MKS 253B-1-2CF-1, Инструкция по эксплуатации

Страница: 42 / 54

ASA Flange Specifications Appendix A: Product Specifications
34
ASA Flange Specifications
Valve Type Number 253B-
2-2-1
253B-
2-2-2
253B-
60-2-1
253B-
60-2-2
253B-
3-2-2
253B-
3-3-2
253B-
4-3-2
Inside Diameter (A)*
Inches
(mm) 1.88
(47.8)
1.950
(49.5)
2.362
(60.0)
2.362
(60.0)
3.025
(76.8)
3.025
(76.8)
3.965
(100.7)
Mounting Flange ASA 2” ASA 2” ASA 2” ASA 2” ASA 2” ASA 3” ASA 3”
Outside Diameter (B)*
Inches
(mm)
5.95
(151)
5.95
(151)
5.95
(151)
5.95
(151)
5.95
(151)
7.40
(188)
7.40
(188)
Controllable
Conductance (l/sec)
min
max
0.35
300
0.70
300
TBD
TBD 0.80
375
1.00
500
1.00
500
1.50
950
Closed Leakage
(Torr l/sec)
<10
-7
N/A <10
-7
N/A N/A N/A N/A
Flapper Seal**
Viton None Viton None None None None
Thickness (C)*
Inches
(mm) 0.75
(19.1)
0.75
(19.1)
0.75
(19.1)
0.75
(19.1)
0.75
(19.1)
0.88
(22.4)
0.88
(22.4)
Overall Height
Inches
(mm)
10.79
(274.1)
10.79
(274.1)
10.79
(274.1)
10.79
(274.1)
10.79
(274.1)
12.24
(310.9)
12.24
(310.9)
No. of Bolt Holes 4 4 4 4 4 4 4
Bolt Hole
Diameter (D)*
Inches
(mm)
0.75
(19.1)
0.75
(19.1)
0.75
(19.1)
0.75
(19.1)
0.75
(19.1)
0.75
(19.1)
0.75
(19.1)
Bolt Circle Diameter
Inches
(mm) 4.750
(120.7)
4.750
(120.7)
4.750
(120.7)
4.750
(120.7)
4.750
(120.7)
6.000
(152.4)
6.000
(152.4)
Flange O-ring groove
ID
In
(mm)
Parker
®
No. or
Size (JIS)
3.365
(85.5)
2-237
3.365
(85.5)
2-237
3.365
(85.5)
2-237
3.365
(85.5)
2-237
3.365
(85.5)
2-237
4.475
(113.7)
2-349
4.475
(113.7)
2-349
(Continued on next page)