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MKS HPS 919 Series, Руководство по эксплуатации и обслуживанию

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Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

Содержание HPS 919 Series

Страница 1: ...s underutilized and idle equipment along with credit for buybacks and trade ins Custom engineering so your equipment works exactly as you specify Critical and expedited services Leasing Rentals Demos...

Страница 2: ...HPS Products Series 919 Hot Cathode Ionization High Vacuum Sensor System OPERATION AND MAINTENANCE MANUAL Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Страница 3: ...Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Страница 4: ...High Vacuum Senor System HPS Products Series 919 Hot Cathode Ionization High Vacuum Sensor System May 1997 Part 109190098 Rev B1 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOU...

Страница 5: ...mber is located on the rear panel of the Controller 1997 by MKS Instruments HPS Division Inc All rights reserved Inconel is a registered trademark of Inco Alloys International Inc SensaVac is a tradem...

Страница 6: ...er 18 Sensor 20 Feature and Control Locations 21 Typical Applications for the Series 919 Hot Cathode System 23 About the HPS Products Series 919 Hot Cathode Ionization System 24 Installing and Setting...

Страница 7: ...aintaining the Series 919 Hot Cathode System 37 Cleaning the Controller Front Panel 37 Servicing the Controller 37 Replacing a Power Fuse 37 Testing the Sensor 38 Accessories 39 Product Warranty 40 Ap...

Страница 8: ...on High Vacuum Sensor System User s Manual The Series 919 System s Sensor and its connecting cable are sold separately Please refer to page 39 for necessary ordering information if you have not alread...

Страница 9: ...r the like which if not correctly performed or adhered to could result in injury to personnel This sign denotes a hazard It calls attention to an operating procedure practice or the like which if not...

Страница 10: ...non respect des consignes L indication signale un danger potentiel Elle est destin e attirer l attention sur une proc dure une utilisation une situation ou toute autre chose pr sentant un risque d en...

Страница 11: ...ung zu K rperverletzung f hren kann Das Symbol VORSICHT weist auf eine Gefahrenquelle hin Es macht auf einen Bedienungsablauf eineArbeitsweiseodereine sonstigeGegebenheitaufmerksam deren unsachgem eAu...

Страница 12: ...ervarse correctamente podr a causar lesiones a los empleados Esto s mbolo indica un riesgo Pone de relieve un procedimiento pr ctica etc de tipo operativo que de no realizarse u observarse correctamen...

Страница 13: ...rent IEC617 2 No 020206 Caution hot surface IEC 417 No 5041 On Power IEC 417 No 5007 Frame or Chassis IEC 417 No 5020 Direct and Alternating Current Both IEC 417 No 5033 a Caution refer to accompanyin...

Страница 14: ...tention surface br lante IEC 417 No 5041 Marche mise sous tension IEC 417 No 5007 Masse Ch ssis IEC 417 No 5020 Courant continu et alternatif IEC 417 No 5033 a Attention se reporter la documentation I...

Страница 15: ...IEC 617 2 Nr 020206 Vorsicht Hei e Fl che IEC 417 Nr 5041 Ein Netz IEC 417 Nr 5007 Rahmen oder Chassis IEC 417 Nr 5020 Wechselstrom und Gleichstrom IEC 417 Nr 5033 a Vorsicht Bitte Begleitdokumente l...

Страница 16: ...06 Precauci n Superficie caliente IEC 417 N 5041 Encendido alimentaci n el ctrica IEC 417 N 5007 Caja o chasis IEC 417 N 5020 Corriente continua y alterna IEC 417 N 5033 a Precauci n Consultar los doc...

Страница 17: ...connecting it to the product input or output terminals A protective ground connection by way of the grounding conductor in the power cord is essential for safe operation Upon loss of the protective g...

Страница 18: ...fied for such operation Service by qualified personnel only Operating personnel must not remove instrument covers Component replacement and internal adjustments must be made by qualified service perso...

Страница 19: ...n d alimentation est indispensable pour une utilisation sans danger de l appareil En cas de d faut de terre toutes les pi ces conductrices accessibles y compris les boutons de commande ou de r glage q...

Страница 20: ...isation D pannage effectu uniquement par un personnel qualifi L op rateur de l appareil ne doit pas enlever le capot de l appareil Le remplacement des composants et les r glages internes doivent tre e...

Страница 21: ...nzuschlie en bevor es an den Eingangs bzw Ausgangsklemmen des Produkts angeschlossen wird Das Instrument kann nur sicher betrieben werden wenn es ber den Erdleiter des Netzkabels und einen Schutzkonta...

Страница 22: ...einer Explosion vorzubeugen darf dieses Ger t nicht in der N he explosiver Stoffe eingesetzt werden sofern es nicht ausdr cklich f r diesen Zweck zertifiziert worden ist Wartung nur durch qualifiziert...

Страница 23: ...amente instalada antes de conectarlo a las terminales de entrada o salida del instrumento Para garantizar el uso sin riesgos del instrumento resulta esencial que se encuentre puesto a tierra por medio...

Страница 24: ...sivos Para evitar el riesgo de explosi n no usar este instrumento o en un entorno explosivo a no ser que haya sido certificado para tal uso Reparacionesefectuadas nicamenteport cnicos especializados L...

Страница 25: ...titude 2000 m 6562 ft max InsulationCoordination Installation Overvoltage Category II PollutionDegree2 Mains Voltage Fluctuations not to exceed 10 Number of Channels 1 ProcessControl Two nonvolatile i...

