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MKS Granville-Phillips 358 series Скачать руководство пользователя страница 33

Initial Setup

Series 358 Micro-Ion Controller Instruction Manual - 358013 - Rev. B

33

Sy
stem C

o

mponents

Ini

tial

Setup

Installation

Before You

Begin

Figure 3-7

Process Control Identification Windows

Developing a Logic
Diagram of Control Logic

Prior to connecting the process controls to the system, it is recommended
that the following steps be followed. If application assistance is desired,
contact an MKS, Granville-Phillips Division application engineer.

1.

Use the catalog number on the front of the process control module
together with Figure 3-8 and Figure 3-9 to identify the process control
capability installed in your unit.

2.

Even if the control logic is simple and obvious, we recommend that
you develop a logic diagram of the process control function.

3.

Prepare a specification table which lists the proposed pressure setting,
system measurement point, and relay status for each process control
channel.

4.

Draw a circuit schematic which specifies exactly how each piece of
system hardware will be connected to the process control relays.

Do not exceed the relay ratings:

Table 3-2

Relay Ratings

Parameter

Rating

Relay Configuration

SPDT (single pole, double throw)

Relay Contact Rating

5 A, 120 VAC; or 4A, 240 VAC; or 5A, 30 Vdc

Relay Contact Type

1 Form C type (gold plated for low level switching)

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Содержание Granville-Phillips 358 series

Страница 1: ...Series 358 Instruction manual part number 358013 Revision B November 2014 Granville Phillips Series 358 Micro Ion Vacuum Gauge Controller Instruction Manual...

Страница 2: ......

Страница 3: ...gistered trademarks of MKS Instruments Inc All other trademarks and registered trademarks are the properties of their respective owners For Customer Service or Technical Support 24 hours per day 7 day...

Страница 4: ...Half rack mount 358504 Black Case Left mount for 19 inch rack 358505 Interface options Slot X None 0 RS 232 A RS 485 422 B Gauge options Slot Y None 0 Dual Convectron 1 Capacitance Manometer Convectro...

Страница 5: ...ifications 20 2 5 Dimensions 23 2 6 Mounting Options 25 Chapter 3 Initial Setup 27 3 1 Controller Setup 27 3 2 Top Cover Removal 27 3 3 Pressure Units Setup 28 3 4 Changing Units of Measure for Electr...

Страница 6: ...eparing for Pressure Measurement 67 5 2 Alternate ON OFF Gauge Control 68 5 3 Micro Ion Gauge Remote Input Output 68 5 4 Micro Ion Analog Output Signal 69 5 5 Preparing for Convectron Gauge Operation...

Страница 7: ...tion 103 7 5 Process Control Theory of Operation 103 Chapter 8 Service 105 8 1 Service Guidelines 105 8 2 Customer service 106 8 3 Damage Requiring Service 106 8 4 Returning a Damaged Product 106 8 5...

Страница 8: ...Table of Contents 8 Series 358 Micro Ion Controller Instruction Manual 358013 Rev B...

Страница 9: ...ing Instructions You must comply with all instructions while you are installing operating or maintaining the module Failure to comply with the instructions violates standards of design manufacture and...

Страница 10: ...oduct 3 If the product has been exposed to rain or water 4 If the product does not operate normally even if you follow the operating instructions Adjust only those controls that are covered by the ope...

Страница 11: ...ration of Conformity inside envelope for CE tests performed 1 6 Warranty Information MKS Instruments Inc provides an eighteen 18 month warranty from the date of shipment for new Granville Phillips pro...

Страница 12: ...the U S Federal Communications Commission FCC Rules These limits are designed to provide reasonable protection against harmful interference when the equipment is operated in a commercial environment T...

Страница 13: ...Manometer Gauge simultaneously Pressure readout is via three front panel displays analog output and available computer interface The Series 358 Micro Ion Vacuum Measurement Controller is a modular ins...

Страница 14: ...7 1 Micro Ion display 6 Degas momentary ON OFF switch 2 Convectron Gauge A display 7 Degas LED 3 Convectron Gauge B or Capacitance Manometer display 8 Process control channel labels 4 Unit of measure...

Страница 15: ...B 5 Vacuum zero adjustment Convectron or Capacitance Manometer gauge B 6 Process control setpoint 3 position manual override switches Center relay is controlled automatically Left relay is deactivate...

