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MKS e-Vision Скачать руководство пользователя страница 2

e-Vision and e- LP101013.100 – 01 January 2004

MKS Instruments, Spectra Products

2

As part of our continuous product improvement policy, we are always pleased to
receive your comments and suggestions about how we should develop our product
range. We believe that the manual is an important part of the product and would
welcome your feedback, particularly relating to any omissions or inaccuracies you
may discover.

You can send your comments to:-

MKS Instruments Spectra Products

Cowley

Way

Weston

Road

Crewe
Cheshire
CW1

6AG

U.K.

+44 (0)1270 250150 Tel. International

+44 (0)1270 251939 Fax. International

Email:

[email protected]

e-Vision®, e-® and EasyView are registered trademarks of MKS Instruments,

Spectra Products.

Conflat® is a registered trademark of Varian Associates.

Viton® is a registered trademark of E.I. Dupont de Nemours & Co., Inc.

Windows® is a trademark of the Microsoft Corporation.

All other brand or product names are trademarks or registered trademarks of their

respective companies and as such are fully recognised

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Содержание e-Vision

Страница 1: ...e Vision e Vision User Manual LP101013 100 01 January 2004...

Страница 2: ...You can send your comments to MKS Instruments Spectra Products Cowley Way Weston Road Crewe Cheshire CW1 6AG U K 44 0 1270 250150 Tel International 44 0 1270 251939 Fax International Email manual_inf...

Страница 3: ...PLUS LM77 VISION 1000P LM79 VISION 1000I LM89 VISION 1000B LM90 VISION 1000 C E LM78 VAC CHECK LM80 MINILAB LM98 e Vision LM102 e Vision ARE IN CONFORMITY WITH THE FOLLOWING EUROPEAN DIRECTIVES 89 336...

Страница 4: ...e Vision and e Vision LP101013 100 01 January 2004 MKS Instruments Spectra Products 4 Warning The control unit must not be powered up when not connected to the analyser...

Страница 5: ...es are required to obtain a greater separation between control unit and RF head or if longer serial communications cables are required they must be supplied by MKS Instruments Ltd 5 Cables attached to...

Страница 6: ...st be returned to MKS Instruments Spectra Products Ltd unless special arrangements are made 3 There are no user serviceable parts in the electronic equipment Certain components are EMC and safety crit...

Страница 7: ...14 3 1 The rear panel 14 3 2 Power connector 14 3 3 Power indicator 15 3 4 Ethernet connector 15 3 5 External trip 15 3 6 Reset switch 16 3 7 Mode switch 16 4 Analyser Installation 17 4 1 Unpacking 17...

Страница 8: ...ng new filaments 28 7 5 Ion Source cleaning 29 7 6 Cleaning or replacing the ion source 30 7 6 1 Removing the ion source 31 7 6 2 Dismantling the source assembly 31 7 6 3 Source Re assembly 32 8 Explo...

Страница 9: ...e Vision and e Vision LP101013 100 01 January 2004 MKS Instruments Spectra Products 9...

Страница 10: ...ngle mass filter 1 100amu Faraday detector Max Operating pressure 5x10 4 Torr 6 5x10 4 mbar e Vision 4 inch single mass filter 1 100amu 1 200amu Faraday and SEM detector Max Operating pressure 7 6x10...

Страница 11: ...r equipment which has no accessible hazardous live parts The external circuits must comply with the requirements of EN61010 1 section 6 6 1 Ports for connection of accessories do not carry hazardous p...

Страница 12: ...MKS Spectra accessories via MKS Spectra supplied cables There are no accessible hazardous voltages or currents on these ports MKS Spectra must be consulted before any non MKS Spectra supplied cables...

Страница 13: ...quadrupole analyser The e Vision is designed to be operated in several ways From a host computer which will normally be an IBM compatible PC running the MKS Spectra EasyView Windows software package...

Страница 14: ...Power connector This 15 way D Type socket labeled POWER on the rear panel of the unit is used to connect the low voltage power supply unit The pin connections are as follows 1 2 3 joined together 24 v...

Страница 15: ...eled X TRIP The external trip feature is used to protect the filaments and electron multiplier from exposure to high pressures It allows an independent total pressure gauge or signal from a vacuum con...

Страница 16: ...y 2004 MKS Instruments Spectra Products 16 3 6 Reset switch If a problem occurs or during specific operations such as a software download it may be necessary to reset the e Vision electronics 3 7 Mode...

Страница 17: ...e are items listed on the packing slip as shipped which are not in the box immediately contact your local MKS Spectra sales service representative 4 2 Inspecting the analyser CAUTION The analyser is b...

Страница 18: ...ber If your chamber does not meet the above criteria you should use a specially designed adapter so that the analyser may be mounted outside the chamber Please contact your local MKS Spectra represent...

Страница 19: ...ce Carefully insert the analyser into the vacuum chamber ensuring that you do not allow the leads to touch the walls of the vacuum chamber Make sure the gasket does not slip part way out of its slot a...

