Microtest 6630E, Руководство пользователя

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Appendix
Impedance measurement accuracy at 4-terminal test fixture
Equation 1. Impedance measurement accuracy [%] at four-terminal pair test fixture of the Analyzer.
Ae = [ Ab
'
+ ( Z
s'
/ |Z
x
| + Y
o'
× |Z
x
| ) × 100 ] × Kt [%]
Where, A
b' =
A
b +
A
vac +
A
bw +
A
bl [%]
Z
s' = (
Z
s ×
K
vac ×
K
bw ) +
Z
sl [
Ω
]
Y
o' = (
Y
o ×
K
vac ×
K
bw ) +
Y
ol [S]
10 Hz
≤
F < 133 Hz: 100 / F × 0.1
Ab [%]
133 Hz < F
≤
750 kHz: 0.075
750 kHz < F
≤
30 MHz: 0.1 × Fm
Avac [%] Vac > 1V: (Vac - 1)
2
x 0.02 + 0.01 x Fm
Vac
≤
1V: (1 / Vac - 1) x 0.02
Meas Time 5: 0
Abw [%]
4: 0.06 (at < 50 kHz), 0.03 (at
≥
50 kHz)
3: 0.2 (at < 50 kHz), 0.1 (at
≥
50 kHz)
2: 0.4 (at < 50 kHz), 0.2 (at
≥
50 kHz)
1: 0.8 (at < 50 kHz), 0.4 (at
≥
50 kHz)
Cable length 0 m: 0
Abl [%] 0.5 m: 0.02 + 0.01 × Fm
1 m: 0.02 + 0.02 × Fm
2 m: 0.02 + 0.03 × Fm
Kvac Vac > 1V: (Vac - 1)
2
+ 1
Vac
≤
1V: (1 / Vac - 1) x 0.1 + 1
Meas Time 5: 1
4: 1
Kbw 3: 3 (at
≤
1 MHz), 4 (at > 1 MHz)
2: 4 (at
≤
1 MHz), 5 (at > 1 MHz)
1: 6 (at
≤
1 MHz), 10 (at > 1 MHz)
10 Hz
≤
F < 100 Hz: 100 / F x 2.5 m
Ω
Zs [
Ω
]
100 Hz
≤
F
≤
1 MHz: 2.5 m
Ω
1M Hz
≤
F
≤
30 MHz: Fm × 2.5 m
Ω
Cable length 0 m: 0
Zsl [
Ω
] 0.5, 1, 2m: 10Hz
≤
F < 100 Hz: 100 / F x 2 m
Ω
100 Hz
≤
F
≤
30 MHz: 2 m
Ω
10 Hz
≤
F < 100 Hz: 100 / F x 2.5 nS
Yo [S]
100 Hz
≤
F
≤
100 kHz: 2.5 nS
100 kHz < F
≤
30 MHz: Fm x 25 nS
Cable length 0 m: 0
Yol [S] 0.5 m: Fm × 2.5nS
1 m: Fm × 5nS
2 m: Fm × 10nS
8 - 18°C: 4
Kt 18 - 28°C: 1
28 - 38°C: 4