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17

Cold Cathode Ionization Vacuum Sensor

E

xtent of the Warranty

 MKS Instruments, Inc., warrants HPS

TM

 Products Series 423 I-MAG

®

 Sensor and its accessories to be free

from defects in materials and workmanship for one (1) year from the date of shipment by HPS

TM

 or

authorized representative to the original purchaser (PURCHASER). Any product or parts of the product
repaired or replaced by HPS

TM

 under this warranty are warranted only for the remaining unexpired part of its

one (1) year original warranty period. After expiration of the applicable warranty period, the PURCHASER
shall be charged HPS

TM

’ current prices for parts and labor, plus any transportation for any repairs or

replacement.
ALL EXPRESS AND IMPLIED WARRANTIES, INCLUDING THE IMPLIED WARRANTIES OF
MERCHANTABILITY AND FITNESS FOR A PARTICULAR PURPOSE, ARE LIMITED TO THE WARRANTY
PERIOD. NO WARRANTIES, EXPRESS OR IMPLIED, WILL APPLY AFTER THIS PERIOD.

Warranty Service
The obligations of HPS

TM

 under this warranty shall be at its option: (1) to repair, replace, or adjust the

product so that it meets applicable product specifications published by HPS

TM

 or (2) to refund the

purchase price.

What Is Not Covered
The product is subject to above terms only if located in the country of the seller from whom the product was
purchased. The above warranties do not apply to:
I.   Damages or malfunctions due to failure to provide reasonable and necessary maintenance in
accordance with HPS

TM

 operating instructions.

II.  Damages or malfunctions due to chemical or electrolytic influences or use of the product in working
environments outside the specification.
III. Fuses and all expendable items which by their nature or limited lifetime may not function for a year. If
such items fail to give reasonable service for a reasonable period of time within the warranty period of the
product; they will, at the option of HPS

TM

, be repaired or replaced.

IV. Defects or damages caused by modifications and repairs effected by the original PURCHASER or third
parties not authorized in the manual.

Condition of Returned Products
HPS

TM

 will not accept for repair, replacement, or credit any product which is asserted to be defective by the

PURCHASER, or any product for which paid or unpaid service is desired, if the product is contaminated
with potentially corrosive, reactive, harmful, or radioactive materials, gases, or chemicals.
When products are used with toxic chemicals, or in an atmosphere that is dangerous to the health of
humans, or is environmentally unsafe, it is the responsibility of the PURCHASER to have the product
cleaned by an independent agency skilled and approved in the handling and cleaning of contaminated
materials before the product will be accepted by HPS

TM

 for repair and/or replacement.

In the course of implementing this policy, HPS

TM

 Customer Service Personnel may inquire of the

PURCHASER whether the product has been contaminated with or exposed to potentially corrosive,
reactive, harmful, or radioactive materials, gases, or chemicals when the PURCHASER requests a return
authorization. Notwithstanding such inquiries, it is the responsibility of the PURCHASER to ensure that no
products are returned to HPS

TM

 which have been contaminated in the aforementioned manner.

Other Rights and Remedies
I.   These remedies are exclusive. HPS SHALL NOT BE LIABLE FOR CONSEQUENTIAL DAMAGES, FOR
ANTICIPATED OR LOST PROFITS, INCIDENTAL DAMAGES OR LOSS OF TIME, OR OTHER LOSSES
INCURRED BY THE PURCHASER OR BY ANY THIRD PARTY IN CONNECTION WITH THE PRODUCT
COVERED BY THIS WARRANTY, OR OTHERWISE. Some states do not allow exclusion or limitation of
incidental or consequential damage or do not allow the limitation on how long an implied warranty lasts. If
such laws apply, the limitations or exclusions expressed herein may not apply to PURCHASER.
II.  Unless otherwise explicitly agreed in writing, it is understood that these are the only written warranties
given by HPS

TM

. Any statements made by any persons, including representatives of HPS

TM

, which are

inconsistent or in conflict with the terms of the warranty shall not be binding on HPS unless reduced to
writing and approved by an authorized officer of HPS

TM

.

III. This warranty gives PURCHASER specific legal rights, and PURCHASER may also have other rights
which vary from state to state.
IV.  For HPS

TM

 products sold outside of the U.S., contact your MKS representative for warranty information

and service.

Warranty Performance
To obtain warranty satisfaction, contact the following: MKS Instruments, HPS

TM

 products Inc., 5330 Sterling

Drive, Boulder, CO 80301, USA, at phone number (303) 449-9861.

Product Warranty

Содержание HPS I-MAG 423 Series

Страница 1: ...HPSTM Products Series 423 I MAG Cold Cathode Ionization Vacuum Sensor OPERATION AND MAINTENANCE MANUAL...

