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List of Figures and Tables

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Содержание Baratron 722C

Страница 1: ...20054397 001 Rev A 11 21 MKS Baratron Type 722C Absolute Pressure Transducer...

Страница 2: ...be expressly permitted in writing by MKS Instruments Inc mksinstTM is a trademark and Baratron is a registered trademark of MKS Instruments Inc Andover MA USA VCR and VCO are registered trademarks of...

Страница 3: ...ur de pression 17 Symboles utilis s dans ce manuel d utilisation 17 Symboles apparaissant sur l unit 18 Mesures de s curit et pr cautions 19 Medidas de seguridad del transductor de presi n 21 S mbolos...

Страница 4: ...ent 57 Chapter Three Overview 59 General Information 59 Sensor 59 Signal Conditioning Electronics 60 Label 60 Chapter Four Operation 61 General 61 Lowest Suggested Pressure Available for Reading 61 Lo...

Страница 5: ...Table of Contents v Index 71...

Страница 6: ......

Страница 7: ...Block Example 1 55 Figure 9 How To Connect the Cable to a Terminal Block Example 2 55 Figure 10 Product Label 60 Tables Table 1 Definition of Symbols Found on the Unit 10 Tabelle 2 Bedeutung der am Ge...

Страница 8: ...List of Figures and Tables viii...

Страница 9: ...a procedure practice condition or the like which if not correctly performed or adhered to could result in injury to personnel Caution The CAUTION sign denotes a hazard to equipment It calls attention...

Страница 10: ...20206 Caution refer to accompanying documents ISO 3864 No B 3 1 Caution risk of electric shock ISO 3864 No B 3 6 Caution hot surface IEC 417 No 5041 Table 1 Definition of Symbols Found on the Unit O n...

Страница 11: ...SE CAUTION WHEN OPERATING WITH HAZARDOUS MATERIALS If hazardous materials are used users must take responsibility to observe the proper safety precautions completely purge the instrument when necessar...

Страница 12: ...to prevent system explosion should the system pressure rise KEEP THE UNIT FREE OF CONTAMINANTS Do not allow contaminants to enter the unit before or during use Contamination such as dust dirt lint gla...

Страница 13: ...ustand oder eine sonstige Gegebenheit aufmerksam deren unsachgem e Ausf hrung bzw ungen gende Ber cksichtigung zu Verletzungen f hren kann Vorsicht Das Symbol VORSICHT weist auf eine Gefahr f r das Ge...

Страница 14: ...ranschlu IEC 417 No 5019 Masseanschlu IEC 417 No 5020 Aquipotential anschlu IEC 417 No 5021 Gleichstrom IEC 417 No 5031 Wechselstrom IEC 417 No 5032 Gleich oder Wechselstrom IEC 417 No 5033 a Durchg n...

Страница 15: ...ung nur durch qualifizierte Fachleute Das Auswechseln von Komponenten und das Vornehmen von internen Einstellungen darf nur von qualifizierten Fachleuten durchgef hrt werden niemals vom Bedienpersonal...

Страница 16: ...eeignete Berstscheibe installieren Wenn mit einer unter Druck stehenden Gasquelle gearbeitet wird sollte eine geeignete Berstscheibe in das Vakuumsystem installiert werden um eine Explosionsgefahr auf...

Страница 17: ...ition ou toute autre situation pr sentant un risque d accident pour le personnel en cas d ex cution incorrecte ou de non respect des consignes Attention L indication ATTENTION signale un danger pour l...

Страница 18: ...masse IEC 417 No 5017 Terre de protection masse IEC 417 No 5019 Masse IEC 417 No 5020 Equipotentialit IEC 417 No 5021 Courant continu IEC 417 No 5031 Courant alternatif IEC 417 No 5032 Courant continu...

