains the alignment pins T3 15A 250V 100 240V 50 60Hz 50W Shipping Shipping Shipping PROFORMA 300i SERIES NON CONTACT THICKNESS MEASUREMENT SYS...

Страница 12: ...luminum Integrated into the table are a bubble level that aids in leveling the product In addition holes have been drilled in the table to accommodate the supplied alignment pins When placed in their proper holes these alignment pins will center a round wafer between the probes When not in use the pins can be stored in the holes located on the right rear of the table 76mm 100mm 125mm 150mm 200mm 3...

Страница 13: ...the bottom of the unit The unit should be placed such that the mounted probe wires can easily reach the controller unit Care should be taken to guarantee air flow around the unit Be advised that the unit generates heat and that mounting the unit inside an enclosure could result in a build up of heat which will adversely affect results 388 62 15 3 482 6 19 0 57 15 2 25 368 3 14 5 6 35 0 25 6 35 0 2...

Страница 14: ...g cables from the probe which have a minimum bend radius of 18mm 0 7 The probe holders should guarantee that the probes can be positioned diametrically opposed to each other Mount the probes in the probe holder such that the witness line on the first probe is aligned to the witness mark on the second probe 14 86 0 03mm 33 78 0 3mm Minimum Bend Radius 18mm Figure 4 OEM Probe Dimensions As an initia...

Страница 15: ...ory purposes only Do not connect a monitor to this product unless instructed to do so by MTI personnel or their representatives 2 3 6 5 USB Port Proforma 300i and Proforma 300Gi The Proforma 300i and the Proforma 300Gi have a single USB port located on the front panel This port is used with a standard USB flash drive to provide a convenient method to transport measurement data and export the on bo...

Страница 16: ...00Gi For the Proforma 300i and the Proforma 300Gi all operating parameters are available through the front panel display and interface The Menu is accessed by pressing the Menu button on the front panel keyboard Figure 5 Proforma 300i and 300Gi Front Panel Keyboard MODE Cont 626 3um CAL 383 1 Figure 6 Proforma 300i and 300Gi Display ...

Страница 17: ...Volts Resolution RS 232 Factory Update Version More Less Enter Value Enter Value Enter Value Show Address Set Address DHCP Manual Tables CFG Files Boot Log On Off USB Disk RS 232 On Off Up Down Baud Format 300 1200 2400 4800 9600 19200 38400 57600 115200 N 8 1 E 8 1 O 8 1 E 7 1 O 7 1 Reset Defaults No Yes Firmware Manual Tables Web Files On Off IP Address Mask Gateway Enter Value Enter Value Enter...

Страница 18: ...lution RS 232 Factory Update Version More Less Enter Value Enter Value Enter Value Show Address Set Address DHCP Manual Tables CFG Files Boot Log On Off USB Disk RS 232 On Off Always Off Auto Always On Up Down Baud Format 300 1200 2400 4800 9600 19200 38400 57600 115200 N 8 1 E 8 1 O 8 1 E 7 1 O 7 1 Reset Defaults No Yes Firmware Manual Tables Web Files On Off IP Address Mask Gateway Enter Value E...

Страница 19: ... values 3 1 3 7 Select Use this key to select or confirm an entry 3 1 4 Menu Items 3 1 4 1 Mode Default Continuous 3 1 4 1 1 Continuous Measurements are taken continuously and displayed on the screen This mode is often used to scan for surface irregularities It is also used in conjunction with the alignment pins to provide accurate measurements of the center of a wafer 3 1 4 1 2 5 Point 5 point is...

Страница 20: ... contrast value to satisfy most applications In some ambient lighting conditions the contrast may need to be adjusted for maximum viewability 3 1 4 5 2 Ethernet Default DHCP Off Default IP Address 192 168 168 252 Default Subnet Mask 255 255 255 000 Default Gateway 000 000 000 000 Default Show Address Off The Proforma Series products support connection to the Ethernet By default this address is sta...

