MKS HPS I-MAG 423 Series, Руководство по эксплуатации и обслуживанию

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14
14 Cold Cathode Ionization Vacuum Sensor
5 Slide the cathode , the grid washer , and the large ceramic
spacer into place. The grid washer has a concave shape. Refer
to the figure to see its installation orientation.
6 Insert the small end of the compression spring into the sensor
body . Using your thumbs, push the larger end of the spring into
the
sensor body until it is contained within the tube's inside
diameter. Using the smooth-jaw, needle-nose pliers, work the
compression spring down into the sensor body until it is fully seated
in the formed groove.
7 Inspect the ground shield and the grid washer to verify they
are centered with respect to the anode . If adjustment is needed,
gently reposition the grid washer/cathode assembly, taking care not
to scratch the
grid washer.
We suggest you measure the resistance between the ion current
feed through pin and the grid washer to verify that the leaf
spring
is in contact with the cathode . The measurement
should indicate a short circuit between them. There should be
an open circuit between the ion current feed through pin and
both the high voltage feed through pin and sensor body .
The I-MAG ® Sensor is ready for installation. If it is not immediately
installed, cover the flange with clean, vacuum grade aluminum foil and
cap it with a flange protector.
3
2
1
3 6
7
8
9
10
13
4
3
13
7
F F
F F
F
4
Leaf spring in
contact with
cathode