Страница 19: ...age doit tre uniquement effectu par du personnel qualifi PR CAUTION EN CAS D UTILISATION AVEC DES PRODUITS DANGEREUX Si des produits dangereux sont utilis s l utilisateur est responsable de la prise d...

Страница 20: ...r un disque d chappement adapt dans le syst me vide afin d viter une explosion du syst me en cas d augmentation de la pression MAINTIEN DE L UNIT L ABRI DES CONTAMINATIONS Ne pas laisser des produits...

Страница 21: ...ales Pone de relieve un procedimiento pr ctica estado etc que en caso de no realizarse u observarse correctamente puede causar da os personales Precauci n El s mbolo de precauci n indica la posibilida...

Страница 22: ...tierra IEC 417 N 5017 Protecci n a tierra IEC 417 N 5019 Caja o chasis IEC 417 N 5020 Equipotencialidad IEC 417 N 5021 Corriente continua IEC 417 N 5031 Corriente alterna IEC 417 N 5032 Corriente cont...

Страница 23: ...BEN SER EFECTUADAS NICAMENTE POR T CNICOS AUTORIZADOS Los operarios no deben intentar reemplazar los componentes o realizar tareas de ajuste en el interior del instrumento Las tareas de mantenimiento...

Страница 24: ...hallar la presi n m xima permitida INSTALE UNA C PSULA DE SEGURIDAD ADECUADA Cuando el instrumento funcione con una fuente de gas presurizado instale una c psula de seguridad adecuada en el sistema de...

Страница 25: ...acy of 0 5 of Reading and carries a CE Mark to indicate full compliance with current CE requirements The 722C transducer is available with a wide selection of configurations Range 1 Torr through 25 00...

Страница 26: ...fety Information Symbols Used in This Instruction Manual Definitions of WARNING CAUTION and NOTE messages used throughout the manual Warning The WARNING sign denotes a hazard to personnel It calls att...

Страница 27: ...06 Caution refer to accompanying documents ISO 3864 No B 3 1 Caution risk of electric shock ISO 3864 No B 3 6 Caution hot surface IEC 417 No 5041 Table 1 Definition of Symbols Found on the Unit O n S...

Страница 28: ...AUTION WHEN OPERATING WITH HAZARDOUS MATERIALS If hazardous materials are used users must take responsibility to observe the proper safety precautions completely purge the instrument when necessary an...

Страница 29: ...prevent system explosion should the system pressure rise KEEP THE UNIT FREE OF CONTAMINANTS Do not allow contaminants to enter the unit before or during use Contamination such as dust dirt lint glass...

Страница 30: ...ustand oder eine sonstige Gegebenheit aufmerksam deren unsachgem e Ausf hrung bzw ungen gende Ber cksichtigung zu Verletzungen f hren kann Vorsicht Das Symbol VORSICHT weist auf eine Gefahr f r das Ge...

Страница 31: ...ranschlu IEC 417 No 5019 Masseanschlu IEC 417 No 5020 Aquipotential anschlu IEC 417 No 5021 Gleichstrom IEC 417 No 5031 Wechselstrom IEC 417 No 5032 Gleich oder Wechselstrom IEC 417 No 5033 a Durchg n...

Страница 32: ...ung nur durch qualifizierte Fachleute Das Auswechseln von Komponenten und das Vornehmen von internen Einstellungen darf nur von qualifizierten Fachleuten durchgef hrt werden niemals vom Bedienpersonal...

Страница 33: ...eeignete Berstscheibe installieren Wenn mit einer unter Druck stehenden Gasquelle gearbeitet wird sollte eine geeignete Berstscheibe in das Vakuumsystem installiert werden um eine Explosionsgefahr auf...

Страница 34: ...ition ou toute autre situation pr sentant un risque d accident pour le personnel en cas d ex cution incorrecte ou de non respect des consignes Attention L indication ATTENTION signale un danger pour l...

