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MKS HPS LPV1-25-AC Series, Руководство по эксплуатации и обслуживанию

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1

HPS

HPS

HPS

HPS

HPS

®

 Square Body LoPro

 Square Body LoPro

 Square Body LoPro

 Square Body LoPro

 Square Body LoPro

Seri es

Seri es

Seri es

Seri es

Serie s

The first two symbols below, that may be located on your HPS

®

 Square Body

LoPro Series, identify critical safety concerns. They are used throughout this
manual to further define the safety concerns associated with the product.

CAUTION:  Risk of electrical shock.

CAUTION:  Refer to manual.  Failure to heed message
could result in personal injury or serious damage to the
equipment or both.

The last two symbols identify other information in this manual that is
essential or useful in achieving optimal performance from the PDR 9000.

Failure to heed message could result in damage
to the equipment.

Calls attention to important procedures, practices,
or conditions.

1. Package Contents

1.2 Symbols Used in this Manual

(

Telephone  (303) 449-9861
Toll-Free    (800) 345-1967 (USA only)
Facsimile   (303) 449-2003

MKS Instruments, Inc.
Vacuum Products Group
5330 Sterling Dr.
Boulder,  CO. 80301
USA

1.1 IN THIS MANUAL

This manual details functional information for the non-heated HPS

®

 Square

Body LoPro Series, angle and in-line bellows sealed poppet valves, their
options and accessories.  HPS

®

 also offers a Square Body LoPro heated

valve line, the Jalapeno LoPro Series.  For more information on the Jalapeno
LoPro series refer to Jalapeno LoPro instruction manual.

Inspect the Square Body LoPro for visible evidence of damage during
shipment. If it has been damaged, notify the carrier immediately.  Keep all
shipping materials and packaging for claim verification.  Do not return the
Product to HPS

®

.

Содержание HPS LPV1-25-AC Series

Страница 1: ...HPS Square Body LoPro Series Bellows Sealed Poppet Valves OPERATION AND MAINTENANCE MANUAL ...

Страница 2: ......

Страница 3: ...HPS Square Body LoPro Series May 1999 PART 100010482 HPS Square Body LoPro Series Bellows sealed Poppet Valves ...

Страница 4: ...ments Inc All rights reserved ALCONOX is a registered trademark of Alconox Inc IgniTorr is a trademark of HPSTM Division of MKS Instruments Inc Inconel is a registered trademark of Inco Alloys International Inc Scotch Brite is a trademark of 3M SensaVac is a registered trademark of MKS Instruments Inc For more information or literature contact Vacuum Products Group of MKS Instruments Inc 5330 Ster...

Страница 5: ...ion Orientation 11 5 1 2 Applied Forces 11 5 1 3 Temperature Extremes 11 5 2 Operation Performance 13 5 2 1 Cycle Rate and Life 13 5 2 1 1 Pneumatic Actuation 13 5 2 1 2 Manual Actuation 13 5 2 2 System Pressure Limits 13 5 2 3 Pneumatic Pressure Limits Pneumatic Actuation Only 14 5 2 4 Pneumatic Flow Pneumatic Actuation Only 14 5 2 5 Limit Switch Ratings Pneumatic Actuation Only 14 5 2 6 Solenoid...

Страница 6: ...ing signals 31 8 1 14 Solenoid valve buzzes or doesn t work 31 8 2 Problems and Diagnosis Manual Actuation 32 8 2 1 Won t close completely 32 8 2 2 Won t open completely 32 8 2 3 Difficult to open close or Squeaks 32 8 2 4 Leaks across closed nosepiece seal 32 8 2 5 Leaks from atmosphere when closed 32 8 2 6 Leaks from atmosphere when open 33 8 2 7 Leaks from atmosphere at all times 33 8 3 Causes ...

Страница 7: ...tmosphere when closed 31 8 1 8 Leaks from atmosphere when open 32 8 1 9 Leaks from atmosphere at all times 32 8 1 10 Air leaks from around piston when open 32 8 1 11 Air leaks from vent hole while opening 32 8 1 12 Air leaks from vent hole when open 32 8 1 13 Limit switches not sending signals 32 8 1 14 Solenoid valve buzzes or doesn t work 32 8 2 Problems and Diagnosis Manual Actuation 33 8 2 1 W...

