How To Adjust the Zero
Chapter Four: Operation
32
If available pressures are not sufficiently low to set the transducer zero, a vacuum leak detector
may be used. In this case, mount the transducer on the leak detector in the same plane of
orientation as where it will be used.
In production operations such as semiconductor manufacturing, it is recommended that the
transducer zero be verified and adjusted, if necessary, each time the equipment is shut down for
routine maintenance.
Lowest Suggested Pressure Reading
Lower readings are often possible, but not always practical; a stable operating environment
(temperature and air flow) permits lower readings. Optimum repeatability of low pressure
(<100 milliTorr) measurement is achieved with temperature-controlled transducers.
Lowest Suggested Pressure Control
The pressures noted in this column are for reference, and represent the pressure reading of the
transducer at 50 millivolts signal output. A 50 millivolt DC signal is usually the preferred
minimum signal level, when integrating any electronic component into complex processing
systems.
Lowest Suggested Pressures for Reading and Control
Full Scale
Range (Torr)
Lowest Suggested Pressure
Reading (Torr)
Lowest Suggested Pressure Control
(Torr)
10
3.0 x 10
-3
5 x 10
-2
100
3.0 x 10
-2
5.0 x 10
-1
1000
3.0 x 10
-1
5.0 x 10
0
5000
1.5 x 10
0
2.5 x 10
1
10000
3.0 x 10
0
5.0 x 10
1
15000
4.5 x 10
0
7.5 x 10
1
20000
6.0 x 10
0
1.0 x 10
2
25000
7.5 x 10
0
1.25 x 10
2
Table 7: Lowest Suggested Pressures for Reading and Control
Содержание Baratron 122B
Страница 4: ...110899 P1 Rev D 8 98 MKS Baratron Type 122B Absolute Pressure Transducer ...
Страница 9: ...List of Figures and Tables vi ...
Страница 37: ...Sensor Chapter Three Overview 28 Figure 7 Cross Sectional View of the Type 122 Transducer ...
Страница 43: ...Sensor Chapter Five Maintenance 34 This page intentionally left blank ...
Страница 49: ...Index 40 Z Zero 31 Zero base pressure 32 ...
