8
6.
Matters needing attention
6.1.
Equipment cleaning
After the equipment is used daily, a small amount of solvent should be used to clean the inner
chamber.When cleaning the vacuum tray, turn off the vacuum source first, and clean the surface of
the tray with a paper towel or soft cloth. Do not use solvents or cleaning agents to clean the tray
when it is installed.If a special solvent is needed to clean the loading tray, pull the loading tray out of
the shaft, and use a paper towel or soft cloth dipped in an appropriate amount of cleaning agent to
remove the residue on the surface of the loading tray. Do not scratch the surface to prevent damage
to the contact surface between the substrate and the tray plate.
Notice:It is strictly forbidden to use spray cleaning solvent or directly use solvent to clean
the tray plate still installed on the shaft, which may cause damage to the vacuum pump or the
spin coater.
6.2.
Tray replacement
Various sizes of trays are designed to provide a flat, hard surface, suitable for processing substrates
of various sizes, weights and shapes. Here are the steps to replace the tray:
1) Turn off the external vacuum source.
2) First pull out the load tray vertically from the shaft. If the load tray is stuck, try to pull it out by
shaking it left and right.
3) Align the locating pin on the shaft with the notch on the new tray and press down vertically
4) Make sure that the load plate is pressed on the shaft without clearance.
Notch
Locating pin
Tray
Shaft