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MKS 20340-341-T1, Инструкция по эксплуатации

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Series 340 Vacuum Gauge Controller
Instruction Manual - 340005 - Rev. D

Содержание 20340-341-T1

Страница 1: ...Granville Phillips Series 340 Vacuum Gauge Controller Instruction manual part number 340005 Revision D November 2014 Series 340 Instruction Manual...

Страница 2: ...Series 340 Vacuum Gauge Controller Instruction Manual 340005 Rev A...

Страница 3: ...trademarks of MKS Instruments Inc All other trademarks and registered trademarks are the properties of their respective owners For Customer Service or Technical Support 24 hours per day 7 days per wee...

Страница 4: ...nt for 19 inch rack 340502 Center mount for 19 inch rack 340503 Bench top mount 340504 Display options Measurement units Torr T mbar M Pascal P Powercord options North America 115 Vac and Japan 100 Va...

Страница 5: ...3 1 Initial VGC Setup and Installation 19 3 1 1 Line Voltage Selection 19 3 1 2 Mounting Configurations 20 3 2 Ionization Gauge Types and Installation 21 3 2 1 Ion Gauge Cables 22 3 3 Convectron Gauge...

Страница 6: ...mum Adjustment 50 5 4 2 Electrometer Scale Adjustment 50 5 4 3 Overpressure Shutdown Adjustment 50 5 4 4 A D Calibration 50 Chapter 6 Convectron Gauge Module 51 6 1 Introduction to the Convectron Gaug...

Страница 7: ...ly with these precautions or with specific warnings elsewhere in this manual violates safety standards of design manufacture and intended use of the instrument MKS Instruments Inc disclaims all liabil...

Страница 8: ...pairs to this product ask the Qualified Service Person to perform safety checks to determine that the product is in safe operating order Finite Lifetime After ten years of normal use or even non use t...

Страница 9: ...scs Confirm that these safety devices are properly installed before installing and operating the product Where an equipment malfunction could cause a hazardous situation always provide for fail safe o...

Страница 10: ...ential overpressure explosion hazard can be created under certain conditions Do not attempt to use a Series 275 gauge calibrated for N2 to measure or control the pressure of other gases such as argon...

Страница 11: ...nt at 1 800 227 8766 or 1 303 652 4691 for troubleshooting help over the phone If the product must be returned to the factory for service request a Return Material Authorization RMA from Granville Phi...

Страница 12: ...used in accordance with this instruction manual may cause harmful interference to radio communications However there is no guarantee that interference will not occur in a particular installation Opera...

Страница 13: ...rovides automatic ion gauge turn ON from Convectron channel 1 and a Convectron Gauge process relay output that is user selectable to operate from channel 1 or 2 2 1 1 3 Ion Gauge Cables The VGC is cap...

Страница 14: ...e 2 1 Front of Series 340 Vacuum Gauge Controller Figure 2 2 Rear of Series 340 Vacuum Gauge Controller Power Supply Ion Gauge Connector Remote I O PCB Convectron Gauge Module PCB See Chapter 6 Electr...

Страница 15: ...Physical Specifications Parameter Specification Width 24 13 cm 9 5 in with 1 2 rack mounting brackets Height 8 89 cm 3 5 in Depth 35 56 cm 14 in includes 7 62 cm 3 in for connectors and cables Weight...

Страница 16: ...typical as shipped Internal switch selectable to 3 sec reading averaged Table 2 5 Electrometer Ion Gauge Specifications Parameter Specification Sensitivity 3 Torr to 50 Torr the factory setting is 10...

Страница 17: ...chable to 3 sec reading average Ion Gauge Turn ON Range OFF 5 mTorr to 50 mTorr Process Relay Setting Max switched power Max switched current Max switched voltage Contact rating Resistive load 30 W or...

Страница 18: ...2Introduction Specifications 18 Series 340 Vacuum Gauge Controller Instruction Manual 340005 Rev D NOTES...

Страница 19: ...ok to extract the line selector card from its holder and pull the card straight out 4 Reinsert the card so that the correct line voltage 100 120 220 or 240V as shown in Figure 3 1 is readable from the...

Страница 20: ...figurations Figure 3 2 illustrates the various configurations available for mounting the Series 340 Vacuum Gauge Controller NOTE The 340 controller should be mounted in a location with free air flow a...

Страница 21: ...am evaporation source or used in a sputtering system spurious electrons or ions may disturb the measurement Screens or other shielding should be placed between the gauge and the system if spurious cha...

Страница 22: ...vacuum Accidental bending of the pins may cause the glass to break and implode Cables once installed should be secured to the system to provide strain relief for gauge tube pins Ionization gauges are...

Страница 23: ...stallation 23 Series 340 Vacuum Gauge Controller Instruction Manual 340005 Rev D Figure 3 5 Ion Gauge Cable for Granville Phillips Nude Gauges Figure 3 6 Ion Gauge Cable for Granville Phillips Nude Ga...

