MKS HPQ3, Руководство по оборудованию

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MKS Instruments UK Ltd
HPQ3 Hardware Manual – SP101019.101 October 2012
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3.5 Mounting the analyser
The standard 2 ¾ " Conflat® flange on the analyser can be sealed to the vacuum chamber with
either a copper gasket, or a Viton® gasket with a square cross section. Which one you choose
depends on the ultimate pressure you expect in your system and whether you intend to bake the
system.
If it is not already clean then clean the gasket with suitable solvent and dry it. Remove the analyser
from its shipping envelope, slip the gasket over the quadrupole structure and set it in the grooves
of the flange surface.
Carefully insert the analyser into the vacuum chamber ensuring that you do not allow the leads to
touch the walls of the vacuum chamber. Make sure the gasket does not slip part way out of its slot
as you push the two flanges together.
Rotate the flange until the locating key on the feedthrough housing tube is as close to 9 o'clock as
the bolt holes will allow. This will ensure that the HPQ3 is in its preferred position, although it can
be mounted in any orientation.
Bolt the feedthrough flange to the vacuum chamber flange using the torque appropriate for the
gasket material used.
Do not discard the plastic shipping envelope or the two-piece foam packing surrounding it.
If in the future you need to return the analyser for service, it should be returned in its original
packaging to avoid expensive damage.