Страница 21: ...orma Series products support an RS 232 connection to a host computer Note that the Proforma Series products are DTE terminals and will require a null modem connection to attach to a host computer The RS 232 menu allows the user to both check and set the RS 232 Baud Rate and Format 3 1 4 5 9 Factory The Factory setting allows a user reset to the factory default settings All user settings will be re...

Страница 22: ...system is not in Continuous Mode press the MENU button on the front keypad and select Mode Press the key Select Continuous and press the key MODE Cont CAL 500 0 um 3 1 5 2 Press the MENU button on the front keyboard and select Calibrate Press the key MODE Cont CAL 500 0 Main Menu Mode Calibrate Limits Roundin Setu g p ...

Страница 23: ...upplied with the Proforma 300i and Proforma 300Gi may be used to accurately center a standard size wafer Press the key After a few moments the system will calibrate to the known standard MODE Cont CAL 702 2 702 2um 3 1 6 Operational Modes 3 1 6 1 Continuous While in Continuous Mode the measurements and the display are continuously being updated For maximum accuracy thickness readings should be tak...

Страница 24: ...Point in the upper left hand corner The lower left corner will display ENTER to Measure Point 1 MODE 5 Point CAL 500 0 um SELECT To Measure Point 1 3 1 6 2 4 Place the wafer between the probe at position 1 and press the key MODE 5 Point CAL 500 0 um SELECT To Measure Point 2 505 2 505 2 3 1 6 2 5 Continue this process until all 5 points are measured At the end of the fifth measurement can be press...

Страница 25: ...p probe 3 1 6 3 3 Press the MENU button on the front panel keypad 3 1 6 3 4 Select Mode and press the key 3 1 6 3 5 Select Bow and press the key The screen will display MODE Bow in the upper left hand corner MODE Bow CAL 500 0 um SELECT To Measure Side 1 705 2 3 1 6 3 6 Press the key once The display will now display 0 00µm MODE Bow CAL 500 0 um SELECT To Measure Side 2 0 0 S1 926 3 3 1 6 3 7 Remo...

Страница 26: ... 0 0 LO 0 0 ZERO 505 7 The ZERO field represents the amount of offset that is being subtracted from the current reading the offset calculated when ZERO was pressed The HI and LO readings indicate the maximum and minimum deviation from the initial zero value The HI and LO functions will only update when the reading is stable approximately 1 second As a result quickly moving the wafer will not resul...

Страница 27: ... hex wrench loosen the clamp screw on the right hand side which secures the top probe Do not loosen or remove the 3 Phillips heads screws on the side bar 3 1 8 5 Gently grasp the probe wires and lift the probe so that a median surface calibration standard or median surface gauge block can be placed between the probes 3 1 8 6 Note that the witness mark on the top probe should face the front panel i...

Страница 28: ...rogram will be used 3 2 1 1 Start the Proforma 300i Data Logger Program and connect to the Proforma 300OEMi For help with installing running and connection refer to Software Manual 3 2 1 2 Make sure the VOLTS radio button is selected 3 2 1 3 Insert a sample calibration wafer or gauge block which is representative of the median thickness that will be measured The sample used must be larger than the...

Страница 29: ...ts or detergents to clean the equipment 4 1 2 Probes Do not use water to clean the probe surfaces If the probe surfaces become contaminated isopropyl alcohol with a lint free cloth may be used 4 1 3 Display Clean the display with a clean dry cloth 4 2 Probe Amplifier Calibration The Probe Amplifier combination is calibrated at the factory Do not attempt to adjust the amplifier calibration Annual f...

Страница 30: ...OTHER METROLOGY PRODUCTS FROM MTI INSTRUMENTS 3 point reference Bow Rings Accumeasure OEM High Resolution Accuracy Capacitive Displacement MicroTrak 3 Laser Triangulation ...

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