Страница 24: ...nversion data Do not operate a Convectron Gauge in an explosive atmosphere Do not use the product to measure the pressure of explosive or combustible gases or gas mixtures The sensor wire of the Conve...

Страница 25: ...ed sensor 8 For greatest accuracy and repeatability the gauge should be located in a stable room temperature environment 3 3 2 Gauge Orientation It is important to consider the orientation of the gaug...

Страница 26: ...u wish in a 360 degree horizontal circle for optimum routing of the gauge tube cable 3 3 4 1 8 NPT Mount The threads on the gauge tube port will fit a standard 1 8 NPT female fitting Wrap the threads...

Страница 27: ...everal other mounting systems These include Cajon SS 4 VCR 1 SS 4 VCR 3 and SS 6 VCO 1 fittings 2 3 4 inch rotatable and non rotatable CuSeal flanges 1 5 16 inch non rotatable CuSeal flange and welded...

Страница 28: ...ity ground If necessary use a ground lug on the flange bolt or a hose clamp connected to the gauge component Touching the pins on the gauge in a high voltage environment can cause an electrical discha...

Страница 29: ...vacuum system or other component Connect it directly to the facility grounding system such as a grounded outlet box or a grounded copper water supply pipe Do not rely on small metal water lines to gr...

Страница 30: ...ngerous voltage between them This test does not prove that either connection is earth ground only that they are the same If more than 2 ohms is indicated check with your electrician 4 If AC or DC volt...

Страница 31: ...s and Convectron gauges is explained in this chapter as well as Convectron gauge operation and using them with gases other than N2 or Air Detailed information regarding the Electrometer module and the...

Страница 32: ...panel momentary rocker switch or by remote control To turn ON the ion gauge from the front panel press the momentary rocker switch see Figure 4 1 To turn it OFF press the switch again The digital disp...

Страница 33: ...emitted and accelerated toward the grid by the potential difference between the grid and filament Most of the electrons eventually collide with the grid but many first traverse the region inside the g...

Страница 34: ...ectron transducer is represented in Figure 4 4 as R1 R2 R3 and R4 These four resistances form the legs of a bridge circuit with R1 designating the sensor wire of the transducer R2 is a resistive netwo...

Страница 35: ...ir upper pressure limits 4 3 3 Use With Gases Other Than N2 and Air Before using the Convectron gauge to measure the pressure of other gases make certain the ATM adjustment is correctly set for air Re...

Страница 36: ...ressure for the other gas as explained below Example 1 Maximum Safe Indicated Pressure Assume a certain system will withstand an internal pressure of 2000 Torr or 38 7 psia For safety you want to limi...

Страница 37: ...wn to an indicated pressure of 6 5 Torr N2 equivalent Thus the correct process control setting for 20 Torr of C02 is 6 5 Torr N2 equivalent Example 4 True to Indicated Pressure Conversion Assume you w...

Страница 38: ...4 Operation 38 Series 340 Vacuum Gauge Controller Instruction Manual 340005 Rev D Figure 4 5 Convectron Gauge Indicated vs True Pressure Curve 0 1 to 100 mTorr...

Страница 39: ...4 Operation 39 Series 340 Vacuum Gauge Controller Instruction Manual 340005 Rev D Figure 4 6 Convectron Gauge Indicated vs True Pressure Curve 0 1 to 1000 Torr...

Страница 40: ...4 Operation 40 Series 340 Vacuum Gauge Controller Instruction Manual 340005 Rev D Figure 4 7 Convectron Gauge Indicated vs True Pressure Curve 0 1 to 1000 Torr...

Страница 41: ...4 Operation 41 Series 340 Vacuum Gauge Controller Instruction Manual 340005 Rev D Figure 4 8 Convectron Gauge Indicated vs True Pressure Curve 10 4 to 0 1 mbar...

Страница 42: ...4 Operation 42 Series 340 Vacuum Gauge Controller Instruction Manual 340005 Rev D Figure 4 9 Convectron Gauge Indicated vs True Pressure Curve 0 1 to 1000 mTorr...

Страница 43: ...4 Operation 43 Series 340 Vacuum Gauge Controller Instruction Manual 340005 Rev D Figure 4 10 Convectron Gauge Indicated vs True Pressure Curve 0 1 to 1000 mbar...

Страница 44: ...n Manual 340005 Rev D 4 4 Convectron Gauge Module Setup The Convectron Gauge Module provides capabilities such as auto turn ON OFF if the ion gauge and process rely and calibration of the Convectron G...

Страница 45: ...340 Vacuum Gauge Controller VGC is shipped from the factory preset to display the unit of measure Torr millibar or pascal that you requested To change the units proceed as follows 1 Turn OFF power to...