Страница 16: ...B Figure 2 4 Controller Top View with Cover Removed 1 2 3 4 5 6 1 Power supply board 2 Process control setpoint option board 3 Convectron or Capacitance Manometer gauge option board 4 Electrometer bo...

Страница 17: ...rol Figure 2 5 Controller Rear Panel with RS 232 Option 1 12 2 3 5 4 8 9 7 10 11 13 6 1 Power switch 8 Micro Ion Gauge power connector 2 Power input connector 9 DB25S connector for RS 232 computer int...

Страница 18: ...asynchronous Data Rates 75 150 300 600 1200 2400 4800 9600 baud Character length 7 or 8 bit ASCII switch selectable Parity Odd even or none switch selectable Stop bits 1 or 2 8 character bits plus par...

Страница 19: ...Address dial 3 J 2 DE9P Connector for RS 485 422 computer interface 5 9 1 6 See Section 3 12 for connector pin assignments Table 2 2 RS 485 Specifications Item Specification Format Half duplex asynch...

Страница 20: ...ilament selection and degas Less than 0 4 Vdc 10 A for 25 msec minimum Must be greater than 3 5 Vdc for 105 msec minimum before next low state Micro Ion gauge status relay rated at 1 0 A 30 Vdc Enviro...

Страница 21: ...decades Micro Ion Gauge Sensitivity 3 Torr to 50 Torr factory setting is 20 Torr Emission Current 20 A 1 mA 4 mA Collector Potential 0 V Grid Potential 180 Vdc Filament Potential 30 Vdc Degas Electron...

Страница 22: ...ectable to 3 sec reading averaged Analog Output 0 7 Vdc logarithmic 1 V decade Ion Gauge Turn On Range Less than or equal to 100 mTorr 1 x 10 1 Torr Sensor Material Gold plated tungsten Mounting Orien...

Страница 23: ...250 mA and outputs 0 10 Vdc proportional to pressure Accuracy 0 01 of full scale as limited by display resolution Display Resolution Highest 3 decades 2 digits lowest decade 1 digit scientific notati...

Страница 24: ...o Ion gauge are shown in Figure 2 9 Dimensions are in cm in H dimensions are given in Table 2 4 Figure 2 9 Micro Ion Gauge with Connector The dimensions of the Convectron gauge are shown Figure 2 10 D...

Страница 25: ...50 and Figure 4 1 on page 52 Table 2 4 Fittings Fitting Description Dimension H Dimension J 0 75 inch port diameter 1 0 inch port diameter 15 mm port diameter 18 mm port diameter 9 4 cm 3 7 in 9 4 cm...

Страница 26: ...Chapter 2 26 Series 358 Micro Ion Controller Instruction Manual 358013 Rev B...

Страница 27: ...want to change the units of measure the display rate or the degas timer you must remove the top cover of the Controller 3 2 Top Cover Removal 1 With power OFF remove any cables from Controller rear p...

Страница 28: ...ing the Micro Ion gauge tube sensitivity to the appropriate units For example a tube has a sensitivity of 20 Torr or 15 mbar Thus for this tube adjusting the sensitivity for a display reading of 2 0 1...

Страница 29: ...described in Changing Units of Measure for Convectron Gauge on page 30 6 To change the units of measure label on the front of the Controller open the door and lift the label card from its slot in the...

Страница 30: ...358 Controller is shipped from the factory preset to display the units of measure Torr mbar or pascal that you requested To change the units of measure for the Convectron Gauge 1 Turn OFF power to th...

Страница 31: ...or a Capacitance Manometer The Series 358 Controller is shipped from the factory preset to display the units of measure Torr mbar or pascal that you requested If you want to change units proceed as fo...

Страница 32: ...er by digital setpoints or by the built in manual override switches Process Control Channel Identification Windows A channel identification label is included in the accessory kit to enable you to cust...

Страница 33: ...nd Figure 3 9 to identify the process control capability installed in your unit 2 Even if the control logic is simple and obvious we recommend that you develop a logic diagram of the process control f...

Страница 34: ...quired process control connections may be made later See Connecting Process Control Relays on page 63 7 If application assistance is desired contact an MKS Granville Phillips Division application engi...

Страница 35: ...arity settings The switches are factory preset as shown below for relay activation below the pressure setpoint This is most commonly desired when you want the relay to be de energized under a high pre...

