MKS HPS I-MAG 423 Series Скачать руководство пользователя

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HPS

Products

Series 423 I-MAG

Cold Cathode Ionization

Vacuum Sensor

OPERATION AND

MAINTENANCE MANUAL

Содержание HPS I-MAG 423 Series

Страница 1: ...HPSTM Products Series 423 I MAG Cold Cathode Ionization Vacuum Sensor OPERATION AND MAINTENANCE MANUAL...

Страница 2: ...se Note MKS Instruments provides these documents as the latest version for the revision indicated The material is subject to change without notice and should be verified if used in a critical applicat...

Страница 3: ...Cold Cathode Ionization Vacuum Sensor HPSTM Products Series 423 I MAG Cold Cathode Ionization Vacuum Sensor September 1997 PART 104230020 REV B...

Страница 4: ...m side of the housing 1999 by MKS Instruments Inc HPSTM Products Inc All rights reserved ALCONOXisaregisteredtrademarkofAlconox Inc IgniTorrisatrademarkofMKSInstruments Inc HPSTM ProductsInc Inconelis...

Страница 5: ...ol 5 Safety Precautions 6 English 6 Fran ais 6 Espa ol 6 Deutsch 6 Specifications 7 Feature Locations 8 About the HPSTM Series423 I MAG Sensor 9 Installing and Using the Series 423 I MAG Sensor 10 Loc...

Страница 6: ...Cold Cathode Ionization Vacuum Sensor...

Страница 7: ...Ionization Vacuum Sensor User s Guide If any items are missing from the package call HPSTM Customer Service at 1 303 449 9861 or 1 800 345 1967 Cables are required for connecting the I MAG Sensor to i...

Страница 8: ...ike which if not correctly performed or adhered to could result in injury to personnel This sign denotes a hazard It calls attention to an operating procedure practice or the like which if not correct...

Страница 9: ...e chose pr sentant un risque de blessure en cas d ex cution incorrecte ou de non respect des consignes L indication signale un danger potentiel Elle est destin e attirer l attention sur une proc dure...

Страница 10: ...sf hrung bzw Ungen gende Ber cksichtigung zu K rperverletzung f hren kann Das Symbol VORSICHT weist auf eine Gefahrenquelle hin Es macht auf einenBedienungsablauf eine Arbeitsweiseodereinesonstige Geg...

Страница 11: ...i n etc que de no realizarse u observarse correctamente podr a causar lesiones a los empleados Esto s mbolo indica un riesgo Pone de relieve un procedimiento pr ctica etc de tipo operativo que de no r...

Страница 12: ...controller is turned on Danger de haute tension Une haute tension est pr sente dans le c ble et dans le capteur lorsque le contr leur est sous tension Hochspannungsgefahr Bei eingeschaltetem Steuertei...

Страница 13: ...ature 500 C 932 F for CF flanged unit without cable and magnet Installation Orientation Any vacuum port face down suggested Internal Volume 0 9 in 3 15 0 cm3 maximum Materials Exposed to Vacuum SS 304...

Страница 14: ...nization Vacuum Sensor 1 2 3 4 2 3 4 6 32 x 0 25 Flat Head Countersunk Screw 2 For Removal of Magnet for Bakeout High Voltage Feed through Pin Ion Current Feed through Pin 1 Sensor Tube Vacuum Port Fe...

Страница 15: ...the I MAG Sensor together with its cable is fully compatible with all HPSTM cold cathode sensor controllers as well as the MKS Type 146 vacuum sensor measurement and control system Additional feature...

Страница 16: ...s optimal as this helps prevent contaminants falling into it Operation at pressures above 10 3 Torr for extended periods will increase the likelihood of contamination Connecting the Sensor Mount the S...

Страница 17: ...n High voltage should be disabled at pressures above 10 2 Torr to prevent sputtering Preparing for Bakeout Loosen the thumb screw on top of the cable and remove it Loosen the two flathead screws locat...

Страница 18: ...ean tweezers clean smooth jaw needle nose pliers 1 Loosen the thumb screw on top of the sensor cable and then remove it Loosen the two flat head screws Remove the magnet 2 Using the smooth jaw needle...

Страница 19: ...aning methods should be followed with multiple rinses of deionized water Dry all internal components and the sensor body in a clean oven The two ceramic spacers and are slightly porous and will requir...

Страница 20: ...grid washer to verify they are centered with respect to the anode If adjustment is needed gently reposition the grid washer cathode assembly taking care not to scratch the grid washer We suggest you...

Страница 21: ...15 Cold Cathode Ionization Vacuum Sensor 2 1 3 5 6 7 8 9 10 11 12 13 14 15 4...

Страница 22: ...e Cable 2 ft 100002505 10 ft 100007873 25 ft 100007874 50 ft 100002395 Custom to 500 ft 100008759 Internal Rebuild Kit 100002353 Cathode Grid Washer Ground Shield Ceramic Spacers 1 Sm and 1 Lrg Spring...

Страница 23: ...paid or unpaid service is desired if the product is contaminated with potentially corrosive reactive harmful or radioactive materials gases or chemicals When products are used with toxic chemicals or...

Страница 24: ...18 18 Cold Cathode Ionization Vacuum Sensor NOTES...

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