e-Vision and e- LP101013.100 – 01 January 2004
MKS Instruments, Spectra Products
18
4.3 Installing the analyser
The vacuum chamber in which you intend to mount the analyser must have a 2.75
inch UHV Conflat® flange fitted with a tube of 35.0mm (1.378 ") minimum ID,
inclusive of a good welded joint.
The distance from the end of the analyser to its mounting flange depends on the
type of system. Refer to the table below:
System Type
Length
e-Vision
e-
81mm (3 ¼”)
146mm (5 ¾ ”)
There must be at least the distance given above free of obstructions inside the
vacuum chamber. If your chamber does not meet the above criteria, you should
use a specially designed adapter so that the analyser may be mounted outside the
chamber. Please contact your local MKS Spectra representative for assistance.
4.4 Checking the system pressure
Quadrupole analysers cannot be operated at pressures higher than 5 x 10
-4
Torr
and in the case of dual detector analysers (faraday and electron multiplier
detectors), the multiplier should not be used at pressures above 7.6 x 10
-6
Torr.
Operation above these limits will cause irreversible damage to the filaments and
possibly the ion source.
Permanent damage to the multiplier will be caused if it is used outside the above
ranges.
Make use of the X-Trip interlock to prevent accidental damage to the analyser.