Страница 36: ...he pressure indication differs from the setpoint value by one display unit A 10 hysteresis is automatically programmed into each setpoint for returning pressures Table 3 4 exemplifies this using a set...

Страница 37: ...ule on page 39 A variety of baud rates and byte framing options are available as well as switches to force the handshake lines to an always true condition Controller RS 232 factory defaults are 9600 B...

Страница 38: ...ents Signal Pin Number Direction Protective Ground 1 Transmitted Data 2 To computer Received Data 3 To controller Request to Send RTS 4 To controller Clear to Send CTS 5 To controller Data Set Ready D...

Страница 39: ...Baud Rate for RS 232 Module Dip switches 6 8 are used to control the baud rate The settings are listed in Table 3 6 Figure 3 12 RS 232 Module Top View Table 3 6 RS 232 Baud Rates S6 S7 S8 Baud Rate O...

Страница 40: ...displays will be output in a single message string separated by commas approximately every 5 seconds Table 3 7 RS 232 Character Framing S3 S4 S5 Character Bits Parity Stop Bits On factory setting On...

Страница 41: ...equence See Connecting the RS 232 Computer Interface Handshake Lines on page 65 for more details When the controller receives a start bit on the received data line it will input and buffer a character...

Страница 42: ...signal from the host computer going into one connector then out the other to another gauge Controller and so on The maximum total cable length is 4 000 ft No more than 32 devices can be connected to o...

Страница 43: ...Instruction Manual 358013 Rev B 43 System Components Initial Setup Installation Before You Begin Figure 3 13 RS 485 Bias Resistors Figure 3 14 RS 485 Wiring Connector Table 3 11 RS 485 Connector Pins...

Страница 44: ...tions are wrong The timing of the data transfer is shown in Figure 3 15 Figure 3 15 RS 485 Data Timing RS 485 Address The address switch on the RS 485 module on the back of the Controller see Figure 3...

Страница 45: ...3 16 RS 485 Module Top View To prevent data contentions no two of the controller modules should be set with the same address It is not recommended that address 00 be used because some manufacturers us...

Страница 46: ...e 3 16 on page 45 enables a delay in the response from the module of 13 MS 10 bits when OFF When S2 1 is ON the delay is 700 S Default is ON Table 3 13 RS 485 Baud Rates S2 6 S2 7 S2 8 Baud Rate On On...

Страница 47: ...gin 3 14 Replacing the Controller Cover Assuming you have completed the above instructions the Controller setup is now complete Replace the top cover Make sure the door hinge pin is seated correctly R...

Страница 48: ...Chapter 3 48 Series 358 Micro Ion Controller Instruction Manual 358013 Rev B...

Страница 49: ...ow temperature rated materials such as plastic wire insulation from touching hot parts of the gauge 4 2 FCC and EU Installation Requirements To maintain compliance with FCC Part 15 rules and European...

Страница 50: ...to installation category overvoltage category II Pollution degree 2 in accordance with IEC664 4 5 Controller Installation The controller is designed to operate a Series 355 Micro Ion Gauge This is an...

Страница 51: ...Phillips Division Customer Service Representative for specail mounting configurations See page 4 of this instruction manual for more information and catalog numbers The controller should be mounted i...

Страница 52: ...Chapter 4 52 Series 358 Micro Ion Controller Instruction Manual 358013 Rev B Figure 4 1 Controller Mounting Configurations...

Страница 53: ...tion The following information pertains to the the proper installation of a Micro Ion Gauge a Convectron Gauge and a capacitance manometer gauge The gauges are illustrated in Figure 2 1 on page 13 and...

Страница 54: ...NPT female fitting Wrap the threads of the gauge port with Teflon tape and hand tighten Do not use a wrench or tool Tighten only sufficiently to achieve a seal VCR VCO Mount Remove the plastic or met...

Страница 55: ...t be shielded to positively prevent human contact The gauge envelope may be grounded byusing a metal hose clamp on the gauge connected by a 12 awg copper wire to the grounded vacuum chamber See Figure...

Страница 56: ...eplace the metal tubing with plastic tubing thus unwittingly causing a potentially dangerous situation 2 Provide a connection to ground for other instruments with electrodes in the vacuum system possi...

