3Flex Service Manual
Upper Manifold Assembly
Aug 2013
2-7
Upper Manifold Assembly
Shown below is a graphical representation of the upper manifold assembly. Refer to the table below
the graphic for component identification, as well as a link to additonal information for each componet.
This configuration may differ depending on whether the instrument has 1, 2, or 3 ports.
A
10-Torr manifold transducer
See also
B
0-1-Torr transducers
C
10-Torr transducers
D
1000-Torr manifold transducer
E
Po port button-head transducer
F
Sample ports button-head transducers
G
Dual transducer PCBs
See also
Analysis Transducer Interface PCB, P/N:
H
Heater assembly
I
Gas inlets
See also
J
Turbo pump
See also
K
Po port
See also
L
Sample Ports
A
I
K
B
C
D
J
F
E
G
H
B
B
C
C
L