Страница 35: ...masse IEC 417 No 5017 Terre de protection masse IEC 417 No 5019 Masse IEC 417 No 5020 Equipotentialit IEC 417 No 5021 Courant continu IEC 417 No 5031 Courant alternatif IEC 417 No 5032 Courant continu...

Страница 36: ...age doit tre uniquement effectu par du personnel qualifi PR CAUTION EN CAS D UTILISATION AVEC DES PRODUITS DANGEREUX Si des produits dangereux sont utilis s l utilisateur est responsable de la prise d...

Страница 37: ...r un disque d chappement adapt dans le syst me vide afin d viter une explosion du syst me en cas d augmentation de la pression MAINTIEN DE L UNIT L ABRI DES CONTAMINATIONS Ne pas laisser des produits...

Страница 38: ...ales Pone de relieve un procedimiento pr ctica estado etc que en caso de no realizarse u observarse correctamente puede causar da os personales Precauci n El s mbolo de precauci n indica la posibilida...

Страница 39: ...tierra IEC 417 N 5017 Protecci n a tierra IEC 417 N 5019 Caja o chasis IEC 417 N 5020 Equipotencialidad IEC 417 N 5021 Corriente continua IEC 417 N 5031 Corriente alterna IEC 417 N 5032 Corriente cont...

Страница 40: ...BEN SER EFECTUADAS NICAMENTE POR T CNICOS AUTORIZADOS Los operarios no deben intentar reemplazar los componentes o realizar tareas de ajuste en el interior del instrumento Las tareas de mantenimiento...

Страница 41: ...hallar la presi n m xima permitida INSTALE UNA C PSULA DE SEGURIDAD ADECUADA Cuando el instrumento funcione con una fuente de gas presurizado instale una c psula de seguridad adecuada en el sistema de...

Страница 42: ...scribes the model code Customer Support Standard maintenance and repair services are available at all of our regional MKS Calibration and Service Centers listed on the back cover In addition MKS accep...

Страница 43: ...nter before shipping Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers Caution Only qualified individuals should perform the installation an...

Страница 44: ...r general guidance under ideal conditions If the switch is located in an enclosed environment or where air flow is limited or impeded in any way please consult your local MKS office for additional gui...

Страница 45: ...cess From This Side Wire Entry 28 AWG to 14 AWG 0 54 13 7 Max 6 00 152 Figure 1 Dimensions of the Low Pressure up to 1000 Torr Type 722C Transducer 0 76 19 2 0 049 1 2 0 50 12 7 Dia Tube 0 86 21 7 NW...

Страница 46: ...Block Connector 15 Pin Type D Connector Figure 3 Dimensions of the High Pressure 1000 to 25 000 Torr Type 722C Transducer 1 07 27 1 0 75 19 1 0 049 1 2 0 50 12 7 Dia 1000 Torr 19 3 PSI Max Tube 1 17...

Страница 47: ...f the unit must point upwards as shown in Figure Error Bookmark not defined Do not install the unit with the cylindrical end of the unit pointing downward because particulate impurities may accumulate...

Страница 48: ...ollowed 2 Before proceeding to Setup page 47 carefully check all plumbing connections to the instrument to ensure a leak tight installation Making Mechanical Connections To make mechanical connections...

Страница 49: ...ternal connection Pinout of the 9 Pin Type D Connector Pin Assignment 1 Pressure Output 2 No Connection 3 No Connection 4 Power Input 5 No Connection 6 No Connection 7 No Connection 8 Pressure Return...

Страница 50: ...1 No Connection 2 Pressure Output 3 No Connection 4 No Connection 5 Power Return 6 No Connection 7 Power Input 8 No Connection 9 No Connection 10 No Connection 11 No Connection 12 Pressure Return 13 N...

Страница 51: ...rrect cable to use to connect the 9 pin Type D connector to the PDR C and PDR D readout is a RCB700 2 cable This cable has the mating Type D connector on the transducer end and flying leads on the PDR...