Страница 57: ...power supply chassis 2 If no voltages exist measure resistance The resistance should not exceed 2 Two ohms or less implies commonality of these grounds that should prevent the plasma from creating a d...

Страница 58: ...nts could flow through it Figure 4 3 System Grounding 358 Vacuum Gauge Controller Do NOT Make a Direct Chassis to Vacuum System Power Distribution Breaker Box NOTE Other Power Leads Are Not Shown Inst...

Страница 59: ...tages proportional to the logarithm of the Convectron gauge display indications are provided on the back of the Convectron gauge module via a standard 1 8 miniature phono jack See Figure 4 4 Two matin...

Страница 60: ...a a standard 1 8 in miniature phone jack the Analog Output B port shown in Figure 4 4 Two mating connectors are supplied with this capability The wires provided for the capacitance manometer are termi...

Страница 61: ...et potentiometer Figure 4 5 to set the analog output B at Base pressure The output can be adjusted between 0 2 and 0 2 volts at Base pressure for the capacitance manometer Figure 4 7 Analog Output Con...

Страница 62: ...the full scale adjust potentiometer so the Controller display corresponds to the pressure of the manometer at or near the maximum pressure This reference pressure may be determined by a certified sta...

Страница 63: ...hannels Figure 4 8 Process Control Output Connector Table 4 3 Process Control Output Connector Pin Assignments Process Control Channel Micro Ion Gauge Convectron Gauge A Convectron Gauge B 1 2 3 4 5 6...

Страница 64: ...3 Connect the component end of the cable to the system component to be controlled 4 Plug the connector into the back of the Controller 5 Refer to Preparing for Process Control Operation on page 85 fo...

Страница 65: ...ler will continue to receive and buffer characters until the terminator LF is received Upon receiving the terminator the controller will assert the RTS line as a holdoff to prevent the host computer f...

Страница 66: ...gated after transmitting the terminator of the controller s response to that message Reversing RTS Polarity If switch 2 is open on power up the controller will apply the opposite polarity to RTS from...

Страница 67: ...1 for using Convectron gauges and you are reasonably familiar with the general theory of operation of hot cathode Micro Ion gauges and thermal conductivity gauges 1 Turn ON the controller by pressing...

Страница 68: ...68 In addition the Micro Ion Gauge will be automatically turned OFF by excessive pressure Figure 5 2 Micro Ion Gauge Momentary ON OFF Switch 5 3 Micro Ion Gauge Remote Input Output Two TTL compatible...

Страница 69: ...f the Micro Ion pressure indication is provided on the back of the electrometer module via a standard 1 8 in miniature phono jack Figure 5 4 Electrometer Analog Output Jack 5 9 1 6 See Figure 2 5 Item...

Страница 70: ...indication Pi 10V 11 Torr or mbar Pi 10V 9 pascal When Degassing Pressure indication Pi 10 V 13 92 Torr or mbar Pi 10 V 11 92 pascal When the gauge is OFF V 11 volts This signal voltage is determined...

Страница 71: ...ce gas pressure by measuring the heat loss from a heated sensor wire maintained at constant temperature For different gases the heat loss is different at any given true pressure and thus the pressure...

Страница 72: ...e other data Never use conversion curves for the Convectron Gauge with gauges of other manufacturers Their geometry is very likely different and dangerously high pressures may be produced even at rela...

Страница 73: ...ar the second and third lines of the display indicating the gas type or types used for calibration to prevent mix ups Indicated to true pressure conversion Assume you want to determine the true pressu...

Страница 74: ...Chapter 5 74 Series 358 Micro Ion Controller Instruction Manual 358013 Rev B Figure 5 6 True Pressure versus Indicated Pressure for Commonly used Gases 10 4 to 10 1 Torr...

Страница 75: ...Series 358 Micro Ion Controller Instruction Manual 358013 Rev B 75 Operation Capacitance Manometer Service Preparing for Operation Figure 5 7 True Pressure versus Indicated Pressure for Commonly used...

Страница 76: ...Chapter 5 76 Series 358 Micro Ion Controller Instruction Manual 358013 Rev B Figure 5 8 True Pressure versus Indicated Pressure for Commonly used Gases 10 1 to 1000 Torr...

Страница 77: ...Series 358 Micro Ion Controller Instruction Manual 358013 Rev B 77 Operation Capacitance Manometer Service Preparing for Operation Figure 5 9 True Pressure versus Indicated Pressure for Commonly used...

