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MKS 253B-1-2CF-1, Инструкция по эксплуатации

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Informations relatives à la sécurité pour la valve

Symboles utilisés dans ce manuel d'utilisation

9

Informations relatives à la sécurité pour la valve

Symboles utilisés dans ce manuel d'utilisation

Définitions des indications AVERTISSEMENT, ATTENTION, et REMARQUE utilisées dans
ce manuel.

Avertissement

L'indication AVERTISSEMENT signale un danger pour le
personnel. Elle attire l'attention sur une procédure, une
pratique, une condition, ou toute autre situation
présentant un risque d'accident pour le personnel, en
cas d'exécution incorrecte ou de non respect des
consignes.

Attention

L'indication ATTENTION signale un danger pour l'appareil.
Elle attire l'attention sur une procédure d'exploitation, une
pratique, ou toute autre situation, présentant un risque
d'endommagement ou de destruction d'une partie ou de la
totalité de l'appareil, en cas d'exécution incorrecte ou de non
respect des consignes.

Remarque

L'indication REMARQUE signale une information importante. Elle
attire l'attention sur une procédure, une pratique, une condition, ou
toute autre situation, présentant un intérêt particulier.

Содержание 253B-1-2CF-1

Страница 1: ...3 P1 Rev C 2 99 Instruction Manual MKS Type 253B Throttling Valve Six Shattuck Road Andover MA 01810 2449 800 227 8766 or 978 975 2350 Fax 978 975 0093 E mail mks mksinst com Web site http www mksinst...

Страница 2: ...ser The foregoing shall constitute the exclusive and sole remedy of the purchaser for any breach by MKS of this warranty The purchaser before returning any equipment covered by this warranty which is...

Страница 3: ...118843 P1 Rev C 2 99 MKS Type 253B Exhaust Throttle Valve...

Страница 4: ...ssly permitted in writing by MKS Instruments Inc Printed in the United States of America Parker is a registered trademark of Parker Seals Lexington KY Viton is a registered trademark of E I DuPont de...

Страница 5: ...pour la valve 9 Symboles utilis s dans ce manuel d utilisation 9 Symboles apparaissant sur l unit 10 Mesures de s curit et pr cautions 11 Medidas de seguridad de la v lvula 13 S mbolos usados en este...

Страница 6: ...29 Operation 29 Theory of Operation 29 Chapter Four Maintenance 31 General Information 31 Maintenance 31 How To Clean the Unit 31 Appendix A Product Specifications 33 Valve Specifications 33 ASA Flan...

Страница 7: ...Valve with a CF Flange 25 Figure 5 Type 253 Valve with a JIS Flange 25 Figure 6 Pump Label 28 Figure 7 Serial Number Label 28 Tables Table 1 Definition of Symbols Found on the Unit 2 Tabelle 2 Bedeutu...

Страница 8: ...List of Figures and Tables vi...

Страница 9: ...ractice condition or the like which if not correctly performed or adhered to could result in injury to personnel Caution The CAUTION sign denotes a hazard to equipment It calls attention to an operati...

Страница 10: ...ound IEC 417 No 5019 Frame or chassis IEC 417 No 5020 Equipotentiality IEC 417 No 5021 Direct current IEC 417 No 5031 Alternating current IEC 417 No 5032 Both direct and alternating current IEC 417 No...

Страница 11: ...lve DO NOT SUBSTITUTE PARTS OR MODIFY VALVE Do not install substitute parts or perform any unauthorized modification to the valve Return the valve to an MKS Calibration and Service Center for service...

Страница 12: ...ure leak tight installation OPERATE AT SAFE INLET PRESSURES Never operate the valve at pressures higher than the rated maximum pressure refer to the product specifications for the maximum allowable pr...

Страница 13: ...eine sonstige Gegebenheit aufmerksam deren unsachgem e Ausf hrung bzw ungen gende Ber cksichtigung zu Verletzungen f hren kann Vorsicht Das Symbol VORSICHT weist auf eine Gefahr f r das Ger t hin Es...

Страница 14: ...lu IEC 417 No 5019 Masseanschlu IEC 417 No 5020 Aquipotential anschlu IEC 417 No 5021 Gleichstrom IEC 417 No 5031 Wechselstrom IEC 417 No 5032 Gleich oder Wechselstrom IEC 417 No 5033 a Durchg ngige d...

Страница 15: ...t beweglichen Teilen m glich ist 2 Das Ventil vor dem Hantieren stets von allen elektrischen und pneumatischen Kraftquellen trennen Niemals Teile austauschen oder nderungen am Ventil vornehmen Ersetze...

Страница 16: ...kompatibel sein Der Einbau insbesondere das Anziehen und Abdichten mu gem den Anweisungen des Herstellers vorgenommen werden Ventil auf Undichtigkeiten pr fen berpr fen Sie sorgf ltig alle Verbindung...

