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Micronix PPS-28 series, Справочное руководство

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PPS-

28

 

Linear/Stepper Motor Positioner Stage

 

 

 
 

14  

 

Rev: 3.2

 

MICRONIX USA,LLC 

 

www.micronixusa.com 

 
 

Reference Manual 

5.2

 

Vacuum Environments 

5.2.1

 

Handling and Preparation 
 

When  preparing  the  stage  for  vacuum  environments,  take  the  necessary 
precautions (such as wearing gloves, clean room, clothing, etc.) when handling 
the  stage  as  to  avoid  any  contaminants.  Maximum  Bake-out  temperature  is 
100°C.  MICRONIX  USA  can  supply  the  stage  with  vacuum  compatible 
connectors:  9-pin  female  PEEK  connector  for  open  loop,  15-Pin  female  PEEK 
connector for closed loop with analog encoder, 25-pin female PEEK connector 
for closed loop with MII 6000 digital encoder. 

 

5.2.2

 

Open loop Installation & Wiring Diagram 

 

Connecting  an  open  loop  PPS-28  LMSM  stage  in  a  vacuum  chamber  requires 
the use of a feed through connector at the vacuum chamber wall. The vacuum 
compatible PPS-28 LMSM will be supplied with wiring for a straight through feed 
through,  not  a  cross  over  gender  changer.  MICRONIX  USA  supplies  test 
connectors  that  simulate  the  vacuum  feed  through  to  allow  for  functionality 
testing prior to installation in a vacuum chamber.  For details regarding the pin-
out  and  feed  through  specifications  see  the  Appendix  A.4.  Note:  Linear  motor 
versions are not available for vacuum environments. 

 

 
 
 
 
 
 
 
 
 

 

 

Temporary test 
connectors are 
standard. Requires 
customer supplied 
feed through 
connector 

Stepper Motor Version 

Содержание PPS-28 series

Страница 1: ...S e r i e s Reference Manual Precision Linear Stepper Motor Stage Open and Closed Loop Versions PPS 28...

Страница 2: ...PPS 28 Linear Stepper Motor Positioner Stage Reference Manual Rev 3 2 MICRONIX USA LLC Tel 949 480 0538 Fax 949 480 0538 Email info micronixusa com http micronixusa com...

Страница 3: ...1 2 X Y Mounting 10 5 Connecting the PPS 28 LMSM Stage 11 5 1 Atmospheric Environments 11 5 1 1 Open Loop Installation Wiring Diagram 11 5 1 2 Closed Loop Encoder Installation Wiring Diagram 12 5 2 V...

Страница 4: ...24 A 4 2 Limit Switch Schematic 24 A 5 Open Loop Vacuum Wiring Diagram 25 A 5 1 Straight Through 9 Pin Feed Through 25 A 6 Using an Analog Encoder 26 A 6 1 Analog Encoder Overview 26 A 6 2 Operating a...

Страница 5: ...motor Miniature cross roller bearings assure high stiffness and guiding accuracy for loads up to 50N horizontal orientation The PPS 28 SMLM is available in travel lengths of up to 102mm and an optiona...

Страница 6: ...Rev 3 2 MICRONIX USA LLC www micronixusa com Reference Manual PPS 28 26mm Open Loop Shown in center position PPS 28 26mm MII 6000 Digital Encoder Shown in center position PPS 28 26mm Analog Encoder Sh...

Страница 7: ...6 Load Characteristics Load Characteristics Fx N Fy N Fz N Mx Nm My Nm Mz Nm kax rad Nm kax rad Nm LM 001 2 peak 10 10 1 1 1 SM 007 5 50 50 1 1 1 Motor option LM 001 SM 007 Speed max mm sec 100 5 Enc...

Страница 8: ...gurations 2 1 PPS 28 SM Order Numbers Contact MICRONIX USA for custom applications and stacking configurations Order No PPS 28 2 1 Stepper Motor SM 007 2 26mm Travel 1 51mm Travel 3 76mm Travel 4 102m...

Страница 9: ...sa com Reference Manual Contact MICRONIX USA for custom applications and stacking configurations Order No PPS 28 3 Linear Motor LM 001 3 26mm Travel 1 51mm Travel 3 102mm Travel 5 Analog 1Vpp 2 Digita...

Страница 10: ...teed to be within specification at 20 C 5 C Be sure to use the stage under the following conditions Mount to a clean and flat surface which is free of debris burrs or dings An indoor atmosphere free o...

Страница 11: ...to move the carriage of the linear motor configurations manually without damaging the stage however for stepper versions the motor must be driven by a controller to reposition the carriage Stepper Mot...

Страница 12: ...Stepper Motor Linear Motor Travel L A Travel L A 26mm 45 37 26mm 60 52 51mm 90 82 51mm 90 82 76mm 120 112 102mm 150 142 102mm 150 142 Direction of Travel Requires 4x M1 5 x 4mm Dowel Pins 6x M2 5 x 6...

