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MKS Spectra-Physics Скачать руководство пользователя страница 6

©Newport Corporation

MKS Spectra-Physics Confidential

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Utility Requirements (Cont’d)

The Quasar laser head is water-cooled and does not require any other sort of cooling.  The system
must be installed in a stable environment.   The controller is force-air-cooled with a maximum
output power of ~ 300 Watts.  The controller requires approximately 200 CFM of free-air-flow.
The air-flow direction is front-to-back (warm air exhausts out the rear of the controller).

Chiller

Feature

Specifications

Fluid temperature

20°C +/-0.5

Fluid flow rate

9.5 liter/min @ 210 kPa (2.5 Gpm @ 30 psi at laser head inlet)

Hose and Cable Lengths

There is a 2.5 m (8 ft.) 3-wire AC power cord, no plug (the customer must provide and
install the plug for this power cord).

The LASER HEAD control cable is a standard 5 m (16 ft.).

The SHUTTER control cable is a standard 5 m (16 ft.).

The air hoses with connectors are a standard 5 m (16 ft.).

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Содержание Spectra-Physics

Страница 1: ...Newport Corporation MKS Spectra Physics Confidential 1 of 29 Pre Installation Guide For Quasar Laser Systems Spectra Physics 3635 Peterson Way Santa Clara CA 95054 800 456 2552 March 2020...

Страница 2: ...ooling Requirements 15 Lifting and Moving the Laser 16 Unpacking the Laser System 17 Unpacking the Power Supply Accessory Kit Crate 17 Unpacking the Power Supply Accessory Kit Crate Cont d 18 Unpackin...

Страница 3: ...f this document is to assist the user in establishing a suitable location and operating environment for optimum performance of the Quasar system Proper power and room temperatures are required for eac...

Страница 4: ...n the shipping containers The containers will be required if the system is returned to the factory for service The containers may also be needed to support a shipping damage claim The packing list ide...

Страница 5: ...heating Provide at least 6 inches of unobstructed space around the front and 8 inches at the rear panels of the QPS to allow cooling air to enter the front and heated air to exhaust from the back The...

Страница 6: ...00 CFM of free air flow The air flow direction is front to back warm air exhausts out the rear of the controller Chiller Feature Specifications Fluid temperature 20 C 0 5 Fluid flow rate 9 5 liter min...

Страница 7: ...l 7 of 29 Outline Drawings Laser Head ______________________________________________________ All dimensions in the figures are inches over mm ______________________________________________________ Fig...

Страница 8: ...orporation MKS Spectra Physics Confidential 8 of 29 Outline Drawings Cont d Laser Head Cont d Figure 1 2 Quasar laser head outline bottom view Figure 1 3 Quasar laser head outline front left and rear...

Страница 9: ...ings Cont d Power Supply _______________________________________________________ All dimensions in the figures are inches over mm ____________________________________________________________ Figure 1...

Страница 10: ...Newport Corporation MKS Spectra Physics Confidential 10 of 29 Outline Drawings Cont d Chiller Drawings...

Страница 11: ...for airflow and umbilical attachment and bend radius If QPS is rack mounted make sure to leave enough space for a service loop on cables and connections Chiller The chiller selected must be able to di...

Страница 12: ...through the BNC connectors Analog signals through the opto isolated interface is fast but requires circuitry for the opto isolated connections A combination of serial commands and BNC inputs or analo...

Страница 13: ...ol the laser system Alternatively the USB port see below can be used instead Refer to Appendix A Serial Command Interface for instructions on controlling the laser using the serial command language Th...

Страница 14: ...nsist that a representative of the carrier be present when you unpack the contents The three components of the Quasar system the Quasar laser head the Quasar power supply QPS and the optional chiller...

Страница 15: ...control cable optional 1 Power supply parts kit INTERLOCK jumper plug LASER CONTROL jumper plug two keys connector locks for AC connector fuses 15 A 250 V slow blow 2 5 m 16 ft air hoses with connecto...

Страница 16: ...ing and moving laser The laser head weighs 86 kg 190 lb The QPS weighs 16 kg 35 27 lb The table or transportation cart onto which the laser will be placed must be capable of supporting at least 181 kg...

Страница 17: ...lb and the QPS weighs 16kg 35 27 lb Four people are required to move the laser head safely Unpacking the Power Supply Accessory Kit Crate Verify that the tilt and shock watches see Figure 4 3 on each...

Страница 18: ...c Using two people lift the cover up so that it clears the contents then set it aside d Inspect the shock watches on each box If they are tripped call your Spectra Physics representative immediately...

Страница 19: ...ly 1 Open the large power supply box and remove the center foam piece 2 Open the inner bag then open the inner box and remove the white styrofoam piece 3 When the inner box is opened remove the access...

Страница 20: ...carrier being lifted out of the box 6 Do a preliminary inspection of the power supply for damage and if found report the damage to Spectra Physics If there is no damage proceed with the next step 7 P...

Страница 21: ...ing crate containing the laser head a Using metal cutters cut the shipping band b Unfasten the four clamps around the bottom of the crate that fasten the top portion of the crate the cover to the pale...

Страница 22: ...Cont d d 3 Unbuckle the straps holding the laser head in place e 4 Unscrew the clamps on the front and back of the laser head using a 1 2 in driver f Open all of the bags to expose the lifting eyelet...

Страница 23: ...the laser head from the crate to a cart or table Attach the lift to the eyelet h Alternatively two handles are provided to assist in moving the laser The hardware is already attached to the laser whi...

Страница 24: ...e top of the end cover down so that it lies down like a ramp d Remove the foam block and pull the chiller out of the crate and down the ramp e Remove the box of hoses and connectors and set it aside f...

Страница 25: ...e located at the front of the laser The front mounting hole is offset to allow easy access to the mounting bolt when the optional shutter is installed Dowel pins can be used to index the laser into th...

Страница 26: ...st compact mounting configuration when two or more laser systems are combined The power supply can be mounted using appropriate rackmount rails or set on a rackmount tray Ensure that the rackmount uni...

Страница 27: ...distilled water Spectra Physics provides optional chillers that are suitable for use with the Quasar laser system If your chiller was ordered from the factory with your laser it meets these requiremen...

Страница 28: ...Newport Corporation MKS Spectra Physics Confidential 28 of 29 Interconnect Diagram...

Страница 29: ...y filters should be cleaned or replaced every 3 to 6 months Chiller should have its fluid changed every 6 months at a minimum Check chiller hoses every 3 to 6 months Laser head desiccant should be rep...

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