Страница 52: ...stability of the system Figure 1 Electrical Scheme for a Voltage Unit NW16 KF Fitting Information The NW16 KF fittings are only available for units with full scale pressure of a maximum of 5000 Torr 1...

Страница 53: ...EC as from 20 April 2016 Note Metal braided shielded cables are required to meet CE Mark specifications Interface Cables Transducer Connector MKS Power Supply Readout Cable Description Cable Number 9...

Страница 54: ...shielded cables with flying leads at one or both ends it is important at each such end to ground the shield before the wires exit Make this ground with absolute minimum length Refer to Figures 2 and 3...

Страница 55: ...onnect the Cable to a Terminal Block Example 1 Figure 3 How To Connect the Cable to a Terminal Block Example 2 Transducer Overall Insulation if present Bare Metal Cable Clamp Making Firm Contact To Br...

Страница 56: ...your system Zeroing a transducer at a pressure above its stated minimum resolution creates a zero offset relative to true absolute pressure All subsequent readings are then linear and accurate relati...

Страница 57: ...r 30 psia 1 x 10 3 psia 100 psia 5 x 10 3 psia 500 psia 2 x 10 2 psia Table 10 Highest Pressure for Proper Zero Adjustment Span Adjustment The span setting may require adjustment periodically Only adj...

Страница 58: ...How To Check the Transducer Zero Chapter Two Installation 58 This page intentionally left blank...

Страница 59: ...mber in the transducer body One wall of this chamber is a metal diaphragm The front side of the diaphragm is exposed to the gas whose pressure is to be measured The back or reference side of the diaph...

Страница 60: ...board construction uses surface mount technology The output is either a DC voltage or mA current which is linear with pressure The transducer is then calibrated against a transfer standard to provide...

Страница 61: ...t Suggested Pressure to Use for Control The pressures listed in the last column of Table 7 are for reference and represent the pressure reading of the transducer at 50 mV signal output A DC signal of...

Страница 62: ...General Chapter Four Operation 62 This page intentionally left blank...

Страница 63: ...ions while installing and adjusting the instrument Proper handling is essential when working with all highly sensitive precision electronic instruments In production operations verify the transducer z...

Страница 64: ...onnector Inspect cable and transducer Replace if necessary Measurement slowly goes positive over time Overpressure and or a build up of contamination in the Px cavity Return to MKS for servicing or tr...

Страница 65: ...Mini CF Full Scale Pressure Ranges 1 Torr through 25 000 Torr 0 02 psia through 500 psia Material Exposed to Gas Inconel and Incoloy Some fittings may be built from 300 series stainless steel Overpres...

Страница 66: ...pecifications Input Required 0 to 5 Volt output 0 to 10 Volt output 10 8 VDC to 32 VDC regulated if below 13 VDC 10 mA max 13 VDC to 32 VDC 10 mA max Output 0 to 5 VDC 0 to 10 VDC into 10 K ohm load i...

Страница 67: ...options of your transducer are identified in the model code when you order the unit The model code is identified as follows 722CXXXYYZF where Type Number 722C This designates the model number of the i...

Страница 68: ...ttings YY Six types of fittings are available designated by a two letter code Ordering Code 4 VCR Type Female CD inch OD tube weld stub BA 8 VCR Type Female CE 8 VCO Type Female DA Mini CF rotatable H...

Страница 69: ...it without a protective overpressure ring may result in injury The HPS part number for the overpressure ring is HPS 10031 Accuracy F The accuracy 0 5 of Reading is specified by a letter F in this fiel...

Страница 70: ...NW 16 KF Fitting Information Appendix B Model Code Explanation 70 This page intentionally left blank...

Страница 71: ...ation 26 Model code 51 Mounting 31 O Options 25 Orientation 31 40 P Pinout 5 pin terminal block 33 9 pin Type 33 Power 52 Pressure limit 49 Pressure lowest for control 45 Pressure lowest reading 45 R...

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