Страница 8: ...ir flow Pneumatic Actuation Only 37 8 3 17 Limit switch failure Pneumatic Actuation Only 37 8 3 18 Solenoid valve failure Pneumatic Actuation Only 37 8 3 19 Stem Weld Failure 38 9 RETURN TO FACTORY FOR REPAIR OR SERVICE 39 9 1 Call the factory 39 9 2 Prepare for shipment 39 10 Product Warranty 40 11 Notes 42 ...

Страница 9: ...d result in damage to the equipment Calls attention to important procedures practices or conditions 1 Package Contents 1 2 Symbols Used in this Manual Telephone 303 449 9861 Toll Free 800 345 1967 USA only Facsimile 303 449 2003 MKS Instruments Inc Vacuum Products Group 5330 Sterling Dr Boulder CO 80301 USA 1 1 IN THIS MANUAL This manual details functional information for the non heated HPS Square...

Страница 10: ...rve the proper safety precautions and insure that the material used is compatible with those from which the valve is fabricated Installation All flanges and fittings interfacing with the valve must be consistent with those on the valve Assemble and tighten vacuum flanges and pneumatic fittings according to standards and carefully check for leaks prior to operation Pneumatic valves with solenoid pi...

Страница 11: ...he topped out position The valve is closed when the knob is turned clockwise to the bottomed out position The bodies of both the pneumatic and manual versions of the valve are available in angle and concentric in line configurations with a variety of flanging Custom body configurations and flange combinations are available upon request O rings function as face seals on the bonnet and nosepiece whi...

Страница 12: ...in line body K ISO KF flanges C CF flanges T Butt weld tubes CN Normally closed no limit switch CL Normally closed with limit switch MN Manual actuation B Buna N o rings E EPDM o rings K Kalrez o rings S Silicone o rings V Viton o rings Z Chemraz o rings S Standard temperature range N Manual actuation Blank No solenoid 12D 120 VDC 24A 24 VAC 50 60 Hz 24D 24 VDC 100 100 VAC 50 Hz 120 120 VAC 50 60 ...

Страница 13: ... 2 illustrates the components of the pneumatic valve From its normally closed position the valve is opened with the admission of compressed air to the pneumatic cylinder through the 1 8 female NPT port in the side of the cylinder 1 4 Operating Principles Actuator Cylinder 1 Piston 2 O Ring 11 Bellows 4 Spring Bushing 5 Nosepiece 7 Seat 8 14 Flat Head Screw 15 Piston Seal 13 Stem Seals 12 Rulon Bea...

Страница 14: ...e nosepiece and the seat effects the seal at the valve orifice The bellows forms a flexible hermetic seal between the nosepiece and the fixed elements of the body 10 As long as adequate pneumatic pressure is applied the piston continues to travel upward further compressing the spring until the top of the nosepiece spring bushing 5 and bottom of the cylinder are all in contact This is the open posi...

Страница 15: ...valve is closed the lever of the closed position switch 18 is depressed by the cam extension 17 on the top of the stem 6 When the valve is fully opened the cam extension activates the lever of the open position switch 16 Observing that the closed position limit switch is actuated does not necessarily verify that the valve is sealed leak tight as contamination or damage to the seal or seat could af...

Страница 16: ...by the coil overcomes the force of the spring 22 and lifts the plunger 21 off the seat 23 While this opens a pressurized flow path from the pneumatic line connected to the 1 8 NPT inlet port it also seals the venting flow path Being at the vent port s pressure usually but not necessarily atmospheric the cylinder of the valve is quickly pressurized and the valve opens see section 3 1 When power to ...

Страница 17: ...e changes The top of the stem is attached to the manual screw via a pan head screw while the bottom of the stem is welded to the nosepice The nosepiece carries an o ring seal in a trapezoidal groove which when squeezed between the nosepiece and the seat effects the seal at the valve orifice The bellows forms a flexible hermetic seal between the nosepiece and the fixed elements of the body The open...

Страница 18: ...quare Body LoPro Square Body LoPro Square Body LoPro Series Series Series Series Series 10 Figure 5 LPV 25 Manual Actuation Angle KF Manual Knob Manual Stem Guide Body Flange Bellows Thrust Bearing Nosepiece O Ring Nosepiece Manual Screw Bellows Flange Body Stem ...