Страница 78: ...Chapter 5 78 Series 358 Micro Ion Controller Instruction Manual 358013 Rev B Figure 5 10 True Pressure versus Indicated Pressure for Commonly used Gases 10 1 to 1000 mbar...

Страница 79: ...s 358 Micro Ion Controller Instruction Manual 358013 Rev B 79 Operation Capacitance Manometer Service Preparing for Operation Figure 5 11 True pressTrue Pressure versus Indicated Pressure for Commonly...

Страница 80: ...low the setpoint the auto on function will not turn it back ON until the Convectron Gauge pressure has risen above the setpoint and then dropped below it again 5 8 Filament Auto ON 1 Place the IG Auto...

Страница 81: ...stalled with the gauge axis horizontal 1 Evacuate Convectron gauge A to a pressure known to be less than 1 x 10 4 Torr 2 With power ON and at vacuum less than 1 x 10 4 Torr for at least 15 minutes adj...

Страница 82: ...gnal proportional to the common logarithm of the pressure indication is provided on the rear panel of the Convectron gauge module via a standard 1 8 in miniature phono jack See Figure 5 13 If graphed...

Страница 83: ...offset has been adjusted to other than 0V at 10 4 Torr 10 2 pascal then the exponent value must be forced to 4 2 for Pa when the pressure is at 1 0 x 10 4 Torr 1 x 10 2 pascal by adding or subtracting...

Страница 84: ...for additional information regarding intial installation and setup and adjustments of the capacitance manometer module Figure 5 15 Convectron Capacitance Manometer Module Panel Use the IG AUTO potenti...

Страница 85: ...initial installation see your transducer documentation Connect the cable from the 358 Controller to the capacitance manometer transducer 2 Evacuate your system to one decade below the minimum rated p...

Страница 86: ...sed Manual Override The 3 position switches on the front of the process control module allow override of the programmed setpoints at any time When moved to the right the relay is activated When moved...

Страница 87: ...protocol used is in accord with that established via the switch configuration you have chosen for the controller RS 232 module Communication with the controller VGC is via ASCII strings A message to t...

Страница 88: ...Torr Use the DGS command see below to verify that degas has been successfully initiated DGS Definition Display degas status Modifiers None Response ASCII 1 if degas is ON 0 if degas is OFF Example Fro...

Страница 89: ...he tube is OFF or in its first few seconds of operation after being turned ON a pressure of 9 99E 9 will be returned IG2 Identical to IG1 performs the same functions as IG1 PCS Definition Display proc...

Страница 90: ...at established via the switch configuration you have chosen for the RS 485 module Communication is via ASCII strings A message to consists of a start character an address a command and a command modif...

Страница 91: ...0 5 Torr Use the DGS command see below to verify that degas has been successfully initiated DGS Definition Display degas status Modifiers None Response ASCII 1 if degas is ON 0 if degas is OFF Example...

Страница 92: ...cted To verify that the Ion gauge is ON use the DS IG1 command If the tube is OFF or in its first few seconds of operation after being turned ON a pressure of 9 90E 9 will be returned IG2 Identical to...

Страница 93: ...pattern 01000111 and represents the status of the PC channels From computer AAPCS CR From controller 1 1 1 0 0 0CR 5 16 RS 485 Error Messages If an error is found in the incoming message the following...

Страница 94: ...Chapter 5 94 Series 358 Micro Ion Controller Instruction Manual 358013 Rev B...

Страница 95: ...Convectron Gauge electrometer capacitance manometer and process control modules see Chapter 7 6 1 Controller Operation Turning the Controller ON 1 Press the top half of the power ON switch on the rea...

Страница 96: ...must be ON and the pressure within the Micro Ion Gauge must be below 5 x 10 5 Torr depress the DEGAS momentary rocker switch on the Controller 6 When the filament is nearing the end of its useful life...

Страница 97: ...OFF The EB electron bombardment degas may be turned ON or OFF by the front panel DEGAS momentary rocker switch see Figure 6 2 or the remote input To turn degas ON press the DEGAS momentary rocker swit...

Страница 98: ...r from those of the ion gauge since ion gauges usually lose sensitivity near their upper pressure limits 6 5 Gauge Electrometer Operation Figure 6 3 Electrometer Module Front Panel Displaying Sensitiv...