Страница 46: ...a 3 position switch that is used to display gauge sensitivity pressure or emission current To display the sensitivity set the switch to the left or to the right with the ion gauge OFF To display the e...

Страница 47: ...t be set with the IG tube turned on to view emission during adjustment The span of adjustment is from approximately 10 to 120 of the range value Theoretically varying the emission current will not aff...

Страница 48: ...or gases other than air or N2 calculate the sensitivity Sx for gas type x as follows where SN2 is the gauge sensitivity for N2 and Rx is found from Table 5 1 For example if the normal sensitivity for...

Страница 49: ...ual 340005 Rev D For 10 mA emission PRESSURE 10 volts 12 For 1 mA emission PRESSURE 10 volts 11 For 0 1 mA emission PRESSURE 10 volts 10 Figure 5 3 Electrometer Module Rear Panel Figure 5 4 Analog Out...

Страница 50: ...pressure Shutdown Adjustment The Overpressure Shutdown Adjustment potentiometer Figure 5 1 is factory set so the ion gauge will shut down when the pressure rises above the levels listed in Table 5 2 T...

Страница 51: ...ler is shipped from the factory preset to display the units of measure Torr mbar or pascal that you requested To change the units of measure for the Convectron Gauge 1 Turn OFF power to the Controller...

Страница 52: ...e setpoint and once again dropped below The auto turn ON potentiometer Figure 6 2 is marked with rough pressure calibration markings To set the pressure at which the IG will turn ON with falling CG pr...

Страница 53: ...elect Switch See Figure 6 1 When the switch is in the ON position Convectron Gauge A is selected as the controlling gauge for the process relay 6 5 Process Relay Turn ON Indicator The process relay ON...

Страница 54: ...appear before the exponent 0 0 0 Proper calibration is achieved only when 0 0 0 is displayed 3 Repeat this procedure for Convectron Gauge B if used 6 6 2 Atmosphere Calibration 1 Allow the pressure in...

Страница 55: ...ut Signal A nonlinear dc voltage output signal for both Convectron Gauges is provided on the rear panel of the Convectron Gauge module through the 9 pin accessory connector See Figure 6 2 and Figure 6...

Страница 56: ...6 Convectron Gauge Module 56 Series 340 Vacuum Gauge Controller Instruction Manual 340005 Rev D...

Страница 57: ...hods and must be packaged in anti static packaging Granville Phillips will supply return packaging materials at no charge upon request Shipping damage on returned products as a result of inadequate pa...

Страница 58: ...is for the use of Qualified Service Personnel To avoid shock do not perform any procedures in this manual or perform any servicing on this product unless you are qualified to do so Do not substitute p...

Страница 59: ...ses Corrective Action 1 The Power light does not illuminate all functions inoperative 1 Power cord not plugged in 2 No power to receptacle 3 Controller input power fuse blown 4 Defective power transfo...

Страница 60: ...essary to correct this problem before proceeding further In most cases correcting the power supply problem will correct the original problem as well Table 7 2 Power Supply Test Point Voltages Test Poi...

Страница 61: ...ately one second 1 The pressure in the gauge is too high to permit emission 2 Normal operation The pressure in the gauge is greater than the overpressure shutdown level from the electrometer circuit 3...

Страница 62: ...efective 1 Connect the cable 2 Check the continuity of the cable and replace or repair the cable The pressure reading displayed on the front panel of the 340 controller is higher than the expected sys...

Страница 63: ...stem See Convectron Gauge Installation on page 24 The pressure display for a Convectron gauge is blank or 1 The Convectron gauge cable is unplugged or defective 2 The sensor wire inside the Convectron...

Страница 64: ...should show the following resistances pin numbers are embossed on the gauge connector NOTE If the resistance values shown here are correct but you still think the gauge is not reading correctly the go...

Страница 65: ...standard wash bottle with the spout inserted in the port to where it touches the screen 2 Let the solvent stand in the gauge tube for at least ten minutes Do not shake the gauge tube if the gauge tube...

Страница 66: ...7 Service and Maintenance 66 Series 340 Vacuum Gauge Controller Instruction Manual 340005 Rev D...

Страница 67: ...lative Gas Sensitivities 48 Sensitivity Adjustment 47 Specifications 15 Units of Measure 32 Explosion Implosion 9 F FCC verification 12 G Grounding Equipment 9 System 28 I Implosion Explosion 9 Ioniza...

Страница 68: ...Series 340 Vacuum Gauge Controller Instruction Manual 340005 Rev D...

Страница 69: ...Series 340 Vacuum Gauge Controller Instruction Manual 340005 Rev A...

Страница 70: ...4 hours per day 7 days per week every day of the year including holidays Phone 1 800 227 8766 or 1 303 652 4691 MKS Granville Phillips Division 6450 Dry Creek Parkway Longmont CO 80503 USA Phone 1 303...

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