Страница 13: ...rmation refer to the appropriate MMC controller manual 5 1 1 Open Loop Installation Wiring Diagram Connecting the PPS 28 LMSM stage in an open loop configuration only requires that the D sub 9 Pin mal...

Страница 14: ...Installation Wiring Diagram Using the PPS 28 LMSM stage with an encoder requires a closed loop compatible controller that recognizes encoder feedback Connect the stage as shown below 5 1 2 1 Analog E...

Страница 15: ...PPS 28 Linear Stepper Motor Positioner Stage 13 Rev 3 2 MICRONIX USA LLC www micronixusa com Reference Manual Linear Motor Version...

Страница 16: ...ector for closed loop with MII 6000 digital encoder 5 2 2 Open loop Installation Wiring Diagram Connecting an open loop PPS 28 LMSM stage in a vacuum chamber requires the use of a feed through connect...

Страница 17: ...ith wiring for a straight through feed through not a cross over gender bender MICRONIX USA supplies test connectors that simulate the vacuum feed through to allow for functionality testing prior to in...

Страница 18: ...28 Linear Stepper Motor Positioner Stage 16 Rev 3 2 MICRONIX USA LLC www micronixusa com Reference Manual 6 Dimensions 6 1 1 PPS 28 Stepper Motor Analog Encoder Grey parts for external closed loop on...

Страница 19: ...PS 28 Linear Stepper Motor Positioner Stage 17 Rev 3 2 MICRONIX USA LLC www micronixusa com Reference Manual 6 1 2 PPS 28 Stepper Motor MII 6000 Digital Encoder Grey parts for external closed loop onl...

Страница 20: ...PPS 28 Linear Stepper Motor Positioner Stage 18 Rev 3 2 MICRONIX USA LLC www micronixusa com Reference Manual 6 1 3 PPS 28 Linear Motor Analog Encoder Grey parts for external closed loop only...

Страница 21: ...PS 28 Linear Stepper Motor Positioner Stage 19 Rev 3 2 MICRONIX USA LLC www micronixusa com Reference Manual 6 1 4 PPS 28 Linear Motor MII 6000 Digital Encoder Grey parts for external closed loop only...

Страница 22: ...nfigurations available upon request Note Stacking compatibility for all motor configurations Positioning according to No Adapters X Y 51x51mm X Y 51x51mm X Y 51x51mm X Y 51x35mm X Y 26x11mm with PPS 2...

Страница 23: ...he stage Keep hands clear of all moving parts while the stage is in motion to avoid personal injury Do not touch the bearings as this will contaminate the lubrication and jeopardize the longevity of t...

Страница 24: ...tions Stepper Motor Pin Function Wire Color 1 Motor A Yellow 2 Motor A Green 3 Motor B Black 4 Motor B Red 5 N A N A 6 Limit Switch Violet 7 Limit Switch Blue 8 5V Orange 9 Ground Brown Solder shield...

Страница 25: ...shield to housing S040D Linear Motor Continuous Force 0 29 N Continuous Current 0 3 Arms Acceleration Force 1 2 N Acceleration Current 1 1 Arms Force Constant Kf 1 0 N amp Back EMF Ke 0 4 V m s Resist...

Страница 26: ...mperature range 40 to 150 C and exceptionally long life The hall effect limit switches are factory calibrated to ensure advertised travel length and cannot be adjusted by the customer A 4 1 Hall Effec...

Страница 27: ...ale Dsub 9 Pin 1 5m Wiring Diagram A 5 1 Straight Through 9 Pin Feed Through Stepper Motor Connector Pinout Description Color L1 L2 L3 L4 L5 Motor Phase A Yellow 5 5 1 1 White Green TP 1 Motor Phase A...

Страница 28: ...will be supplied with a 15 pin connector that incorporates both motor and encoder signals A 6 2 Operating and Electrical Specifications A 6 3 Analog Output Pins 1 2 6 and 7 A 6 4 Index Window Pins 3 A...

Страница 29: ...2 L3 L4 L5 L6 Motor B Orange 1 1 13 13 Brown 4 Ground Brown 14 14 25 25 Black 9 Motor B Blue 2 2 12 12 White Brown TP 3 5V Orange 15 15 24 24 Red 8 Motor A Red 3 3 11 11 Green 2 Limit Blue 16 16 23 23...

Страница 30: ...es misalignment of the Encoder Head if this occurs contact MICRONIX USA Do not adjust the Encoder Head or scale For more information refer to MicroE Systems Mercury Encoders A 7 1 Encoder Module Pin o...

Страница 31: ...ndex pulse may be aligned with other states of A or B than the ones shown Above are with reference to the sensor s optical centerline A 7 4 Resolution All closed loop stages are supplied with 20 m sca...

Страница 32: ...wn 14 14 25 25 Black 9 Motor B Blue 2 2 12 12 White Brown TP 3 5V Orange 15 15 24 24 Red 8 Motor A Red 3 3 11 11 Green 2 Limit Blue 16 16 23 23 White Violet TP 7 Motor A Yellow 4 4 10 10 White Green T...

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