Страница 26: ...r 120 VAC T 0 63 A for 220 VAC T 0 50 A for 240 VAC all are 5 mm x 20 mm Display Green LED with 2 significant digits 1 leading and 1 digit signed exponent 7 segment digits 14 mm in height units shown...

Страница 27: ...als Exposed to Vacuum 304 SS Inconel X 750 glass tungsten platinum nickel either yttria coated iridium or tungsten OperatingTemperatureRange 0 to 50 C 32 to 122 F BakeoutTemperature 300 C max with CF...

Страница 28: ...Switch Display Push buttons Pressure Set Points Protection andSensitivity LED Digital Display ProtectionAdjustmentPotentiometer SensitivityAdjustmentPotentiometer Female 8 pin High Power D type Gauge...

Страница 29: ...em Sensor 16 Top View Side View 3 Filament 1 Filament 2 Grid and Supports Ion Collector Sensor Vacuum Port and Flange 18 16 17 2 18 18 19 19 20 20 116 17 19 Artisan Technology Group Quality Instrument...

Страница 30: ...ing a relay set point Sensing abnormal pressure and taking appropriate security measures using a relay set point Controlling system pressure using an automatic pressure control system Starting or stop...

Страница 31: ...em control remote enable for filament and degas and burnout protection for the filament The protectionfeature guards the Sensor sfilament against damage in case of overpressure or a short circuit The...

Страница 32: ...liquids from entering the Sensor Using a screen or porous filter at the port is helpful see Accessories p 39 Shield a Sensor located near an electron or ion source e g near an electron beam source or...

Страница 33: ...oose assure adequate ventilation to the Controller with at least 1 inch left open above the top perforatedpanel For bench top use adhesive backed rubber pads are provided Remove the adhesive backing f...

Страница 34: ...oller before plugging or unplugging a cable to the Sensor Connecting or disconnecting cables while the Controller is on may damage the Sensor The configuration of the cable pins is symmetrical as show...

Страница 35: ...or to other Controllerfunctions Connect the following pins 9 10 or 13 to a TTL low voltage or to ground to Pin 9 Disable all Controller functions Sensor voltage and set point relays Pin 10 Turn on th...

Страница 36: ...Controller detects LEC the monitor will be at a TTL high level The filament and degas power will automatically be disabled to protect the system LEC can indicate operation at too high of a pressure o...

Страница 37: ...r is connected to the analog output signal This signal has a range of 1 to 9 V 1 V per decade and is proportional to the logarithm of pressure It follows the voltage versus pressure curve shown on the...

Страница 38: ...relay contact at a particularpressure 1 Depress the set point push button SP1 or SP2 on the front panel See figure at left 2 Using a small screwdriver adjust the corresponding potentiometer until the...

Страница 39: ...e which automatically shuts off the filament The protection level can be set between 10 6 and 10 2 Torr To adjust the protection level to a particular pressure 1 Depress the Protect push button on the...

Страница 40: ...as specified by its manufacturer e g 9 0 x10 0 for the Series 919 Low PowerNudeSensor Sensor Sensitivity for Different Pressure Units Series 919 Controllers displaying units in Torr are shipped with t...

Страница 41: ...start degas the filament must be turned on again To control degas with an external device such as a computer or remote switch set the Degas switch to remote to transfer control to the Accessory connec...

Страница 42: ...s multiplied by the Sensor s nitrogen sensitivity The sensitivity range is between 4 and 50 Torr 1 Adjusting System Sensitivity for Another Gas To adjust the sensitivity control for direct pressure re...

Страница 43: ...yed Sensitivities Relative to Nitrogen Gas Symbol Sensitivity St Air 1 00 Argon Ar 1 29 CarbonDioxide CO2 1 42 Deuterium D2 0 35 Helium He 0 18 Hydrogen H2 0 46 Krypton Kr 1 94 Neon Ne 0 30 Nitrogen N...

Страница 44: ...e unit should be returned to HPS for repair Replacing a Power Fuse To change a Controller fuse 1 Unplug the power cord from the Controller 2 Insert a screwdriver blade under the tab to the left of the...

Страница 45: ...ch not on 1 Sensor cable not connected 2 Contaminated Sensor 3 Current leak across dirty insulators inside Sensor 1 Verify power source and plug it in to the correct one 2 Turn power on 3 Replace fuse...

Страница 46: ...0005980 KF 40 Y2 O3 coated Ir 100006841 2 CF Y2 O3 coated Ir 100006842 Mounting Hardware Kit Half rack 100005651 Nipple 2 CF with Screen 100883069 Power Cord 115 VAC 103150001 HPS Series 919 Hot Catho...

Страница 47: ...red if the product is contaminated with potentially corrosive reactive harmful or radioactive materials gases or chemicals When products are used with toxic chemicals or in an atmosphere that is dange...

Страница 48: ...ent Bayard Alpert sensors are available in tubed glass envelopes or mounted on elastomer or metal sealed flanges nude A glass envelope sensor tends to be favored because of its low cost and limited th...

Страница 49: ...42 Hot Cathode Ionization High Vacuum Senor System Notes Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Страница 50: ...sure is above 8 x 10 5 Torr In the pressure range of 8 x 10 5 to 1 x 10 4 Torr the emission is 100 mA or 1 mA dependent upon whether the pressure is increasing or decreasing respectively This prevents...

Страница 51: ...etting and the sensitivity setting dependent upon which front panel display switch is pushed Display The data bits from the A D converter go to an EPROM that controls the segment drivers for the LED d...

Страница 52: ...Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Страница 53: ...Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Страница 54: ...uipment Have surplus equipment taking up shelf space We ll give it a new home Learn more Visit us at artisantg com for more info on price quotes drivers technical specifications manuals and documentat...

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