MKS Newport HXP100-MECA, Руководство пользователя

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HXP100-MECA & HXP100HA-MECA 6-Axis-Parallel Kinematic Positioning Systems
3.2 Guaranteed Specifications of the HXP100HA-MECA Version
3.3 Max. Cantilever Distance of the Load
3.4 Weight
250
Max. Load (N)
50
100
150
200
0
0 20 40 60
Radial Distance, D (mm)
Load Position: D = 0 to 140 mm; H = 0 to 200 mm
Load
80 100 120 140
H = 0
H = 100
H = 200
H
D
Weight [lb (kg)]
Hexapod (without cables) 15.9 (7.2)
Cables 2.2 (1.0)
X Y Z
Uni-directional repeatability ±0.25 µm ±0.25 µm ±0.125 µm
Bi-directional repeatability ±3 µm ±3 µm ±2 µm
Absolute ±10 µm ±10 µm ±5 µm
Pitch ±75 µrad ±75 µrad ±75 µrad
Yaw ±75 µrad ±75 µrad ±75 µrad
G
U
AR
ANTE
E
D
S
P
E
CIFICATIO
N
S
A 698J 0 - EDH0 23 9 En10 7 0 - 12/19