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System Components
Series 358 Micro-Ion Controller Instruction Manual - 358013 - Rev. B
15
Sy
stem C
o
mponents
Ini
tial
Setup
Installation
Before You
Begin
Figure 2-3
Controller Front Panel with Door Open
13
10
9
8
4 5
2
7
14
11
12
3
1
6
1.
Filament select switch: filament 1, filament 2, or both
2.
Pressure range selector
3.
Sensitivity adjustment
4.
Atmosphere adjustment, Convectron or Capacitance Manometer gauge B
5.
Vacuum zero adjustment, Convectron or Capacitance Manometer gauge B
6.
Process control setpoint 3-position manual override switches.
Center = relay is controlled automatically.
Left =
relay is deactivated.
Right =
relay is activated.
7.
Process control channel indicator
8.
Process control channel selector thumbwheel
9.
“Down” process control setpoint pressure set pushbutton
10. “Up” process control setpoint pressure set pushbutton
11. Vacuum zero adjustment, Convectron gauge A
12. Atmosphere adjustment, Convectron gauge A
13. Micro-Ion gauge auto ON switch (via Convectron gauge)
14. Calibration / sensitivity ON switch
Содержание Granville-Phillips 358 series
Страница 2: ......
Страница 8: ...Table of Contents 8 Series 358 Micro Ion Controller Instruction Manual 358013 Rev B...
Страница 26: ...Chapter 2 26 Series 358 Micro Ion Controller Instruction Manual 358013 Rev B...
Страница 48: ...Chapter 3 48 Series 358 Micro Ion Controller Instruction Manual 358013 Rev B...
Страница 94: ...Chapter 5 94 Series 358 Micro Ion Controller Instruction Manual 358013 Rev B...
Страница 104: ...104 Series 358 Micro Ion Controller Instruction Manual 358013 Rev B...
Страница 116: ...Chapter 8 116 Series 358 Micro Ion Controller Instruction Manual 358013 Rev B...
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