Страница 17: ...e situation pr sentant un risque d accident pour le personnel en cas d ex cution incorrecte ou de non respect des consignes Attention L indication ATTENTION signale un danger pour l appareil Elle atti...

Страница 18: ...417 No 5017 Terre de protection masse IEC 417 No 5019 Masse IEC 417 No 5020 Equipotentialit IEC 417 No 5021 Courant continu IEC 417 No 5031 Courant alternatif IEC 417 No 5032 Courant continu et altern...

Страница 19: ...trique ou pneumatique pendant la manipulation de la valve PAS DE SUBSTITUTION DE PI CES OU DE MODIFICATION DE LA VALVE Ne pas installer des pi ces de substitution ou effectuer des modifications non au...

Страница 20: ...our le vide afin de garantir l tanch it de l installation EXPLOITATION AVEC DES PRESSIONS D ENTR E NON DANGEREUSES Ne jamais utiliser la valve avec des pressions sup rieures la pression nominale maxim...

Страница 21: ...relieve un procedimiento pr ctica estado etc que en caso de no realizarse u observarse correctamente puede causar da os personales Precauci n El s mbolo de precauci n indica la posibilidad de producir...

Страница 22: ...IEC 417 N 5017 Protecci n a tierra IEC 417 N 5019 Caja o chasis IEC 417 N 5020 Equipotencialidad IEC 417 N 5021 Corriente continua IEC 417 N 5031 Corriente alterna IEC 417 N 5032 Corriente continua y...

Страница 23: ...a fuente de alimentaci n neum tica o el ctrica NO UTILICE PIEZAS NO ORIGINALES O MODIFIQUE LA V LVULA No instale piezas que no sean originales o modifique la v lvula sin autorizaci n Para asegurar el...

Страница 24: ...speccione cuidadosamente las conexiones de los componentes de vac o para comprobar que hayan sido instalados a prueba de fugas HAGA FUNCIONAR LA V LVULA CON PRESIONES DE ENTRADA SEGURAS No haga funcio...

Страница 25: ...ally mounted to a Roots blower diffusion turbo cryo or other high vacuum pump The valve s butterfly is positioned to modulate the gas flow pumping speed as seen by the chamber thereby controlling pres...

Страница 26: ...A Product Specifications lists the specifications of the instrument Appendix B Model Code Explanation describes the instrument s ordering codes Customer Support Standard maintenance and repair servic...

Страница 27: ...are sure the unit arrived safely If you find any damage notify your carrier and MKS immediately If it is necessary to return the unit to MKS obtain an ERA Number Equipment Return Authorization Number...

Страница 28: ...EC and 73 23 EEC Note 1 Overall metal braided shielded cables properly grounded at both ends are required to meet CE specifications 2 To order metal braided shielded cables add an S after the cable ty...

Страница 29: ...may not suffice 4 For shielded cables with flying leads at one or both ends it is important at each such end to ground the shield before the wires exit Make this ground with absolute minimum length A...

Страница 30: ...e 253 valve is available with the following flange types ASA NW Style ISO KF Style ISO CF JIS Examples of each flange type are shown in Dimensions page 23 Refer to Appendix A Product Specifications pa...

Страница 31: ...Diameter A Outside Diameter B Thickness C and Bolt Hole Diameter D where applicable are listed in Appendix A Product Specifications page 33 4 45 113 TYP 3 75 Square 95 25 TYP 5 00 127 TYP 0 39 9 9 B...

Страница 32: ...C Type 253B 2 50 2 Shown 1 44 36 5 Driver Gear Assembly Figure 2 Type 253 Valve with a KF Style ISO Flange 15 Pin Type D Connector 0 39 9 9 B DIA A DIA D DIA Hole Through Type 253B 3 80 2 Shown C Dri...

Страница 33: ...e Through Type 253B 2 3CF 2 Shown C Driver Gear Assembly Figure 4 Type 253 Valve with a CF Flange 15 Pin Type D Connector 1 44 36 5 D DIA Hole Through B DIA A DIA O Ring Supplied by Customer C Type 25...

Страница 34: ...to a system To avoid injury keep all objects away from any valve opening Do not insert objects into openings where contact with moving parts is possible Isolate the equipment from any electrical or pn...

Страница 35: ...o a controller The system interface cables are listed in Table 5 page 20 15 Pin Type D Connector Pinout Pin Assignment 1 No Connection 2 No Connection 3 Limit Switch Common 4 Open Limit Switch 5 Close...

Страница 36: ...s which side of the valve should be oriented towards the high vacuum pump during installation Figure 6 Pump Label Serial Number Label The serial number label shown in Figure 7 lists the serial number...