Страница 2: ...se Note MKS Instruments provides these documents as the latest version for the revision indicated The material is subject to change without notice and should be verified if used in a critical applicat...

Страница 3: ...Cold Cathode Ionization Vacuum Sensor HPSTM Products Series 423 I MAG Cold Cathode Ionization Vacuum Sensor September 1997 PART 104230020 REV B...

Страница 4: ...m side of the housing 1999 by MKS Instruments Inc HPSTM Products Inc All rights reserved ALCONOXisaregisteredtrademarkofAlconox Inc IgniTorrisatrademarkofMKSInstruments Inc HPSTM ProductsInc Inconelis...

Страница 5: ...ol 5 Safety Precautions 6 English 6 Fran ais 6 Espa ol 6 Deutsch 6 Specifications 7 Feature Locations 8 About the HPSTM Series423 I MAG Sensor 9 Installing and Using the Series 423 I MAG Sensor 10 Loc...

Страница 6: ...Cold Cathode Ionization Vacuum Sensor...

Страница 7: ...Ionization Vacuum Sensor User s Guide If any items are missing from the package call HPSTM Customer Service at 1 303 449 9861 or 1 800 345 1967 Cables are required for connecting the I MAG Sensor to i...

Страница 8: ...ike which if not correctly performed or adhered to could result in injury to personnel This sign denotes a hazard It calls attention to an operating procedure practice or the like which if not correct...

Страница 9: ...e chose pr sentant un risque de blessure en cas d ex cution incorrecte ou de non respect des consignes L indication signale un danger potentiel Elle est destin e attirer l attention sur une proc dure...

Страница 10: ...sf hrung bzw Ungen gende Ber cksichtigung zu K rperverletzung f hren kann Das Symbol VORSICHT weist auf eine Gefahrenquelle hin Es macht auf einenBedienungsablauf eine Arbeitsweiseodereinesonstige Geg...

Страница 11: ...i n etc que de no realizarse u observarse correctamente podr a causar lesiones a los empleados Esto s mbolo indica un riesgo Pone de relieve un procedimiento pr ctica etc de tipo operativo que de no r...

Страница 12: ...controller is turned on Danger de haute tension Une haute tension est pr sente dans le c ble et dans le capteur lorsque le contr leur est sous tension Hochspannungsgefahr Bei eingeschaltetem Steuertei...

Страница 13: ...ature 500 C 932 F for CF flanged unit without cable and magnet Installation Orientation Any vacuum port face down suggested Internal Volume 0 9 in 3 15 0 cm3 maximum Materials Exposed to Vacuum SS 304...

Страница 14: ...nization Vacuum Sensor 1 2 3 4 2 3 4 6 32 x 0 25 Flat Head Countersunk Screw 2 For Removal of Magnet for Bakeout High Voltage Feed through Pin Ion Current Feed through Pin 1 Sensor Tube Vacuum Port Fe...

Страница 15: ...the I MAG Sensor together with its cable is fully compatible with all HPSTM cold cathode sensor controllers as well as the MKS Type 146 vacuum sensor measurement and control system Additional feature...

Страница 16: ...s optimal as this helps prevent contaminants falling into it Operation at pressures above 10 3 Torr for extended periods will increase the likelihood of contamination Connecting the Sensor Mount the S...

Страница 17: ...n High voltage should be disabled at pressures above 10 2 Torr to prevent sputtering Preparing for Bakeout Loosen the thumb screw on top of the cable and remove it Loosen the two flathead screws locat...

Страница 18: ...ean tweezers clean smooth jaw needle nose pliers 1 Loosen the thumb screw on top of the sensor cable and then remove it Loosen the two flat head screws Remove the magnet 2 Using the smooth jaw needle...

Страница 19: ...aning methods should be followed with multiple rinses of deionized water Dry all internal components and the sensor body in a clean oven The two ceramic spacers and are slightly porous and will requir...

Страница 20: ...grid washer to verify they are centered with respect to the anode If adjustment is needed gently reposition the grid washer cathode assembly taking care not to scratch the grid washer We suggest you...

Страница 21: ...15 Cold Cathode Ionization Vacuum Sensor 2 1 3 5 6 7 8 9 10 11 12 13 14 15 4...

Страница 22: ...e Cable 2 ft 100002505 10 ft 100007873 25 ft 100007874 50 ft 100002395 Custom to 500 ft 100008759 Internal Rebuild Kit 100002353 Cathode Grid Washer Ground Shield Ceramic Spacers 1 Sm and 1 Lrg Spring...

Страница 23: ...paid or unpaid service is desired if the product is contaminated with potentially corrosive reactive harmful or radioactive materials gases or chemicals When products are used with toxic chemicals or...

Страница 24: ...18 18 Cold Cathode Ionization Vacuum Sensor NOTES...

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