Страница 19: ...e pneumatic version addition of the optional limit switch package decreases the upper temperature limit to 82o C while adding the optional solenoid pilot valve increases the lower limit to 0o C The Square Body LoPro valve s most vulnerable components to temperature extremes are the organic compounds used in seals bearings and lubrication In the pneumatic version the pressurized cavity in the pneum...

Страница 20: ...e the operating temperatures of these lubricants do not pose immediate problems regular maintenance with attention to the condition of the piston stem and manual screw lubricants should be performed on valves run for extended periods at or near the high temperature limit Similarly the optional limit switch package contains polymers and elastomers in the switch housings and grommets The temperature...

Страница 21: ... Opening and closing times are dependent upon the operator and will vary dependent upon the application Under normal conditions Manual Square Body LoPro valves will greatly exceed 100 000 cycles before failure 5 2 2 System Pressure Limits Square Body LoPro Series valves are designed to function from UHV to greater than 2 Atm pressure depending on size Due to the elastomer seal on the bonnet the lo...

Страница 22: ...me the spring s closing force and open the valve As the nosepiece moves away from the seat the spring is compressed further requiring more force A minimum pneumatic pressure of 40 psig is required for proper valve function 5 2 4 Pneumatic Flow Pneumatic Actuation Only Insufficient pneumatic flow due to inadequate line diameter can result in temporary downstream decreases in pressure The lines lead...

Страница 23: ... 2 00 LPV1 25 AT 1 88 3 34 0 60 2 27 2 00 LPV1 40 AC 2 43 3 73 0 70 2 67 2 50 LPV1 40 AK 2 56 3 73 0 70 2 67 2 50 LPV1 40 AT 2 25 3 73 0 70 2 67 2 50 LPV1 50 AC 3 19 4 51 1 20 3 51 3 25 LPV1 50 AK 2 76 4 51 1 20 3 51 3 25 LPV1 50 AT 3 00 4 51 1 20 3 51 3 25 All values are in inches Figure 6 Manual In line valve dimensions 5 3 Dimensions 5 3 1 Dimensions Manual Actuation Manual In line Square Body ...

Страница 24: ...s Series 16 Figure 7 Manual Angle valve dimensions Manual Angle Square Body LoPro Figure 7 dimensions A B C LPV1 25 IC 4 62 4 50 0 42 LPV1 25 IK 3 94 4 50 0 42 LPV1 25 IT 4 35 4 50 0 42 LPV1 40 IC 5 19 5 20 0 50 LPV1 40 IK 5 12 5 20 0 50 LPV1 40 IT 4 83 5 20 0 50 LPV1 50 IC 7 59 6 20 0 85 LPV1 50 IK 7 00 6 20 0 85 LPV1 50 IT 7 20 6 20 0 85 ...

Страница 25: ...Figure 8 dimensions Figure 8 Pneumatic In line Square Body LoPro A B C D E LPV1 25 AC 2 02 3 62 2 24 3 13 2 00 LPV1 25 AK 1 97 3 62 2 24 3 13 2 00 LPV1 25 AT 1 88 3 62 2 24 3 13 2 00 LPV1 40 AC 2 43 3 88 2 75 3 38 2 50 LPV1 40 AK 2 56 3 88 2 75 3 38 2 50 LPV1 40 AT 2 25 3 88 2 75 3 38 2 50 LPV1 50 AC 3 19 5 04 3 49 3 75 3 25 LPV1 50 AK 2 76 5 04 3 49 3 75 3 25 LPV1 50 AT 3 00 5 04 3 49 3 75 3 25 A...

Страница 26: ... Series Series Series Series 18 Pneumatic Angle Square Body LoPro Figure 9 dimensions Figure 9 Pneumatic Angle Square Body LoPro A B LPV1 25 IC 4 62 4 65 LPV1 25 IK 3 94 4 65 LPV1 25 IT 4 35 4 65 LPV1 40 IC 5 19 5 34 LPV1 40 IK 5 12 5 34 LPV1 40 IT 4 83 5 34 LPV1 50 IC 7 59 6 80 LPV1 50 IK 7 00 6 80 LPV1 50 IT 7 20 6 80 ...

