MKS 246C, Инструкция по эксплуатации

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Rear Panel Controls Chapter Three: Overview
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Fuse Holder
This housing holds the unit’s two fuses. The fuse values are listed in Table 6, page 31. Refer to
How To Replace the Fuses, page 67, for more information.
Caution
Disconnect the AC line cord from the 246 controller before you
replace the fuses, to avoid any damage.
MFC Connector J8
This 15-pin female Type “D” connector provides the connection for the mass flow device. The
connector provides the necessary power and set point voltages, and receives the flow output
signal.
Refer to Table 8, page 34, for the MFC Connector J8 pinout.
Interface Connector J9
This 9-pin female Type “D” connector provides the connection for a pressure transducer. The
connector provides the communications link to and from the unit including the connection to the
scaled transducer outputs, the lines to turn the flow on and off, and the set point input lines which
remotely set the flow rate of the MFC.
Refer to Table 7, page 33, for the Interface Connector J9 pinout.
Flow Out Microjack Connector
This connector provides a 0 to 5 V sensor output voltage which is corrected by the front panel
ZERO CONTROL; this connector provides the same function as pin 6 in Interface connector J9.
Refer to Table 7, page 33, for the Interface connector J9 pinout.
When operating the 246 unit with ratio control, this jack provides a master flow set point voltage
for the slave 246 units, and can also be used for data acquisition purposes.
Set Point In/Out Microjack Connector
The set point in and out connectors receive an external set point voltage; they are internally
connected in parallel. These connectors are used to connect a 246 unit to an external pressure
controller or to connect two 246 units together, as shown in Figure 6, page 29.