Страница 37: ...ons for your MKS controller Theory of Operation A butterfly valve s flow rate is very nonlinear with respect to shaft position that is the percent change in flow rate ranges from very large values whe...

Страница 38: ...Theory of Operation Chapter Three Operation and Theory of Operation 30 This page intentionally left blank...

Страница 39: ...rom a MKS Service Center before shipping Please refer to the inside back cover of this manual for a list of MKS Calibration and Service Centers Maintenance Periodically check for wear on the cables an...

Страница 40: ...Maintenance Chapter Four Maintenance 32 This page intentionally left blank...

Страница 41: ...lve body heater 15 VDC 1 Amp 30 Watts nominal user supplied Note DC input is used for safety purposes Resolution Standard 1 10 000 Fast Motor Option 1 2800 Shaft Seal Viton Speed open to close Standar...

Страница 42: ...ed Leakage Torr l sec 10 7 N A 10 7 N A N A N A N A Flapper Seal Viton None Viton None None None None Thickness C Inches mm 0 75 19 1 0 75 19 1 0 75 19 1 0 75 19 1 0 75 19 1 0 88 22 4 0 88 22 4 Overal...

Страница 43: ...ge Torr l sec N A N A N A N A N A N A Flapper Seal None None None None None None Thickness C Inches mm 0 88 22 4 0 88 22 4 0 94 23 9 0 94 23 9 0 94 23 9 0 94 23 9 Overall Height Inches mm 13 74 349 0...

Страница 44: ...ntrollable Conductance l sec min max 0 07 24 0 25 31 0 20 50 0 40 55 0 35 300 0 70 300 Closed Leakage Torr l sec 10 7 N A 10 7 N A 10 7 N A Flapper Seal Viton None Viton None Viton None Thickness C In...

Страница 45: ...375 1 00 500 1 50 900 TBD TBD TBD TBD TBD TBD Closed Leakage Torr l sec 10 7 N A N A N A N A N A N A Flapper Seal Viton None None None None None None Thickness C Inches mm 0 81 20 6 0 81 20 6 0 81 20...

Страница 46: ...ontrollable Conductance l sec min max 0 07 24 0 25 31 0 20 50 0 40 55 0 35 300 Closed Leakage Torr l sec 10 7 N A 10 7 N A 10 7 Flapper Seal Viton None Viton None Viton Thickness C Inches mm 1 25 31 8...

Страница 47: ...in max 0 70 300 TBD TBD 0 70 300 1 00 500 1 50 900 Closed Leakage Torr l sec 10 7 10 7 N A N A N A Flapper Seal Viton Viton None None None Thickness C Inches mm 1 25 31 8 1 00 25 4 1 00 25 4 0 81 20 6...

Страница 48: ...on None None Thickness C Inches mm 1 00 25 4 1 00 25 4 0 94 23 9 Overall Height Inches mm 10 36 263 0 10 36 263 0 13 29 337 6 No of Bolt Holes 6 4 8 Bolt Hole Diameter D Inches mm 0 39 9 91 0 39 9 91...

Страница 49: ...e Type 253 with ASA Flanges Type Number Nominal Inside Diameter inches mm ASA Flange Size Flapper O Ring 253B 2 2 1 1 888 48 2 Yes 253B 2 2 2 1 950 50 2 No 253B 60 2 1 2 362 60 2 Yes 253B 60 2 2 2 362...

Страница 50: ...No 253B 1 40 1 1 270 32 KF 40 Yes 253B 1 40 2 1 270 32 KF 40 No 253B 2 50 1 1 888 48 KF 50 Yes 253B 2 50 2 2 000 51 KF 50 No 253B 60 63 1 2 362 60 NW 63 Yes 253B 60 63 2 2 362 60 NW 63 No 253B 3 80 2...

Страница 51: ...1 1 270 32 2 Yes 253B 1 2CF 2 1 270 32 2 No 253B 2 3CF 1 1 888 48 33 8 Yes 253B 2 3CF 2 2 000 51 33 8 No 253B 2 4CF 1 2 000 51 4 Yes 253B 2 4CF 2 2 000 51 4 No 253B 3 6CF 2 3 000 76 6 No 253B 4 6CF 2...

Страница 52: ...Model Code Appendix B Model Code Explanation 44 This page intentionally left blank...

Страница 53: ...nsions 22 25 F Flanges 22 25 41 43 J JIS flanges dimensions 25 model codes 43 specifications 40 K KF ISO flanges dimensions 24 model codes 42 specifications 36 M Maintenance 31 Manual organization 18...

Страница 54: ...Index 46 Serial number label 28 Specifications flanges 34 40 standard valve 33 V Valve operation 29 theory of operation 29...

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