Страница 27: ... Square Body LoPro valves and their options are as follows NW25 Manual LoPro valve 1 6 lb NW40 Manual LoPro valve 2 8 lb NW50 Manual LoPro valve 4 8 lb NW25 Pneumatic LoPro valve 1 6 lb NW40 Pneumatic LoPro valve 3 0 lb NW50 Pneumatic LoPro valve 5 4 lb NW25 limit switches 0 16 lb 72 6g NW40 limit switches 0 20 lb 90 7g NW50 limit switches 0 27 lb 122g Solenoid pilot valve 0 46 lb 209g ...

Страница 28: ... the solenoid pilot valve is considerably longer when the air supply contains trace quantities of moisture or oil 6 2 Electrical Connections Pneumatic Actuation Only Electrical connections within the valve assembly must be made whenever the valve is equipped with limit switches and sometimes when using the optional solenoid pilot valve Two entries with grommets are provided in the limit switch cov...

Страница 29: ...not to damage the flanges To help protect the flanges the plastic caps supplied with the valve should remain in place until installation and be replaced when removed from a system A small scratch on the flange seal surface of an elastomer sealed flange could prevent a leak tight seal Similarly on valves with CF metal seal flanges scratches or dents in the knife edge may prevent the flange from sea...

Страница 30: ...tion 7 4 Loosen and remove the clamps or bolts on the port flanges If possible pull one of the flanges mating to a port flange directly away from the valve to allow removal of the valve without scraping sealing surfaces Replace the protective plastic caps on the port flanges or cover the ports with aluminum foil Avoid touching the interior surfaces of the valve Moisture skin oils and dirt may cont...

Страница 31: ...ontains a powerful spring under some compression at all times A special fixture is required for further safe disassembly of the actuator Replacement of malfunctioning actuators with new assemblies is recommended see parts list in section 7 6 for details 7 2 2 O Ring Replacement The bonnet o rings may easily be removed without a special fixture With a little stretch the bonnet o ring clears the bel...

Страница 32: ...valve evacuated and attached to the He mass spectrometer insert the tracer gas probe into this slot If a leak is detected either the bellows or the bonnet seal is faulty The nosepiece seal and port flange seals may be tested through a variety of methods and will not be detailed here 7 3 Actuator Assembly Manual Version 7 3 1 Actuator Assembly Removal and Disassembly The following procedure does no...

Страница 33: ...has not twisted during assembly this will disappear after a small number of cycles after which the valve should function properly 7 3 3 Actuator Assembly Installation Before installing the actuator assembly turn the manual knob so that the assembly is not in the bottomed out position Insert the actuator assembly into the valve body As with removal take care to avoid damaging the bellows Be sure th...

Страница 34: ...am extension into the hole in the center of the bottom of the limit switch assembly keeping the axis of the limit switch assembly concentric with that of the cam extension Align the four holes six in the NW50 LoPro valves in the top of the cylinder with the four in the bottom of the limit switch assembly Insert and tighten the pan head cap screws If the limit switch assembly was previously removed...

Страница 35: ... proper function Repeat these steps until it functions properly Connect the ohmmeter to the NC and C terminals of the open position limit switch With the valve in its closed position closed circuit resistance should be indicated Cycle the valve to its open position Open circuit resistance should be indicated Run the valve through several cycles to be sure that the switch is actuating properly and ...

Страница 36: ... LoPro Series Series Series Series Series 28 The coil is the only replaceable component of the solenoid pilot valve After removing the jam nut the coil slips off of the housing of the valve Install the new coil and tighten the jam nut Orientation of the coil wires has no affect on the function of the valve ...

Страница 37: ...nual actuation internals 100010130 Actuator with no seals 100010102 Buna N seal kit 100002217 Kalrez R seal kit 100002220 Silicone seal kit 100002223 Viton R seal kit 100002226 Chemraz seal kit 100009147 limit switch kit 100010102 NW25 LoPro valves Manual actuation internals 100010128 Actuator with no seals 100010104 Buna N seal kit 100002215 Kalrez R seal kit 100002218 Silicone seal kit 100002221...

Страница 38: ...ction 8 3 12 covering improper assembly 8 1 2 Won t open completely Failure to open completely can be detected directly by the absence of a signal from the open limit switch if so equipped It can also be observed through the hole in the center of the piston cover Lastly a significant decrease in the valve s conductance may be an indication First see section 8 3 15 on inadequate air pressure If pne...