Страница 20: ...ily damaged DO NOT force the e Vision unit on to the analyser When all of the pins are engaged push the e Vision firmly onto the analyser to ensure electrical continuity The last 3mm 1 8 is important...

Страница 21: ...e e Vision is 192 168 0 250 Details on how to change this IP address can be found in the manual supplied with your RGA operating software 5 4 Re setting the IP address To re set the unit back to its d...

Страница 22: ...be taken to avoid exposing the ceramic feedthrough to sudden changes in temperature CAUTION The Electron Multiplier SEM MUST NOT be operated at temperatures above 50o C With dual faraday and electron...

Страница 23: ...e to the collector 3 The detector This area of your quadrupole analyser is hidden inside the flanged housing Its function is simply to convert the filtered ion beam presented by the quadrupole filter...

Страница 24: ...but would require from time to time the cleaning of the surrounding source plates and ceramics and the replacement of the filaments The second effect is similar to the first except that the vacuum un...

Страница 25: ...serious problem or more likely a faulty meter meter leads If after checking your meter an open circuit still exists contact your nearest MKS Spectra service center for advice 3 Move the lead from the...

Страница 26: ...t is increased until the value of emission current is reached If however the control electronics reaches the limit of its filament current supply capability and the emission current has still not reac...

Страница 27: ...pliers pair of clean cotton gloves clean bench on which to work Ohmmeter clean container in which to put small parts replacement filament a method of holding the analyser securely in an upright positi...

Страница 28: ...y the reversal of the procedure for removing them Care should be taken at all stages to ensure that no shorts are introduced and that the analyser is kept clean 1 Place and align the new Filament Scre...

Страница 29: ...olding the analyser securely in an upright position a small bench vice is ideal Remove the analyser from the vacuum chamber and place it on the bench in an upright position the use of a small bench vi...

Страница 30: ...urce automatically aligns on the main analyser assembly allowing easy replacement without the need for special jigs Below is a list of the tools and equipment you will require We recommend that you as...

Страница 31: ...tion please ensure that you have the correct Source Alignment Jig and spare ceramics and screws available Refer to the exploded views of the Source Assembly shown on Page 34 1 Carefully unscrew the fo...

Страница 32: ...e repeller plate so the circular cutouts align with the two visible barrel connectors and slide it down the wires over the ceramic tubes and onto the ceramic washers 7 Place one ceramic washer over ea...

Страница 33: ...roducts 33 8 Exploded Views 8 1 Analyser Flange pin outs Pin Descriptions Pin Connection 1 Earth 2 Source plate 3 Electron Multiplier 4 Filament 1 5 Extraction plate 6 Suppressor plate 7 RF 1 8 Repell...

Страница 34: ...anuary 2004 MKS Instruments Spectra Products 34 8 2 Exploded view of the Analyser Item Description Dimensions in mm Part Number 1 Source Assembly Tungsten Fils 842 021 1 Source Assembly Thoria Fils 84...

Страница 35: ...8 3 Filament Plate Item Description Dimensions in mm Part Number 1 Screw M1 6 x 3 3 off 200901603 2 Barrel Connector 305040214 3 Screw M2 x 4 200902004 4 Filament Plate Tungsten Fils LM508 015PL 4 Fi...

Страница 36: ...4 Source Assembly Item Description Dimensions in mm Part Number 1 Plain washer SS M1 6 27031600 2 Screw M1 6 x 8 200901608 3 Ceramic Tube 2 8D x 3 5L 400020035 4 Ceramic Washer 4 7D x 1L 400010203 5...

Страница 37: ...the orientation of the source assembly when inserted into the jig Align the extract plate s barrel connector with the alignment indicator on the jig Remove the source by pushing it out from the botto...

Страница 38: ...38 8 5 Extract Plate Item Description Dimensions in mm Part Number 1 Plain washer SS M1 6 27031600 2 Screw M1 6 x 6 200901606 3 Ceramic Tube 2 8D x 2L 400020020 4 Ceramic Washer 4 7D x 1L 400010203 5...

Страница 39: ...numbers date of purchase and a detailed fault description Fill in the relevant sections of the Health and Safety Returns Form on pages 32 and 33 of this manual or we can provide you with a copy This...

Страница 40: ...formation before we receive the equipment A copy should also be given to the carrier FAILURE TO COMPLETE THIS FORM OR COMPLY WITH THE PROCEDURE WILL LEAD TO DELAYS IN SERVICING THE EQUIPMENT Please Co...

Страница 41: ...ing these substances Action to be taken in the event of human contact or spillage I hereby confirm that the only toxic or hazardous substances that the equipment specified above has been in contact wi...

Страница 42: ...s When these files are launched the following dialog is displayed providing instructions on how to configure the e Vision unit for file transfer It is important you follow these instructions exactly W...

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