Страница 99: ...e approximate range of the adjustment is 3 to 50 Torr Relative Gas Sensitivities Sensitivity depends on the gas being measured as well as the type of Micro Ion Gauge tube Table 6 2 on page 99 lists th...

Страница 100: ...ule The Filament Select switch see Figure 6 4 is used to operate each filament individually or both in series Normally only one filament should be selected During degas selecting the BOTH position wil...

Страница 101: ...collides with a gas molecule an electron may be dislodged from the molecule leaving it with a positive charge Most ions are then accelerated to the collector The rate at which electron collisions wit...

Страница 102: ...nd a voltage is developed across the null terminals The bridge control circuit senses the null voltage and decreases the voltage across the bridge until the null voltage is again zero When the bridge...

Страница 103: ...ectrically measured capacitance is a measure of pressure The device is very sensitive to the elastic properties of the metal of the diaphragm For this reason large pressure excursions such as occur wh...

Страница 104: ...104 Series 358 Micro Ion Controller Instruction Manual 358013 Rev B...

Страница 105: ...e Phillips be sure to package the products to prevent shipping damage Circuit boards and modules separated from the gauge assembly must be handled using proper anti static protection methods and must...

Страница 106: ...Adjust only those controls that are covered in the instruction manual Improper adjustment of other controls may result in damage and require extensive work by a qualified technician to restore the pr...

Страница 107: ...o Ion Gauge Damaged or contaminated cathode coating will not sustain emission Short in Micro Ion Gauge cable Short between Micro Ion Gauge electrodes Open cathode in Micro Ion Gauge Micro Ion gauge di...

Страница 108: ...cable Excessive electrical noise source causing offset Interference from other charged particle source in chamber Faulty electrometer Green 18 LED out on control board 18 V supply to relays faulty Gr...

Страница 109: ...recommend that you do not change the factory settings the overpressure shutdown can be readjusted for specific applications according to the following procedure To adjust the overpressure shutoff poin...

Страница 110: ...bleshooting See Figure 5 13 on page 82 Symptom Possible Cause Pressure reading grossly in error Controller out of calibration Unknown gas type Gauge not mounted horizontally see Figure 4 2 on page 55...

Страница 111: ...with the main body horizontal and the port projecting upward at an angle of 45degrees Slowly fill it with solvent using a standard wash bottle with the spout inserted in the port to where it touches...

Страница 112: ...system a setpoint becomes corrupted this method will trap the error If a setpoint is found to contain garbled data which cannot be interpreted as a valid setpoint the setpoint presure will be set to...

Страница 113: ...on page 38 Note that the received and transmitted data lines are defined as seen by the controller Many companies supply null modems or switch boxes for the purpose of reconfiguring the control and co...

Страница 114: ...ler reset LED CR1 is illuminated or flashing Microcontroller failure No response or garbled output Baud rate incorrect Character length incorrect or stop bit s incorrect Bad cable Responds intermitten...

Страница 115: ...rinted circuit boards Do not operate the Controller with MOS devices removed from the printed circuit boards 4 See Top Cover Removal on page 27 for instructions to remove the top cover 5 Locate the co...

Страница 116: ...Chapter 8 116 Series 358 Micro Ion Controller Instruction Manual 358013 Rev B...

Страница 117: ...ng configurations 51 operation 95 options 21 removing top cover 27 replacing top cover 47 setup 27 specifications 20 Convectron gauge analog output 1 82 installation 53 mounting options 54 preparing f...

Страница 118: ...filament selection 100 Micro Ion gauge 98 theory 101 Overpressure shutdown 30 P Preparing for operation 81 Convectron gauge 71 Micro Ion gauge alternate ON OFF 68 Micro Ion gauge analog output 69 pres...

Страница 119: ...ontrol 32 relay polarity 35 removing top cover 27 replacing controller top cover 47 RS 232 protocol 37 RS 485 protocol 42 Specifications capacitance manometer 23 controller 20 controller options 21 Co...

Страница 120: ...120 Series 358 Micro Ion Controller Instruction Manual 358013 Rev B...

Страница 121: ......

Страница 122: ...ort 24 hours per day 7 days per week every day of the year including holidays Phone 1 800 227 8766 or 1 303 652 4691 MKS Granville Phillips Division 6450 Dry Creek Parkway Longmont CO 80503 USA Phone...

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