Страница 39: ...lve is trying to open see section 8 3 13 on loose piston hold down screws 8 1 5 Squeaks when opening and or closing LoPro valves normally make a barely audible squeak when they open This is caused by the spring making contact with the bushing that prevents the spring from buckling and damaging critical components A loud grinding or squeaking may be indicative of a problem If there seems to be loos...

Страница 40: ...e piston cover but is not emanating from the vent in the actuator cylinder see section 8 3 8 on piston seal failure 8 1 11 Air leaks from vent hole while opening The slot inbetween the actuator cylinder and the bellows flange vents the interior of the bellows as its volume changes during the stroke This venting is normal and necessary while the valve is dynamic opening or closing 8 1 12 Air leaks ...

Страница 41: ...e section 8 3 12 covering improper assembly 8 2 3 Difficult to open close or Squeaks Square Body LoPro valves normally make a barely audible squeak when they open An Increase in squeaking and opening difficulty usually indicates inadequate lubrication on the manual screw First see section 8 3 14 on inadequate lubrication If the manual screw is properly lubricated see section 8 3 12 on improper ass...

Страница 42: ... damage All Square Body LoPro valves are thoroughly tested after assembly Body damage serious enough to result in detectable leakage could be caused by mishandling or abuse in shipping or in the installation A damaged body is not easily repaired usually costing more for the repair than a replacement Often with serious body damage the actuator assembly has also been damaged making replacement of th...

Страница 43: ...seal failure Elastomer seals that have remained in a compressed condition for long periods of time may not return to their original circular cross section when released Such seals may stick to the mating sealing surface as they are pulled apart leaving bits of the seal behind Old elastomers tend to lose some of their elasticity and may crack Various process gasses and or high temperatures accelera...

Страница 44: ...op reference section 7 2 3 on pneumatic actuator assembly installation or 7 3 3 on manual actuator assembly installation Failure to do so could result in the valve not closing completely or leaking in its closed position 8 3 13 Loose piston hold down screw Pneumatic Actuation Only The piston hold down screw a flat head socket drive cap screw can work itself loose if not tightened adequately during...

Страница 45: ...low it must be increased see section 5 2 2 on system pressure limits 8 3 16 Inadequate air flow Pneumatic Actuation Only More difficult to detect than inadequate pressure low flow may cause slow actuation of the valve If the pneumatic line is equipped with a gauge watch the pressure as the valve is actuated If it decreases significantly with each slow actuation then pneumatic flow is inadequate Ch...

Страница 46: ...z The best remedy is to replace the entire solenoid valve Installation of a filter in the pneumatic line upstream from the valve can prolong the life of the valve 8 3 19 Stem Weld Failure A disproportionately high percentage of early LoPro valves experienced a failure in the weld joining the nosepiece to the stem This process problem was corrected January 10 1992 There have been no reports of this...

Страница 47: ...h any dangerous toxic or radioactive materials HPS is not equipped to handle such items Items having ANY unidentified coatings or films will be treated as hazardous waste and appropriately disposed at the sender s expense Additionally the shipment of hazardous materials through the mail or on any private carrier not specifically licensed for the handling of such materials is a federal offense With...

Страница 48: ...roduct for which paid or unpaid service is desired if the product is contaminated with potentially corrosive reactive harmful or radioactive materials gases or chemicals When products are used with toxic chemicals or in an atmosphere that is dangerous to the health of humans or is environmentally unsafe it is the responsibility of the PURCHASER to have the product cleaned by an independent agency ...

Страница 49: ... 10 2 OTHER RIGHTS AND REMEDIES HPS SHALL NOT BE LIABLE FOR CONSEQUENTIAL DAMAGES FOR ANTICIPATED OR LOST PROFITS INCIDENTAL DAMAGES OR LOSS OF TIME OR OTHER LOSSES INCURRED BY THE PURCHASER OR BY ANY THIRD PARTY IN CONNECTION WITH THE PRODUCT COVERED BY THIS WARRANTY OR OTHERWISE Some states do not allow the exclusion or limitation of incidental or consequential damages so the above limitation or...

Страница 50: ...42 HPS HPS HPS HPS HPS Square Body LoPro Square Body LoPro Square Body LoPro Square Body LoPro Square Body LoPro Series Series Series Series Series 42 11 Notes ...

Страница 51: ......

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